Active anti-vibration apparatus and method of manufacturing the same
AssigneeCanon Kabushiki Kaisha
InventorHiroaki Kato
Life of this patent
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Abstract
An active anti-vibration apparatus detects the motion of an anti-vibration table for supporting equipment with a plurality of sensors and controls actuators on the basis of detection outputs from the sensor. The sensors are arranged such that, when a motion parameter of the anti-vibration table is represented by a vector P, and an output signal group from the plurality of sensors is represented by a vector S, a condition number of a matrix A defined by an equation S=AP established between the vector P and the vector S in accordance with a geometrical arrangement of the plurality of sensors is minimized.
Claims38
An active anti-vibration apparatus having a plurality of sensors and actuators, which detects motion of an anti-vibration table for supporting an equipment with said plurality of sensors and controls said actuators on the basis of output signals from said sensors to drive said anti-vibration table, thereby performing an anti-vibration operation for said anti-vibration table,
- wherein said plurality of sensors are arranged such that, when a motion parameter of said anti-vibration table is represented by a vector P, and an output signal group from said plurality of sensors is represented by a vector S, a condition number of a matrix A defined by an equation S=AP established between the vector P and the vector S in accordance with a geometrical arrangement of said plurality of sensors is minimized.
An active anti-vibration apparatus having a plurality of sensors and actuators, which detects motion of an anti-vibration table for supporting equipment with said plurality of sensors and controls said actuators on the basis of output signals from said sensors to drive said anti-vibration table, thereby performing an anti-vibration operation for said anti-vibration table,
- wherein said plurality of sensors are arranged such that, when a motion parameter of said anti-vibration table is represented by a vector P, and an output signal group from said plurality of sensors is represented by a vector S, a condition number of a matrix A is defined by an equation S=AP established between the vector P and the vector S in accordance with a geometrical arrangement of said plurality of sensors, and a matrix W represents weight elements of the vector P, a condition number of a matrix AW obtained by multiplying the matrix A with the matrix W is minimized, and wherein
- a relationship between the vector S having elements S.sub.1, . . . , and S.sub.n and the vector P having elements P.sub.x, P.sub.y, and P.theta..sub.z is represented as follows:
- ##EQU13## where S.sub.n with n=1 to K, which is a natural number not less than 2, are the output signals from said plurality of sensors, P.sub.x is a motion parameter of a motion in an X direction associated with an X-Y plane of said anti-vibration table, P.sub.y is a motion parameter of a motion in a Y direction on the X-Y plane, and P.theta..sub.z is a motion parameter of a rotation motion in a .theta. direction on the X-Y plane.
An active anti-vibration apparatus having a plurality of sensors and actuators, which detects motion of an anti-vibration table for supporting equipment with said plurality of sensors and controls said actuators on the basis of output signals from said sensors to drive said anti-vibration table, thereby performing an anti-vibration operation for said anti-vibration table,
- wherein said plurality of sensors are arranged such that, when a motion parameter of said anti-vibration table is represented by a vector P, and an output signal group from said plurality of sensors is represented by vector S, a condition number of a matrix A defined by an equation S=AP established between the vector P and the vector S in accordance with a geometrical arrangement of said plurality of sensors is minimized, and
- wherein said plurality of sensors are arranged such that an angle formed by a straight line passing through each of said sensors and a center of gravity of said anti-vibration table, and the motion detection directions of said sensors are substantially equal for each of said plurality of sensors.
A method of manufacturing an active anti-vibration apparatus having a plurality of sensors and actuators, which detects motion of an anti-vibration table for supporting equipment with said plurality of sensors and controls said actuators on the basis of output signals from said sensors to drive said anti-vibration table, thereby performing an anti-vibration operation for said anti-vibration table, said method comprising the steps of:
- arranging said plurality of sensors such that, when a motion parameter of said anti-vibration table is represented by a vector P, and an output signal group from said plurality of sensors is represented by a vector S, a condition number of a matrix A defined by an equation S=AP established between the vector P and the vector S in accordance with a geometrical arrangement of the plurality of sensors is minimized.
A method of manufacturing an active anti-vibration apparatus having a plurality of sensors and actuators, which detects motion of an anti-vibration table for supporting equipment with said plurality of sensors and controls said actuators on the basis of output signals from said sensors to drive said anti-vibration table, thereby performing an anti-vibration operation for said anti-vibration table, said method comprising the steps of:
- arranging said plurality of sensors such that, when a motion parameter of said anti-vibration table is represented by a vector P, and an output signal group from said plurality of sensors is represented by a vector S, a condition number of a matrix A is defined by an equation S=AP established between the vector P and the vector S in accordance with a geometrical arrangement of said plurality of sensors, and a matrix W represents weight elements of the vector P, a condition number of a matrix AW obtained by multiplying the matrix A with a weighting matrix W is minimized, wherein
- a relationship between the vector S having elements S.sub.1, . . . , and S.sub.n and the vector P having elements P.sub.x, P.sub.y, and P.theta..sub.z is represented as follows:
- ##EQU14## where S.sub.n, with n=1 to K, which is a natural number not less than 2, are the output signals from said plurality of sensors, P.sub.x is a motion parameter of a motion in an X direction associated with an X-Y plane of said anti-vibration table, P.sub.y is a motion parameter of a motion in a Y direction on the X-Y plane, and P.theta..sub.z is a motion parameter of a rotation motion in a .theta. direction on the X-Y plane.
