# US 5,742,174 A · Membrane for holding a probe tip in proper location > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 5,742,174 A - Document ID: US5742174A - Status: Granted - Kind: A - Application number: 08/553,069 - Filed: 1995-11-03 - Granted: 1998-04-21 - Earliest claimed: 1995-11-03 - Assignees: Probe Technology - Inventors: January Kister; Jerzy Lobacz - Web page: https://patentgrep.com/patent/US5742174A ## CPC - G01R 1/07342: {the body of the probe being at an angle other than perpendicular to test object, e.g. probe card} - G01R 1/06733: {Geometry aspects (G01R1/06727 takes precedence)} - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) ## Abstract A method and device for accurately mounting a probe in a probe card and for maintaining correct location of the probe tip as the probe is used for electronic testing of an IC pad. A membrane having a slot is attached to a support structure of a probe card. The probe tip is inserted into the slot and the probe is affixed to the membrane at the edges of the slot using silicon rubber. The probe is then mounted in the support structure which has a groove for receiving the probe. A distal end of the probe is bonded to the walls of the groove so that the probe is free to move vertically in the groove, but constrained from moving laterally to prevent side-buckling. The membrane and silicon rubber hold the probe tip in proper location during thermal treating of the probe card assembly. Once mounted in the probe card by this method, the probe and probe tip will maintain proper location as they are used for electronic testing of an IC pad. During testing, the probe tip and attached membrane are deflected from their initial position by force of contact with the IC pad. Upon completion of the test, the contact force is removed from the probe tip. The elasticity of the membrane causes the membrane and the attached probe tip to return to their initial position, ensuring that the probe tip is in the proper location for the next test. ## Claims ### Claim 1 A device for electronic testing, the device comprising: a) a cantilever probe having an arm, a tip, and a distal end opposite the tip; b) a support structure for supporting the probe, the probe being attached to the support structure at the distal end; c) a membrane for positioning the tip, the membrane being attached to the support structure and the membrane having a slot through which the tip is inserted; and d) a means for attaching the probe to the membrane such that the tip, the arm, and the membrane move from an initial position to a deflected position when an overdrive is applied to the tip and such that the tip, the arm, and the membrane return to the initial position when the overdrive is removed from the tip. ### Claim 2 (depends on 1) The device of claim 1, wherein the means for attaching the probe to the membrane comprises a silicon rubber. ### Claim 3 (depends on 1) The device of claim 1, wherein the probe has a knee section and wherein the probe is attached to the membrane at the knee section. ### Claim 4 (depends on 1) The device of claim 1, wherein the probe is attached to the membrane at an edge of the slot. ### Claim 5 (depends on 1) The device of claim 1, wherein the membrane comprises a polyimide. ### Claim 6 (depends on 1) The device of claim 1, wherein the membrane comprises a ceramic. ### Claim 7 (depends on 1) The device of claim 1, wherein the membrane has a thickness in the range of 10 to 50 .mu.m. ### Claim 8 (depends on 1) The device of claim 1, wherein the support structure has a groove for receiving the probe and wherein the probe is mounted in the groove such that the probe is free to move vertically in the groove and constrained from moving laterally in the groove. ### Claim 9 (depends on 1) The device of claim 1, wherein the support structure has a flat top surface for supporting the probe and wherein the probe is attached to the flat top surface. ### Claim 10 (depends on 1) The device of claim 1, wherein the support structure comprises a ceramic. ### Claim 11 A method for positioning a cantilever probe having an arm, a tip, and a distal end opposite the tip, the method comprising the following steps: a) attaching a membrane to a support structure; b) cutting in the membrane a slot for receiving the tip; c) inserting the tip through the slot; d) attaching the probe to the membrane; and e) attaching the distal end to the support structure. ### Claim 12 (depends on 11) The method of claim 11, wherein the probe is attached to the membrane at a knee section of the probe. ### Claim 13 (depends on 11) The method of claim 11, wherein the probe is attached to the membrane with silicon rubber. ### Claim 14 (depends on 11) The method of claim 11, wherein the probe is attached to the membrane at an edge of the slot. ### Claim 15 (depends on 11) The method of claim 11, wherein the membrane comprises a polyimide. ### Claim 16 (depends on 11) The method of claim 11, wherein the membrane comprises a ceramic. ### Claim 17 (depends on 11) The method of claim 11, wherein the membrane has a thickness in the range of 10 to 50 .mu.m. ### Claim 18 (depends on 11) The method of claim 11, wherein the support structure has a groove for receiving the probe and wherein the step of attaching the distal end to the support structure comprises mounting the probe in the groove such that the probe is free to move vertically in the groove and constrained from moving laterally in the groove. ### Claim 19 (depends on 11) The method of claim 11, wherein the support structure has a flat top surface and wherein the distal end is attached to the flat top surface. ### Claim 20 (depends on 11) The method of claim 11, wherein the support structure comprises a ceramic.