US 5,757,494 A · System and method for improving data acquisition capability in spectroscopic ellipsometers

An ellipsometer system which enables accurate and precise determination of PSI and DELTA values of essentially any investigatable sample system;

said ellipsometer system comprising means for setting at least one polarization state in a beam of polarized light and means for identifying, and means for monitoring, a polarization state in said polarized beam of light, after an interaction thereof with a sample system;
between said means for setting at least one polarization state in a beam of polarized light and said means for monitoring a polarization state in said polarized beam of light, there being present at least one adjustable means for controlling an ellipsometric phase angle between orthogonal components in a polarized beam of light, which adjustable means for controlling an ellipsometric phase angle, in use, allows sequentially setting a plurality of ellipsometric phase angles between orthogonal components in a polarized beam of light which is caused by said ellipsometer system to interact with a sample system, such that in use said ellipsometric phase angle can be set sequentially through a plurality of settings while ellipsometric data is obtained by said means for monitoring a polarization state in said polarized beam of light at at least two selected settings of said at least one adjustable means for controlling an ellipsometric phase angle;
which obtained ellipsometric data can be utilized in determination of PSI and DELTA values of an investigated sample system, where said determination of said PSI and DELTA values includes compensating for the effects on said obtained ellipsometric data of said at least two selected setting of said at least one adjustable means for controlling an ellipsometric phase angle, on said obtained ellipsometric data;
said ellipsometer system being further comprised of computational means which performs determination of investigated sample system PSI and DELTA values, which computational means utilizes data obtained with said at least one adjustable means for controlling ellipsometric phase angle between orthogonal components in a polarized beam of light, being set to at least two selected settings, and which computational means performs compensation of the effects of said at least one adjustable means for controlling ellipsometric phase angle between orthogonal components, on said utilized ellipsometric data obtained at said at least two selected settings of said at least one adjustable means for controlling ellipsometric phase angle between orthogonal components, in determining sample system PSI and DELTA values.

1 more element

A Method of determination of sample system PSI and DELTA values with improved accuracy and precision comprising, in a functional order, the steps of:

providing an ellipsometer system which enables accurate and precise determination of PSI and DELTA values of essentially any investigatable sample system;
said ellipsometer system comprising means for setting at least one polarization state in a beam of polarized light and means for identifying, and means for monitoring, a polarization state in said polarized beam of light, after an interaction thereof with a sample system;
between said means for setting at least one polarization state in a beam of polarized light and said means for monitoring a polarization state in said polarized beam of light, there being present at least one adjustable means for controlling an ellipsometric phase angle between orthogonal components in a polarized beam of light, which adjustable means for controlling an ellipsometric phase angle, in use, allows sequentially setting a plurality of ellipsometric phase angles between orthogonal components in a polarized beam of light which is caused by said ellipsometer system to interact with a sample system, such that in use said ellipsometric phase angle can be set sequentially through a plurality of settings while ellipsometric data is obtained by said means for monitoring a polarization state in said polarized beam of light at at least two selected settings of said at least one adjustable means for controlling an ellipsometric phase angle;
which obtained ellipsometric data can be utilized in determination of PSI and DELTA values of an investigated sample system, where said determination of said PSI and DELTA values includes compensating for the effects on said obtained ellipsometric data of said at least two selected setting of said at least one adjustable means for controlling an ellipsometric phase angle, on said obtained ellipsometric data;
said ellipsometer system being further comprised of computational means which performs determination of investigated sample system PSI and DELTA values, which computational means utilizes data obtained with said at least one adjustable means for controlling ellipsometric phase angle between orthogonal components in a polarized beam of light, being set to at least two selected settings, and which computational means performs compensation of the effects of said at least one adjustable means for controlling ellipsometric phase angle between orthogonal components, on said utilized ellipsometric data obtained at said at least two selected settings of said at least one adjustable means for controlling ellipsometric phase angle between orthogonal components, in determining sample system PSI and DELTA values;
placing a sample system to be investigated into said ellipsometer system and causing a beam of polarized light from said means for setting at least one polarization state in a beam of polarized light to interact therewith and enter said means for monitoring a polarization state;
adjusting said at least one adjustable means for controlling ellipsometric phase angle between said orthogonal components to be sequentially set to a plurality of settings while ellipsometric data is obtained by said means for monitoring a polarization state in said polarized beam of light at at least two selected settings from said plurality settings of said at least one adjustable means for controlling a value of ellipsometric phase angle between said orthogonal components;
causing said computational means to determine investigated sample system PSI and DELTA values by a method which performs compensation of the effects of said at least one adjustable means for controlling ellipsometric phase angle between orthogonal components in a polarized beam of light on said ellipsometric data obtained at said at least two selected settings of said at least one adjustable means for controlling ellipsometric phase angle between orthogonal components in a polarized beam of light which is caused to interact with a sample system, in determining sample system PSI and DELTA values;
and
optionally determining at least some of members of the group consisting of:
(the "Handedness", Stokes Vector, and Jones and Mueller Matrix components) of said polarized beam of light and investigated sample system.