A method of manufacturing an active anti-vibration apparatus having a plurality of sensors and actuators, which detects motion of an anti-vibration table for supporting equipment with said plurality of sensors and controls said actuators on the basis of output signals from said sensors to drive said anti-vibration table, thereby performing an anti-vibration operation for said anti-vibration table, said method comprising the steps of:
- arranging said plurality of sensors such that, when a motion parameter of said anti-vibration table is represented by a vector P, and an output signal group from said plurality of sensors is represented by a vector S, a condition number of a matrix A defined by an equation S=AP established between the vector P and the vector S in accordance with a geometrical arrangement of the plurality of sensors is minimized, wherein
- said plurality of sensors are arranged such that an angle formed by a straight line passing through each of said sensors and a center of gravity of said anti-vibration table, and motion detection directions of said sensors are substantially equal for each of said plurality of sensors.
An active anti-vibration apparatus having a plurality of sensors and actuators, which detects a motion of an anti-vibration table for supporting an equipment with said plurality of sensors and controls said actuators on the basis of output signals from said sensors to drive said anti-vibration table, thereby performing an anti-vibration operation for said anti-vibration table,
- wherein said plurality of actuators are arranged such that, when thrusts generated by said plurality of actuators are represented by a vector x, and driving forces in units of motion modes, which act on said anti-vibration table, are represented by a vector b, a condition number of a matrix A defined by an equation Ax=b established between the vector x and the vector b in accordance with a geometrical arrangement of said plurality of actuator is minimized.
An active anti-vibration apparatus having a plurality of sensors and actuators, which detects motion of an anti-vibration table for supporting equipment with said plurality of sensors and controls said actuators on the basis of output signals from said sensors to drive said anti-vibration table, thereby performing an anti-vibration operation for said anti-vibration table, wherein
- said plurality of actuators are arranged such that, when thrusts generated by said plurality of actuators are represented by a vector x, and driving forces in units of motion modes, which act on said anti-vibration table, are represented by a vector b, a condition number of a matrix A defined by an equation Ax=b established between the vector x and the vector b in accordance with a geometrical arrangement of said plurality of actuators is minimized, and
- wherein said plurality of actuators are arranged such that angles formed by straight lines passing through points of action of thrusts generated by said actuators and a center of gravity of said anti-vibration table or a center of gravity of a structure including said anti-vibration table and support members of said anti-vibration table, and lines of action of the thrusts generated by said actuators with respect to said anti-vibration table become substantially equal for said plurality of actuators.
An active anti-vibration apparatus having a plurality of sensors and actuators, which detects motion of an anti-vibration table for supporting equipment with said plurality of sensors and controls said actuators on the basis of output signals from said sensors to drive said anti-vibration table, thereby performing an anti-vibration operation for said anti-vibration table,
- wherein said plurality of actuators are arranged such that, when thrusts generated by said plurality of actuators are represented by a vector x, and driving forces in units of motion modes, which act on said anti-vibration table, are represented by a vector b, a condition number of a matrix A defined by an equation Ax=b established between the vector x and the vector b in accordance with a geometrical arrangement of said plurality of actuators is minimized, and
- wherein said plurality of sensors are arranged in correspondence with said plurality of actuators.
A method of manufacturing an active anti-vibration apparatus having a plurality of sensors and actuators, which detects motion of an anti-vibration table for supporting equipment with said plurality of sensors and controls said actuators on the basis of output signals from said sensors to drive said anti-vibration table, thereby performing an anti-vibration operation for said anti-vibration table, said method comprising the steps of:
- arranging said plurality of actuators such that, when thrusts generated by said plurality of actuators are represented by a vector x, and driving forces in units of motion modes, which act on said anti-vibration table, are represented by a vector b, a condition number of a matrix A defined by an equation Ax=b established between the vector x and the vector b in accordance with a geometrical arrangement of said plurality of actuators is minimized.
A method of manufacturing an active anti-vibration apparatus having a plurality of sensors and actuators, which detects motion of an anti-vibration table for supporting equipment with said plurality of sensors and controls said actuators on the basis of output signals from said sensors to drive said anti-vibration table, thereby performing an anti-vibration operation for said anti-vibration table, said method comprising the steps of:
- arranging said plurality of actuators such that, when thrusts generated by said plurality of actuators are represented by a vector x, and driving forces in units of motion modes, which act on said anti-vibration table, are represented by a vector b, a condition number of a matrix A defined by an equation Ax=b established between the vector x and the vector b in accordance with a geometrical arrangement of said plurality of actuators is minimized,
- wherein said plurality of actuators are arranged such that angles formed by straight lines passing through points of action of thrusts generated by said actuators and a center of gravity of said anti-vibration table or a center of gravity of a structure including said anti-vibration table and support members of said anti-vibration table, and lines of action of the thrusts generated by said actuators with respect to said anti-vibration table become substantially equal for said plurality of actuators.
Dependencies are inferred from the claim text.