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US 5,748,470 AGranted
Semiconductor processing backup system
AssigneeNEC Electronics Corporation
InventorsArthur L. Hager, III, Brian E. Marchant, Shouping Chuang, Ki Duk Kim
Life of this patent
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Abstract
A manufacturing system is disclosed which includes first and second control devices as well as a communication terminal which controls communication with the control devices. The communications terminal includes an interceptor module which receives information from the manufacturing device and provides this information to the first and second control devices.
Claims6
A semiconductor processing system comprising
- a first control device,
- a processing portion, the processing portion including
- a communications terminal, the communications terminal being coupled to the first control device, the communications terminal including an interceptor portion,
- a manufacturing device, the manufacturing device being coupled to the communications terminal,
- an interceptor controller, the interceptor controller being coupled to the interceptor portion;
- a second control device, the second control device being coupled to the communications terminal;
- and
- a stocker portion, the stocker portion being coupled to the first and second control devices, the stocker portion including
- a stocker terminal, the stocker terminal including a stocker terminal interceptor portion,
- a stocking device, the stocking device being coupled to the stocker terminal, and
- a stocker interceptor controller, the stocker interceptor controller being coupled to the stocker terminal interceptor portion;
- the interceptor portion and the interceptor controller together providing a processing portion interceptor module, the processing portion interceptor module receiving a first response from one of the first and second control devices, storing the response until a second response is received from the other of the first and second control devices, and comparing the first and second responses to independently determine whether a potential fault exists with one of the first and second control devices,
- the stocker terminal interceptor portion and the stocker interceptor controller together providing a stocker interceptor module, the stocker interceptor module receiving a first response from one of the first and second control devices, storing the response until a second response is received from the other of the first and second control devices, and comparing the first and second responses to independently determine whether a potential fault exists with one of the first and second control devices,
- the combination of the processing portion interceptor module, the stocker interceptor module, and the first and second control devices providing a backup system, the backup system providing continuous operation of the manufacturing system in the event that there is a fault with one of the first and second control devices.
11 more elements
Dependencies are inferred from the claim text.