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A method of reducing the sensitivity of rotating analyzer ellipsometer (RAE) PSI and DELTA transfer functions to measured ellipsometric ALPHA and ellipsometric BETA parameter values which is applicable over spectroscopic range, which method enables acquiring data from a (RAE) system which is of an accuracy and precision which allows calculation of sample system PSI and DELTA, even where other than the Brewster angle of incidence (AOI) of a polarized beam of light to a sample system is utilized, and even where DELTA is near zero (0.0) or one-hundred-eighty (180) degrees, which method also enables determination of the "Handedness" of a beam of polarized light utilized in said RAE, said method comprising the steps of:

providing a (RAE) system which in use comprises:
a polarization state generator system comprising:
a source of a beam of light;
a means for setting a polarization state in said beam of light;
a sample system;
and
a polarization state detector system comprising:
a rotating analyzer;
and
a detector system;
which (RAE) further comprises at least one Berek-type variable retarder placed between said polarization state generator system, and said polarization state detector system;
such that during use a beam of light is caused to exit said source of a beam of light, and have an ellipsometric ALPHA parameter determining state of polarization effected therein by said means for setting a polarization state;
which polarized beam of light is caused to interact with said sample system, and with said at least one Berek-type variable retarder placed between said polarization state generator system and said polarization state detector system;
which polarization state generator system can be adjusted to set a value of ellipsometric ALPHA and which said at least one Berek-type variable retarder can be tilted, so as to set a value of ellipsometric BETA parameter, such that said ellipsometric ALPHA and ellipsometric BETA are in ranges in which a transfer function which mediates determining DELTA from a measured ellipsometric ALPHA parameter and ellipsometric BETA parameter is relatively immune to noise and errors in measurement etc. of said ellipsometric BETA parameter;
causing a beam of light to exit said source of a beam of light, and causing an ellipsometric ALPHA setting state of polarization therein with said means for setting a polarization state;
causing said resulting polarized beam of light to interact with said sample system, and with said at least one Berek-type variable retarder placed between said polarization state generator system and said polarization state detector system, and with said polarization state detector system;
adjusting said means for setting a state of polarization to at least one setting and said at least one Berek-type variable retarder to, sequentially, a plurality of tilt settings while obtaining ellipsometric data;
and determining PSI and DELTA values utilizing said obtained ellipsometric ALPHA and ellipsometric BETA parameter values by a mathematical technique that compensates adjustments made to said means for setting a state of polarization and said at least one Berek-type variable retarder on measured ellipsometric ALPHA and ellipsometric BETA parameter values.

15 more elements

A method of reducing the sensitivity of rotating analyzer ellipsometer (RAE) PSI and DELTA transfer functions to measured ellipsometric ALPHA and ellipsometric BETA parameter values which is applicable over spectroscopic range, which method enables acquiring data from a (RAE) system which is of an accuracy and precision which allows calculation of sample system PSI and DELTA, even where other than the Brewster angle of incidence (AOI) of a polarized beam of light to a sample system is utilized, and even where DELTA is near zero (0.0) or one-hundred-eighty (180) degrees, which method also enables determination of the "Handedness" of a beam of polarized light utilized in said (RAE), said method comprising the steps of:

