Loadlock assembly for an ion implantation system
AssigneeEaton Corporation
InventorsPeter H. Rose, Adam A. Brailove
Life of this patent
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Abstract
The present invention provides a loadlock assembly for a high throughput ion implantation system that rapidly and efficiently processes large quantities of workpieces, such as flat panel displays. The loadlock assembly increases the throughput of the implantation system by continuously cycling workpieces through the process chamber, thus increasing the system's throughput. The loadlock assembly includes a plurality of loadlock stacking elements that are axially positioned relative to each other to form a stacked array of loadlocks. Additionally, the loadlocks of the array are configured to nest with an adjacent loadlock to form a stackable and nestable loadlock assembly.
Claims24
A loadlock assembly for an ion implantation system, comprising
- a plurality of loadlock stacking elements each having a top surface and a bottom surface, the loadlock stacking elements being axially positioned relative to each other to form a stacked array wherein the loadlock stacking elements are configured to facilitate nested stacking by a geometrically shaped surface on one loadlock stacking element coupling with a complementary geometrically shaped surface on an adjacent loadlock stacking element for forming a loadlock chamber.
A loadlock assembly for an ion implantation system, comprising
- a plurality of loadlock stacking elements having a top surface and a bottom surface, the loadlock elements being axially positioned relative to each other to form a stacked array of loadlocks, each pair of adjacent loadlock elements forming a loadlock chamber when stacked, and wherein the loadlock elements are configured to facilitate nesting of adjacent loadlocks, such that the bottom surface of one loadlock element nests in the top surface of an adjacent loadlock element.
Dependencies are inferred from the claim text.