Method and apparatus for monitoring the deposition rate of films during physical vapor deposition
AssigneeApplied Materials, Inc.
InventorJaim Nulman
Life of this patent
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Abstract
A deposition rate monitor based on the measurement of optical attenuation is described for use in deposition equipment such as sputtering systems used to deposit thin metal films on semiconductor devices. A beam of light is passed through the region between a deposition source and the deposition substrate. The beam of light is attenuated by the material being transported from the source to the substrate before the light is detected at a detector. The level of attenuation of the light passing through the deposition environment can be empirically related to the rate at which material is being deposited on the substrate. The optical absorption deposition rate monitor can be used to adjust processing variables to maintain a constant deposition rate.
Claims30
A deposition rate monitor comprising:
- a fixture adapted to hold a deposition substrate;
- a light source which directs light over said fixture;
- an optical detector disposed to receive said light after said light passes over said fixture, wherein said optical detector produces a first signal prior to initiation of a deposition process and wherein said optical detector produces a second signal during a deposition process;
- and
- a signal processor which stores a first measured value of said second signal obtained during said deposition process, said signal processor comparing a subsequently measured value of said second signal obtained during a subsequent deposition process to said first measured value.
A physical vapor deposition system having a processing environment, which has at least one characteristic absorption line, comprising:
- a fixture adapted to hold a semiconductor wafer;
- a physical vapor deposition source disposed adjacent to said fixture, said physical vapor deposition source providing material to be deposited;
- a light source which directs light through a region between said source and said fixture, wherein said light source emits light at a wavelength range that avoids said at least one characteristic absorption line of the processing environment;
- and
- an optical detector disposed to receive said light after said light passes over said fixture, wherein said optical detector produces a first signal prior to initiation of a deposition process and wherein said optical detector produces a second signal during said deposition process.
A method of depositing material on a substrate comprising the steps of:
- providing a deposition substrate to a deposition environment;
- passing a beam of light over said deposition substrate;
- measuring a first intensity of said beam of light while no material is being deposited on said deposition substrate;
- sputter depositing a film of material on said deposition substrate from a target in which the rate of sputtering is a function of said target's age;
- measuring a second intensity of said beam of light while said material is being deposited on said substrate;
- comparing said second intensity with said first intensity to generate data characteristic of a density of material within said deposition environment;
- and
- comparing said data characteristic of said density of material within said deposition environment with predetermined data characteristic of the density of material within a deposition environment to determine a variation of said density of material within said deposition environment caused by aging of said target.
A deposition rate monitor comprising:
- a fixture adapted to hold a deposition substrate so that said deposition substrate is exposed to a deposition transport region through which deposition material is transported during a deposition process;
- a light source which directs light through said deposition transport region;
- an optical detector disposed to receive said light after said light has passed through said deposition transport region, wherein said optical detector generates a signal indicative of a density of material within said deposition transport region;
- and
- a signal processor coupled to receive said signal from said optical detector;
- wherein said signal processor stores an initially measured value of said signal obtained during said deposition process, said signal processor comparing a subsequently measured value of said signal obtained during a subsequent deposition process to said initially measured value to generate a signal characteristic of a change in said density of material within said deposition transport region as a function of time.
A physical vapor deposition system having a processing environment which has at least one characteristic absorption line, comprising:
- a fixture adapted to hold a deposition substrate;
- a physical vapor deposition source disposed in relation to said fixture so as to define a deposition transport region through which deposition material is transported during a physical vapor deposition process;
- a light source which directs light through said deposition transport region;
- an optical detector disposed to receive said light after said light has passed through said deposition transport region, wherein said optical detector generates a signal indicative of a deposition rate;
- and
- a filter disposed between said light source and said optical detector, said filter selecting at least one wavelength range to avoid said at least one characteristic absorption line of the processing environment.
A method of depositing material on a substrate comprising the steps of:
- providing a deposition substrate to a deposition environment so that at least one surface of said deposition substrate is exposed to a deposition transport region through which deposition material is transported during a deposition process, wherein said deposition process is characterized by generation of at least one wavelength range of optical noise signals;
- passing a beam of light through said deposition transport region;
- measuring an intensity of said beam of light while material is being deposited on said deposition substrate, said measuring being performed over at least one measurement range of wavelengths which do not include said at least one wavelength range of optical noise signals;
- and
- deriving a signal indicative of a density of material within said deposition transport region from said measured intensity.
Dependencies are inferred from the claim text.