Lapping process using micro-advancement for optimizing flatness of a magnetic head air bearing surface

A method of lapping an air bearing surface on an exposed edge of a row of unfinished transducer elements, comprising the steps of:

• providing a lapping machine that includes a grinding plate having a grinding surface, an x-positioner, a y-positioner, and a micro-advance mechanism for controllably advancing the y-positioner;
• affixing the row of unfinished transducer elements with its exposed edge adjacent to the grinding plate;
• depositing an abrasive slurry on the grinding surface;
• performing a rough lapping phase of the exposed edge including removing the grinding surface with respect to the exposed edge until the exposed edge is lapped to a first predetermined tolerance;
• washing the grinding surface to remove loose diamond and debris;
• depositing a lubricating agent on the grinding surface;
• and
• performing a micro-advanced lapping stage including micro-advancing the y-positioner and continuing linear movement of the x-positioner to provide a final predetermined tolerance.

A method of fabricating a magnetic head including lapping an air bearing surface with a lapping machine that has a grinding wheel with a grinding surface, an x-positioner, and a y-positioner including a micro-advance mechanism, comprising the steps of:

• deposition processing a wafer to form a plurality of unfinished transducer elements aligned in a plurality of rows;
• cutting said wafer into a plurality of sections each including at least one row of unfinished transducer elements having an exposed edge to be lapped to form an air bearing surface for said row;
• affixing at least one of said sections to the lapping machine in a position with the exposed edge adjacent to the grinding surface;
• depositing an abrasive slurry on the grinding surface of the grinding wheel;
• performing an initial lapping stage of the exposed edge including rotating the grinding wheel and controlling the x- and y-positioners to rotate in the opposite rotational direction, so that the exposed edge is lapped to a first predetermined tolerance;
• washing the grinding surface to remove loose diamond and debris;
• performing a linear lapping stage including moving only the x-positioner to provide linear lapping of the exposed edge to a second predetermined tolerance;
• and
• performing a micro-advanced lapping stage including micro-advancing the y-positioner and simultaneously linear-lapping with the x-positioner in the x direction to provide a third predetermined tolerance.

A lapping machine for lapping a workpiece comprising:

• a lapping fixture for holding the workpiece;
• a lapping plate having a grinding surface;
• a rotary motion mechanism coupled for rotary movement of said lapping plate;
• a first rail extending in a first direction parallel to the grinding surface;
• a mount coupled for slidable motion over the first rail including means for affixing the lapping fixture and means for positioning the workpiece adjacent to the grinding surface;
• a linear movement mechanism coupled to the first rail for moving the mount over the first rail in an oscillatory linear motion along the first rail;
• a slidable second rail coupled to the first rail, said second rail extending in a second direction parallel to the grinding surface and perpendicular to the first rail;
• and
• a micro-advance mechanism removably engaged to the second rail for precisely controlling slidable motion of the second rail.