providing a (RAE) system which in use comprises:
a polarization state generator system comprising:
a source of a beam of light;
a means for setting a polarization state in said beam of light;
a sample system;
and
a polarization state detector system comprising:
a rotating analyzer;
and
a detector system;
which (RAE) further comprises at least one variable retarder selected from the group consisting of:
a system of at least two fixed-order-waveplate-type retarders which can be rotated with respect to one another, each about an axis perpendicular to an optical axes thereof, said optical axes being parallel to the surface of said fixed-order-waveplate-type retarders;
a Babinet dual wedge-type variable retarder;
a Soleil dual wedge-type variable retarder;
a Kerr electro-optical-type variable retarder;
a Pockels electro-optical-type variable retarder;
a liquid crystal electro-optical-type variable retarder;
a Voigt magnetic-faraday-effect variable retarder;
and
a Cotton-Mouton magnetic-faraday-effect variable retarder;
a Berek-type variable retarder;
said at least one variable retarder being placed between said Polarization State generator system, through which said polarized beam of light must pass during use, and said Polarization State detector system;
causing a beam of light to exit said source of a beam of light, and causing an ellipsometric ALPHA setting state of polarization therein with said means for setting a polarization state;
causing said resulting polarized beam of light to interact with said sample system, and with said at least one variable retarder placed between said polarization state generator system and said polarization state detector system, adjustment of said variable retarder serving to set a value of said ellipsometric BETA parameter;
adjusting said means for setting a state of polarization to at least one setting and said at least one variable retarder to, sequentially, a plurality of settings while obtaining ellipsometric data;
and determining PSI and DELTA values utilizing said obtained ellipsometric ALPHA and ellipsometric BETA parameter values by a mathematical technique that compensates adjustments made to said means for setting a state of polarization and said at least one variable retarder on measured ellipsometric ALPHA and ellipsometric BETA parameter values.

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A rotating analyzer ellipsometer system (RAE) comprising:

a polarization state generator system comprising:
a source of a beam of light;
a means for setting a polarization state in said beam of light;
a sample system;
and
a polarization state detector system comprising:
a rotating analyzer;
and
a detector system;
which (RAE) further comprises at least one Berek-type variable retarder placed between said polarization state generator system, and said polarization state detector system;
such that during use a beam of light is caused to exit said source of a beam of light, and have an ellipsometric ALPHA parameter determining state of polarization effected therein by said means for setting a polarization state;
which polarized beam of light is caused to interact with said sample system, and with said at least one Berek-type variable retarder placed between said polarization state generator system and said polarization state detector system;
which said at least one Berek-type variable retarder can be tilted so as to set a value of ellipsometric BETA parameter in a range in which a transfer function which mediates determining DELTA from a measured ellipsometric ALPHA parameter and ellipsometric BETA parameter is relatively immune to noise and errors in measurement etc. of said ellipsometric BETA parameter;
said (RAE) being further comprised of computational means which performs said determination of said sample system PSI and DELTA, said determination of said sample system PSI and DELTA requiring input of data acquired with said ellipsometric BETA setting Berek-type variable retarder set in a plurality of tilt positions, which computational means compensates acquired data input thereto, for the effects of said required plurality of ellipsometric BETA setting Berek-type variable retarder tilts.

11 more elements

A rotating analyzer ellipsometer system (RAE) comprising:

a polarization state generator system comprising:
a source of a beam of light;
a means for setting a polarization state in said beam of light;
a sample system;
and
a polarization state detector system comprising;
a rotating analyzer;
and
a detector system;
which (RAE) further comprises at least one variable retarder selected from the group consisting of:
a system of at least two fixed-order-waveplate-type retarders which can be rotated with respect to one another, each about an axis perpendicular to an optical axes thereof, said optical axes being parallel to the surface of said fixed-order-waveplate-type retarders;
a Babinet dual wedge-type variable retarder;
a Soleil dual wedge-type variable retarder;
a Kerr electro-optical-type variable retarder;
a Pockels electro-optical-type variable retarder;
a liquid crystal electro-optical-type variable retarder;
a Voigt magnetic-faraday-effect variable retarder;
a Cotton-Mouton magnetic-faraday-effect variable retarder;
and
a Berek-type variable retarder;
such that in use said at least one variable retarder is placed between said polarization state generator system, and said polarization state detector system;
such that during use a beam of light is caused to exit said source of a beam of light, and have an ellipsometric ALPHA parameter determining state of polarization effected therein by said means for setting a polarization state;
which polarized beam of light is caused to interact with said sample system, and with said at least one variable retarder placed between said polarization state generator system and said polarization state detector system;
which said at least one variable retarder can be adjusted so as to set a value of ellipsometric BETA parameter in a range in which a transfer function which mediates determining DELTA from a measured ellipsometric ALPHA parameter and ellipsometric BETA parameter is relatively immune to noise and errors in measurement etc. of said ellipsometric BETA parameter;
said (RAE) being further comprised of computational means which performs said determination of said sample system PSI and DELTA, said determination of said sample system PSI and DELTA requiring input of data acquired with said ellipsometric BETA setting variable retarder set in a plurality of positions, which computational means compensates acquired data input thereto, for the effects of said required plurality of ellipsometric BETA setting variable retarder positions.

