Device for surface coating or lacquering of substrates
AssigneeSingulus Technologies AG
InventorsEggo Sichmann, Reinhard Gerigk
Life of this patent
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Abstract
An apparatus for surface coating or for lacquering a substrate, such as a disk-shaped substrate 2, which can be placed on a substrate carrier 14 and can be driven or given a rotating movement by means of a drive device, wherein the material or the lacquer fluid 5 to be applied is placed on the substrate 2 from a feed device 6. The fluid medium or the lacquer 4 released by the substrate support 14 is delivered at least to a first collecting reservoir 17 which is connected with at least one filter 28, from where the fluid is indirectly or directly conducted via a pump 29 to the first collecting reservoir 27, wherein an underpressure can be set between a first flow-off line 33 of the first collecting reservoir 27 and the pump 29.
Claims16
Apparatus for coating a substrate with a coating substance while the substrate is being rotated, comprising:
- a feed device (6) connected for delivering the coating substance to the substrate so that a portion of the coating substance flows away from the substrate as excess coating substance due to rotation of the substrate;
- a first collecting reservoir (27) for receiving and storing the excess coating substance, said first collecting reservoir having an outflow line (33) for transporting coating substance away from said first collecting reservoir;
- a second collecting reservoir (31) for receiving and storing coating substance;
- at least one filter (28) having an inlet connect to receive coating substance from said first collecting reservoir;
- a fluid circuit including a first pump (29) and flow directing elements for selectively transporting coating substance from said filter, via said pump, to a selected one of said first collecting reservoir and said second collecting reservoir, whereby a low pressure can be set in the fluid circuit between the outflow line and at least a selected one of said second collecting reservoir and said pump.
Apparatus for coating a substrate with a coating substance while the substrate is mounted on a substrate carrier, comprising:
- drive means for rotating the substrate carrier and the substrate mounted on the substrate carrier;
- a feed device (6) connected for delivering the coating substance to the substrate so that a portion of the coating substance flows away from the substrate as excess coating substance due to rotation of the substrate;
- a first collecting reservoir (27) for receiving and storing the excess coating substance, said first collecting reservoir having an outflow line (33) for transporting coating substance away from said first collecting reservoir;
- at least one filter (28) having an inlet connect to receive coating substance from said first collecting reservoir;
- a fluid circuit including a first pump (29) and flow directing elements for selectively transporting coating substance from said filter, via said pump, back to said first collecting reservoir, whereby a low pressure can be set in the fluid circuit between the outflow line and at least a selected one of a second collecting reservoir and said pump.
Dependencies are inferred from the claim text.