Back to results
US 5,756,901 AGranted
Sensor and method for manufacturing a sensor
AssigneeRobert Bosch GmbH
InventorsJuergen Kurle, Karsten Funk, Franz Laermer, Michael Offenberg, Andrea Schilp
Life of this patent
Estimating the term…
Abstract
In a sensor and a method for manufacturing a sensor, a movable element is patterned out of a silicon layer and is secured to a substrate. The conducting layer is subdivided into various regions, which are electrically insulated from one another. The electrical connection between the various regions of the silicon layer is established by a conducting layer, which is arranged between a first and a second insulating layer.
Claims8
A sensor comprising:
- a substrate;
- a silicon layer;
- a movable element patterned out of the silicon layer, the movable element being joined to the substrate;
- a conducting layer arranged between the substrate and the silicon layer, wherein a plurality of conductive paths patterned out of the conducting layer, electrically contact the movable element;
- and
- an insulating layer for insulating the plurality of conductive paths from sections of the silicon layer.
3 more elements
Dependencies are inferred from the claim text.