US 5,742,471 A · Nanostructure multilayer dielectric materials for capacitors and insulators

Abstract

A capacitor is formed of at least two metal conductors having a multilayer dielectric and opposite dielectric-conductor interface layers in between. The multilayer dielectric includes many alternating layers of amorphous zirconium oxide (ZrO.sub.2) and alumina (Al.sub.2 O.sub.3). The dielectric-conductor interface layers are engineered for increased voltage breakdown and extended service life. The local interfacial work function is increased to reduce charge injection and thus increase breakdown voltage. Proper material choices can prevent electrochemical reactions and diffusion between the conductor and dielectric. Physical vapor deposition is used to deposit the zirconium oxide (ZrO.sub.2) and alumina (Al.sub.2 O.sub.3) in alternating layers to form a nano-laminate.

Claims10

Dependent claims

A capacitor, comprising:

at least one pair of metal conductor layers that function as capacitor electrodes;
a dielectric-conductor interface layer in between and in contact with each of the conductor layers;
and
a multilayer dielectric disposed between and in contact on opposite sides with corresponding dielectric-conductor interface layers and comprising a plurality of alternating layers of oxides of at least two different metals.

1 more element

Dependencies are inferred from the claim text.

Nanostructure multilayer dielectric materials for capacitors and insulators

Life of this patent

Nanostructure multilayer dielectric materials for capacitors and insulators

Life of this patent

Abstract

Claims10