XY table using a linear electromagnetic actuator
AssigneeNippon Thompson Co., Ltd.
InventorsTakuo Kondo, Shouji Fujisawa, Norimitsu Kitade
Life of this patent
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Abstract
An XY table that uses linear electromagnetic actuators to achieve faster operating speeds, improve durability, prevent generation of dust and reduce size (make more compact). The cord for supplying electrical power to the linear electromagnetic actuators and the cords for obtaining signals from each type of sensor are concentrated at an intermediate movement member (X table), and gathered together into a single cord that is used for connection to the outside (controller, etc.). As a result, detrimental effects caused by the cord are minimized which enables the XY table to demonstrate the performance described above.
Claims7
An XY table equipped with:
- relative movement members arranged on both outer sides, an intermediate movement member arranged between said relative movement members, a guiding device that guides said relative movement members and intermediate movement member while allowing to freely perform relative movement, and linear electromagnetic actuators that provide driving force between each of said relative movement members and said intermediate movement member;
- wherein, each primary side of said linear electromagnetic actuators is provided on said intermediate movement member, and supply of electrical power and so forth to said linear electromagnetic actuators is performed with said intermediate movement member.
Dependencies are inferred from the claim text.