System and method for controlled delivery of liquified gases
AssigneeAmerican Air Liquide, Inc.
InventorsBenjamin Jurcik, Richard Udischas, Hwa-Chi Wang
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Abstract
Provided is a novel system and method for delivery of a gas from a liquified state. The system includes: (a) a compressed liquified gas cylinder having a gas line connected thereto through which the gas is withdrawn; (b) a gas cylinder cabinet in which the gas cylinder is housed; and (c) means for increasing the heat transfer rate between ambient and the gas cylinder without increasing the gas cylinder temperature above ambient temperature. The apparatus and method allow for the controlled delivery of liquified gases from gas cabinets at high flowrates. Particular applicability is found in the delivery of gases to semiconductor process tools.
Claims31
A semiconductor processing system, comprising a semiconductor processing apparatus and a system for delivery of a gas from a liquified state, the system for delivery of a gas comprising:
- (a) a compressed liquified gas cylinder having a gas line connected thereto through which the gas is withdrawn;
- (b) a gas cylinder cabinet in which the gas cylinder is housed;
- and
- (c) means for increasing the heat transfer rate between ambient and the gas cylinder without increasing the gas cylinder temperature above ambient temperature.
A system for delivery of a gas from a liquified state, the system comprising:
- (a) a compressed liquified gas cylinder having a gas line connected thereto through which the gas is withdrawn;
- (b) a gas cylinder cabinet in which the gas cylinder is housed;
- and
- (c) means for increasing the heat transfer rate between ambient and the gas cylinder without increasing the gas cylinder temperature above ambient temperature, wherein the superheating means comprises a heated gas filter or a heated purifier.
A method for delivery of a gas from a liquified state to a semiconductor processing apparatus, the method comprising:
- (a) providing a compressed liquified gas in a gas cylinder having a gas line connected thereto, the gas cylinder being housed in a gas cylinder cabinet;
- (b) increasing the heat transfer rate between an ambient and the gas cylinder without increasing the gas cylinder temperature above the ambient temperature;
- and
- (c) delivering the gas from the gas cylinder to a semiconductor processing apparatus.
Dependencies are inferred from the claim text.