22 more elements

A method of determining sample system PSI and DELTA values by use of a rotating analyzer ellipsometer (RAE) system, comprising the step of:

providing an (RAE) system comprising
a polarization state generator system comprising:
a source of a beam of light;
a means for setting a polarization state in said beam of light;
a sample system;
and
a polarization state detector system comprising;
a rotating analyzer;
and
a detector system;
which (RAE) system further comprises at least one variable retarder selected from the group consisting of:
a system of at least two fixed-order-waveplate-type retarders which can be rotated with respect to one another, each about an axis perpendicular to an optical axes thereof, said optical axes being parallel to the surface of said fixed-order-waveplate-type retarders;
a Babinet dual wedge-type variable retarder;
a Soleil dual wedge-type variable retarder;
a Kerr electro-optical-type variable retarder;
a Pockels electro-optical-type variable retarder;
a liquid crystal electro-optical-type variable retarder;
a Voigt magnetic-faraday-effect variable retarder;
and
a Cotton-Mouton magnetic-faraday-effect variable retarder;
a Berek-type variable retarder;
said at least one variable retarder being placed between said polarization state generator system, and said polarization state detector system;
such that during use said at least one variable retarder can be adjusted so as to set a value of ellipsometric BETA parameter in a range in which a transfer function which mediates determining DELTA from a measured ellipsometric ALPHA parameter and ellipsometric BETA parameter is relatively immune to noise and errors in measurement etc. of ellipsometric BETA parameter;
which method further comprises the steps of:
measuring a plurality of sample system ellipsometric ALPHA and ellipsometric BETA parameter pairs as a function of at least one means for setting a polarization state in said beam of light setting(s), and a plurality of variable retarder settings;
and
applying a mathematical technique to said plurality of measured ellipsometric ALPHA and ellipsometric BETA parameter pairs to determine sample system PSI and DELTA values, while compensating for the presence of said at least one variable retarder.

24 more elements

A method of reducing the sensitivity of rotating polarizer ellipsometer (RPE) PSI and DELTA transfer functions to measured ellipsometric ALPHA and ellipsometric BETA parameter values which is applicable over spectroscopic range, which method enables acquiring data from a (RPE) system which is of an accuracy and precision which allows calculation of sample system PSI and DELTA, even where other than the Brewster angle of incidence (AOI) of a polarized beam of light to a sample system is utilized, and even where DELTA is near zero (0.0) or one-hundred-eighty (180) degrees, which method also enables determination of the "Handedness" of a beam of polarized light utilized in said (RPE), said method comprising the steps of:

providing a (RPE) system which in use comprises:
a polarization state generator system comprising:
a source of a beam of light;
a rotating polarizer;
a sample system;
and
a polarization state detector system comprising:
means for identifying a polarization state in said beam of light;
and
a detector system;
which (RPE) further comprises at least one Berek-type variable retarder placed between said polarization sate generator system, and said polarization state detector system;
such that during use a beam of light is caused to exit said source of a beam of light, and pass through said rotating polarizer in said polarization state generator and emerge as a series of polarization states;
which beam of light in a series of polarization states is caused to interact with said sample system, and with said at least one Berek-type variable retarder placed between said polarization state generator system and said polarization state detector system;
which at least one Berek-type variable retarder can be tilted so as to set a value of an ellipsometric BETA parameter in a range in which a transfer function which enables determining DELTA from a measured ellipsometric ALPHA parameter and ellipsometric BETA parameter is relatively immune to noise and errors in measurement etc. of said ellipsometric BETA parameter;
causing a beam of light to exit said source of a beam of light, pass through and emerge from said rotating polarizer in a series of polarization states;
causing said resulting beam of light in a series of polarization states to interact with said sample system, with said at least one Berek-type variable retarder placed between said polarization state generator system and said polarization state detector system and which serves to set a value of said ellipsometric BETA parameter, and with said means for identifying a state of polarization which serves to set a value of said ellipsometric ALPHA parameter;
adjusting said means for identifying a state of polarization to at least one setting and said at least one Berek-type variable retarder to, sequentially, a plurality of tilt settings while obtaining ellipsometric data;
and determining PSI and DELTA values utilizing said obtained ellipsometric ALPHA and ellipsometric BETA parameter values by a mathematical technique that compensates adjustments made to said means for identifying a state of polarization and said at least one Berek-type variable retarder in said measured ellipsometric ALPHA and ellipsometric BETA parameter values.

