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US 5,748,172 AGranted
Mirror driving method and apparatus of micro-mirror array
AssigneeSamsung Electro-Mechanics Co., Ltd.
InventorsCi-moo Song, Chul-woo Lee, Han-ki Cho
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AssigneeSamsung Electro-Mechanics Co., Ltd.
InventorsCi-moo Song, Chul-woo Lee, Han-ki Cho
Estimating the term…
In a mirror driving method of a micro-mirror array and an apparatus thereof, each of a plurality of mirrors is pivotally supported by hinges fixed to a substrate, and a permanent magnet is attached beneath the substrate to form a magnetic field about the mirrors. A coiled conductive layer is formed on the rear surface of each mirror to be selectively applied with current according to a video signal, and the selected mirror pivots in correspondence with the electrostatic force operative between the conductive layer to which the current is applied and the magnetic field. Thus, a light beam irradiating the micro-mirror array can be modulated according to an image, and mass production is made possible due to a simple structure which provides for a stable driving action.
A mirror driving method of a micro-mirror array provided with a plurality of mirror members each of which is pivotally supported, said method comprising the steps of:
A mirror driving apparatus of a micro-mirror array provided with a plurality of mirror members each of which is pivotally supported, said apparatus comprising:
A mirror driving apparatus of a micro-mirror array provided with a plurality of mirror members each of which is pivotally supported, said apparatus comprising:
A mirror driving apparatus comprising:
Dependencies are inferred from the claim text.