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US 5,739,945 AGranted
Electrically tunable optical filter utilizing a deformable multi-layer mirror
OwnerParviz Tayebatiinventor
Life of this patent
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Abstract
An electrically tunable optical filter utilizing a deformable multi-layer mirror construction.
Claims6
An electrically tunable optical filter comprising:
- a laterally-extending base comprising an optically-transparent semiconductor material;
- a first laterally-extending mirror comprising alternating layers of (i) said optically-transparent semiconductor material, and (ii) air;
- a second laterally-extending mirror comprising alternating layers of (i) said optically-transparent semiconductor material, and (ii) air;
- said first laterally-extending mirror being fixedly mounted to said laterally-extending base;
- said second laterally-extending mirror being movably mounted to said laterally-extending base such that an air gap extends between said first laterally-extending mirror and said second laterally-extending mirror;
- a first electrode electrically connected to said first laterally-extending mirror;
- and
- a second electrode electrically connected to said second laterally-extending mirror;
- whereby when a voltage difference is applied across said first and second electrodes, the electrically tunable optical filter will change its spectral response.
6 more elements
An electrically tunable optical filter comprising:
- a laterally-extending base comprising an optically-transparent semiconductor material;
- a first laterally-extending mirror comprising alternating layers of (i) said optically-transparent semiconductor material, and (ii) an oxide material;
- a second laterally-extending mirror comprising alternating layers of (i) said optically-transparent semiconductor material, and (ii) an oxide material;
- said first laterally-extending mirror being fixedly mounted to said laterally-extending base;
- said second laterally-extending mirror being movably mounted to said laterally-extending base such that an air gap extends between said first laterally-extending mirror and said second laterally-extending mirror;
- a first electrode electrically connected to said first laterally-extending mirror;
- and
- a second electrode electrically connected to said second laterally-extending mirror;
- whereby when a voltage difference is applied across said first and second electrodes, the electrically tunable optical filter will change its spectral response.
6 more elements
Dependencies are inferred from the claim text.