Back to results
US 5,753,911 AGranted
Electrostatic actuator, probe using the actuator, scanning probe microscope, processing apparatus, and recording/reproducing apparatus
AssigneeCanon Kabushiki Kaisha
InventorsSusumu Yasuda, Takayuki Yagi
Life of this patent
Estimating the term…
Abstract
An electrostatic actuator includes a movable plate arranged on a substrate through a gap, a movable electrode arranged on the movable plate, and a fixed electrode arranged on the substrate to oppose the movable electrode. The movable electrode and the fixed electrode are arranged not to overlap at any portion in a direction perpendicular to a surface of the fixed electrode. The movable electrode and the fixed electrode have comb-like shapes.
Claims7
An electrostatic actuator comprising:
- a movable plate arranged on a substrate through a gap;
- a movable electrode arranged on said movable plate;
- and
- a fixed electrode arranged on said substrate to oppose said movable electrode,
- wherein said movable electrode and said fixed electrode are arranged not to overlap at any portion in a direction perpendicular to a surface of said fixed electrode.
2 more elements
Dependencies are inferred from the claim text.