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US 5,751,156 AGranted
Mechanically controllable break transducer
AssigneeYale University
InventorsChristiaan Muller, Chong Wu Zhou, Mark A. Reed
Life of this patent
Estimating the term…
Abstract
A micromechanical sensor in which the impedance of a gap in a conductor, under tunnelling current conditions, is sensed to provide an indication of deflection in the conductor. This provides a new way to sense acceleration, strain, and other parameters which can be translated into a deflection.
Claims23
A sensor comprising:
- a first conductor and a second conductor positioned to form a gap therebetween which varies dynamically, in response to an external condition being sensed, from a minimum value of at least about zero .ANG.ngstroms to a maximum value which is less than about thirty .ANG.ngstroms;
- and
- circuitry connected to sense the electrical impedance of said gap by detection of a tunneling current through said gap, wherein said electrical impedance of said gap varies in response to said gap varying.
A sensor comprising:
- a first conductor and a second conductor positioned to form a gap therebetween which varies dynamically, in response to an external condition being sensed, from a minimum value of a least about zero .ANG.ngstroms to a maximum value which is less than about thirty .ANG.ngstroms, wherein said first and second conductors are at ambient temperature;
- and
- circuitry connected to sense the electrical impedance of said gap by detection of a tunneling current through said gap, wherein said electrical impedance of said gap varies in response to said gap varying.
A sensor comprising:
- a first conductor and a second conductor positioned to form a gap therebeween which varies dynamically, in response to an external condition being sensed, within a range from a minimum value of at least about zero .ANG.ngstroms to a maximum value which is less than about thirty .ANG.ngstroms;
- circuitry operatively connected to sense the electrical impedance of said gap by detection of a tunneling current through said gap, wherein said electrical impedance of said gap varies in response to said gap varying;
- and
- circuitry connected to translate the sensed value of said tunneling current and accordingly provide an output value which indicates the value of said external condition.
1 more element
A sensor comprising:
- a support element;
- a first conductor and a second conductor positioned to form a gap therebetween, said conductors being mounted to said support element in a mechanical relation such that deflection of said support element causes variation in the spacing across said gap;
- and
- circuitry connected to sense the electrical impedance of said gap, wherein said electrical impedance of said gap varies in response to said gap varying.
1 more element
A method for sensing a condition, comprising the steps of:
- (a) using a first conductor and a second conductor to form a gap therebeween of less than about 10 .ANG.ngstroms which varies in accordance with the condition to be sensed;
- (b) measuring a parameter which corresponds to the electrical impedance of said gap under tunneling current conditions;
- and
- (c) translating said parameter to provide an indication of the condition to be sensed.
1 more element
A sensor comprising:
- a semiconductor substrate;
- a first thin-film conductor and a second thin-film conductor supported by said substrate, and forming a gap therebetween which varies dynamically, in response to an external condition being sensed, from a minimum value of at least about zero .ANG.ngstroms to a maximum value which is less that about thirty .ANG.ngstroms;
- and
- at least one solid state gain stage, integrated in said substrate, connected to sense an electrical impedance of said gap by detection of a tunneling current through said gap, wherein said electrical impedance of said gap varies in response to said gap varying.
1 more element
Dependencies are inferred from the claim text.