Drive control apparatus
AssigneeCanon Kabushiki Kaisha
InventorsMikio Sato, Hiroaki Takeishi
Life of this patent
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AssigneeCanon Kabushiki Kaisha
InventorsMikio Sato, Hiroaki Takeishi
Estimating the term…
A target state quantity generating unit generates a target state quantity for a stage, and a laser interferometer detects the current state quantity (position) of the stage. Based on the target state quantity and the detected state quantity (position), a compensation system constituted by a variable phase compensator and a PID compensator controls the driving operation of the stage. A memory unit stores forward and reverse gain tables, and provides adjustment information for adjusting the compensation system in correspondence with the state quantity of the stage. The corresponding gain table is selected on the basis of the driving direction of the stage, and the adjustment information is read out from the selected gain table on the basis of the position of the stage. The corner frequency of the variable phase compensator is changed on the basis of the readout adjustment information.
A driving control apparatus comprising:
A driving control apparatus comprising:
A driving control apparatus for a linear motor which selectively switches coils to be energized in correspondence with a position of a movable member;
A driving control method for an apparatus which comprises storage means for storing adjustment information for adjusting driving control of a controlled object in accordance with a state quantity of the controlled object, in units of operation states of the controlled object, comprising:
A driving control method comprising:
A driving control method for a driving control apparatus for a linear motor which comprises holding means for holding a look-up table registering correction information corresponding to each position of a movable member of the linear motor and selectively switches coils to be energized in correspondence with a position of the movable member, comprising:
Dependencies are inferred from the claim text.