15 more elements

A method of reducing the sensitivity of rotating polarizer ellipsometer (RPE) PSI and DELTA transfer functions to measured ellipsometric ALPHA and ellipsometric BETA parameter values which is applicable over spectroscopic range, which method enables acquiring data from a (RPE) system which is of an accuracy and precision which allows calculation of sample system PSI and DELTA, even where other than the Brewster angle of incidence (AOI) of a polarized beam of light to a sample system is utilized, and even where DELTA is near zero (0.0) or one-hundred-eighty (180) degrees, which method also enables determination of the "Handedness" of a beam of polarized light utilized in said (RPE), said method comprising the steps of:

providing a (RPE) system which in use comprises:
a polarization state generator system comprising:
a source of a beam of light;
a rotating polarizer;
a sample system;
and
a polarization state detector system comprising:
means for identifying a polarization state in said beam of light;
and
a detector system;
which (RPE) system further comprises at least one variable retarder selected from the group consisting of:
a system of at least two fixed-order-waveplate-type retarders which can be rotated with respect to one another, each about an axis perpendicular to an optical axes thereof, said optical axes being parallel to the surface of said fixed-order-waveplate-type retarders;
a Babinet dual wedge-type variable retarder;
a Soleil dual wedge-type variable retarder;
a Kerr electro-optical-type variable retarder;
a Pockels electro-optical-type variable retarder;
a liquid crystal electro-optical-type variable retarder;
a Voigt magnetic-faraday-effect variable retarder;
and
a Cotton-Mouton magnetic-faraday-effect variable retarder;
a Berek-type retarder;
said at least one variable retarder being placed between said polarization state generator system, through which said polarized beam of light must pass during use, and said polarization state detector system;
causing a beam of light to exit said source of a beam of light, pass through and emerge from said rotating polarizer in a series of polarization states;
causing said resulting beam of light in a series of polarization states to interact with said sample system, with said at least one variable retarder placed between said polarization state generator system and said polarization state detector system and which serves to set a value of said ellipsometric BETA parameter, and with said means for identifying a state of polarization which serves to set a value of said ellipsometric ALPHA parameter;
adjusting said means for identifying a state of polarization to at least one setting and said at least one variable retarder to, sequentially, a plurality of settings while obtaining ellipsometric data;
and determining PSI and DELTA values utilizing said obtained ellipsometric ALPHA and ellipsometric BETA parameter values by a mathematical technique that compensates adjustments made to said means for identifying a state of polarization and said at least one variable retarder in said measured ellipsometric ALPHA and ellipsometric BETA parameter values.

23 more elements

A rotating polarizer ellipsometer system (RPE) comprising:

a polarization state generator system comprising:
a source of a beam of light;
a rotating polarizer;
a sample system;
and
a polarization state detector system comprising;:
means for identifying a polarization state in said beam of light;
and
a detector system;
which (RPE) further comprises at least one Berek-type variable retarder placed between said polarization state generator system, and said polarization state detector system;
such that during use a beam of light is caused to exit said source of a beam of light, and pass through said rotating polarizer in said polarization state generator and emerge as in a series of polarization states;
which beam of light in a series of polarization states is caused to interact with said sample system, and with said at least one Berek-type variable retarder placed between said polarization state generator system and said polarization state detector system;
which at least one Berek-type variable retarder can be tilted so as to set a value of an ellipsometric BETA parameter in a range in which a transfer function which enables determining DELTA from a measured ellipsometric ALPHA parameter and ellipsometric BETA parameter is relatively immune to noise and errors in measurement etc. of said ellipsometric BETA parameter;
said (RPE) being further comprised of computational means which performs said determination of said sample system PSI and DELTA, said determination of said sample system PSI and DELTA requiring input of data acquired with said ellipsometric BETA setting Berek-type variable retarder set in a plurality of tilt positions, which computational means compensates acquired data input thereto, for the effects of said required plurality of ellipsometric BETA setting Berek-type variable retarder tilts.

