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US 5,747,690 AGranted
Vibratory microgyroscope
AssigneesSamsung Electronics Co., Ltd., Korea Advanced Institute of Science and Technology
InventorsKyu-yeon Park, Chong-won Lee, Young-ho Cho, Ci-moo Song
Life of this patent
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Abstract
A microgyroscope includes a substrate, a vibratory structure having two stripe portions, a plurality of connection portions, and a comb, an elastic member for elastically maintaining the vibratory structure, a driver for applying the vibratory structure, a sensor for sensing the one directional action of the vibratory structure, and a plurality of sensing electrodes for sensing displacement by Coriolis force.
Claims7
A microgyroscope comprising:
- a substrate;
- a vibratory structure having first and second stripe portions disposed in parallel with each other in which first and second combs are formed at one side of said first and second stripe portions respectively, and a plurality of connecting portions for connecting said first and second stripe portions;
- elastic means for elastically supporting said vibratory structure to be spaced from said substrate at a predetermined gap;
- driving means, having a third comb interposed between said first comb of said first stripe portion, for applying said vibratory structure in one direction due to an electrostatic force;
- sensing means, having a fourth comb interposed between said second comb of said second stripe portion, for sensing the movement of said vibratory structure driven by said driving means through a change of capacitance;
- and
- a plurality of sensing electrodes, disposed between said connecting portions of said vibratory structure on the same plane as that of said vibratory structure to be spaced from said substrate at a predetermined gap, for sensing displacement of said vibratory structure due to Coriolis force through a change of capacitance.
4 more elements
Dependencies are inferred from the claim text.