Method for vapor phase growth
AssigneeShin-Etsu Handotai Co., Ltd.
InventorsHitoshi Habuka, Masanori Mayuzumi, Naoto Tate, Masatake Katayama
Life of this patent
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Abstract
In the formation of a thin film on the surface of a semiconductor crystal substrate by using a horizontal type vapor phase growth apparatus, the distribution of the thickness and resistivity of the thin film can be properly obtained by adjusting the concentration distribution of the raw material gas in the mixture gas in the width direction of the reaction vessel over the substrate surface. And in the reaction vessel, carrier gas is supplied from the position close to the transfer port of the substrate, and raw material gas is supplied from the position located in the downstream side of a vortex generation region caused by the flow of the carrier gas.
Claims3
A method for vapor phase growth of a thin film on a surface of a semiconductor crystal substrate in a reaction vessel comprising the steps of:
- Arranging horizontally the reaction vessel with a transfer port for the semiconductor crystal substrate being mounted at one end and a gas exhaust port being mounted at the other end, wherein a thin film is formed on the semiconductor crystal substrate arranged horizontally in the reaction vessel by a horizontally flowing gas mixture containing a raw material gas and a carrier gas over the semiconductor crystal substrate;
- Loading the semiconductor crystal substrate downstream of raw material gas supply ports;
- Supplying the carrier gas from carrier gas supply ports positioned close to the transfer port for the semiconductor crystal substrate;
- Supplying the raw material gas adjusted its concentration distribution in a width direction of the reaction vessel from a position located downstream from a vortex generation region caused by a flow of the carrier gas;
- and
- Forming the thin film on the semiconductor crystal substrate loaded in the downstream side of the raw material gas supply port.
Dependencies are inferred from the claim text.