11 more elements

A rotating polarizer ellipsometer system (RPE) comprising:

a polarization state generator system comprising:
a source of a beam of light;
a rotating polarizer;
a sample system;
and
a polarization state detector system comprising:
means for identifying a polarization state in said beam of light;
and
a detector system;
which (RPE) further comprises at least one variable retarder selected from the group consisting of:
a system of at least two fixed-order-waveplate-type retarders which can be rotated with respect to one another, each about an axis perpendicular to an optical axes thereof, said optical axes being parallel to the surface of said fixed-order-waveplate-type retarders;
a Babinet dual wedge-type variable retarder;
a Soleil dual wedge-type variable retarder;
a Kerr electro-optical-type variable retarder;
a Pockels electro-optical-type variable retarder;
a liquid crystal electro-optical-type variable retarder;
a Voigt magnetic-faraday-effect variable retarder;
a Cotton-Mouton magnetic-faraday-effect variable retarder;
and
a Berek-type variable retarder;
said at least one variable retarder being placed between said polarization state generator system, and said polarization state detector system;
such that during use a beam of light is caused to exit said source of a beam of light, and pass through said rotating polarizer in said polarization state generator and emerge as in a series of polarization states;
which beam of light in a series of polarization states is caused to interact with said sample system, and with said at least one variable retarder placed between said polarization state generator system and said polarization state detector system;
which at least one variable retarder can be adjusted so as to set a value of an ellipsometric BETA parameter in a range in which a transfer function which enables determining DELTA from a measured ellipsometric ALPHA parameter and ellipsometric BETA parameter is relatively immune to noise and errors in measurement etc. of said ellipsometric BETA parameter;
said (RPE) being further comprised of computational means which performs said determination of said sample system PSI and DELTA, said determination of said sample system PSI and DELTA requiring input of data acquired with said ellipsometric BETA setting variable retarder set in a plurality of positions, which computational means compensates acquired data input thereto, for the effects of said required plurality of ellipsometric BETA setting variable retarder positions.

22 more elements

A method of determining sample system PSI and DELTA values by use of a rotating polarizer ellipsometer (RPE) system, comprising the step of:

providing an (RPE) system comprising:
a polarization state generator system comprising:
a source of a beam of light;
a rotating polarizer;
a sample system;
and
a polarization state detector system comprising:
a means for identifying a polarization state in said beam of light;
a detector system;
which (RPE) system further comprises at least one variable retarder selected from the group consisting of
a system of at least two fixed-order-waveplate-type retarders which can be rotated with respect to one another, each about an axis perpendicular to an optical axes thereof, said optical axes being parallel to the surface of said fixed-order-waveplate-type retarders;
a Babinet dual wedge-type variable retarder;
a Soleil dual wedge-type variable retarder;
a Kerr electro-optical-type variable retarder;
a Pockels electro-optical-type variable retarder;
a liquid crystal electro-optical-type variable retarder;
a Voigt magnetic-faraday-effect variable retarder;
and
a Cotton-Mouton magnetic-faraday-effect variable retarder;
a Berek-type variable retarder;
said at least one variable retarder being placed between said polarization state generator system, and said polarization state detector system;
such that during use said at least one variable retarder can be adjusted so as to set a value of ellipsometric BETA parameter in a range in which a transfer function which enables determining DELTA from a measured ellipsometric ALPHA parameter and ellipsometric BETA parameter is relatively immune to noise and errors in measurement etc. of ellipsometric BETA parameter;
which method further comprises the steps of:
measuring a plurality of sample system ellipsometric ALPHA and ellipsometric BETA parameter pairs as a function of at least one means for identifying a polarization state in said beam of light setting(s), and a plurality of variable retarder settings;
and
applying a mathematical technique to said plurality of measured ellipsometric ALPHA and ellipsometric BETA parameter pairs to determine sample system PSI and DELTA values while compensating for the presence of said at least one variable retarder.

23 more elements

System and method for improving data acquisition capability in spectroscopic ellipsometers

Life of this patent

System and method for improving data acquisition capability in spectroscopic ellipsometers

Life of this patent

Abstract

Claims31