US 5,739,686 A · Electrically insulating cantilever magnetometer with mutually isolated and integrated thermometry, background elimination and null detection

Abstract

A high sensitivity torque and force cantilever magnetometer having a cantilever with isolated capacitance detection and nulling circuits which provides increased sensitivity and accuracy to measurements of a magnetic moment of a sample placed on the cantilever and exposed to a magnetic field. Magnetic detection is by electrical capacitance between a metallized plate and the cantilever. Alternatively, magnetic detection is by electrical resistance of a piezoactive circuit deposited on the surface of the cantilever. The cantilever can be used to measure both isotropic and anisotropic magnetism and is capable of simultaneously measuring the electrical conductivity of the sample using an integrated electrically isolated circuit. The cantilever is constructed of multiple layers of conducting and insulating materials to eliminate leakage current. The magnetometer measures the magnitude of a current through a null detection circuit having nulling loops deposited on the cantilever required to maintain a constant capacitance between the cantilever and a metallized plate to determine the magnetization of the sample. A magnetometer having two cantilevers where one cantilever is used as a reference to eliminate background noise and temperature and magnetic field variations from measurements taken of a sample on the second cantilever is also provided. The null detection circuit eliminates capacitance drift and improves the accuracy of the magnetometer.

Claims26

Dependent claims

A cantilever for a cantilever magnetometer, the cantilever comprising:

a dielectric substrate having a planar top surface and a planar bottom surface, a measurement platform, an elongated neck, and a base, the elongated neck connecting the base and the measurement platform;
a coating of an electrical insulating material on the planar top surface;
a first conducting layer one of deposited and etched on to the planar bottom surface, for forming a capacitor plate;
and
a second conducting layer which is one of deposited and etched on to the coating, the second conducting layer having a pair of spaced apart symmetrical nulling loops on the measurement platform such that a sample may be placed between them on the measurement platform, the nulling loops being connected to each other and each nulling loop having a nulling loop lead located in the base.

2 more elements

A cantilever magnetometer comprising:

a dielectric substrate having a planar top surface and a planar bottom surface, a measurement platform, a elongated neck, and a base, the elongated neck connecting the base and the measurement platform;
a coating of an electrically insulating material on the planar top surface;
a first conducting layer one of deposited and etched on to the planar bottom surface for forming an upper capacitor plate;
means for electrically connecting the upper capacitor plate to a capacitance bridge circuit;
a second conducting layer which is one of deposited and etched on to the coating, the second conducting layer having a pair of spaced apart symmetrical nulling loops on the measurement platform such that a sample may be placed between them on the measurement platform, the nulling loops being connected to each other and each nulling loop having a nulling loop lead located in the base;
means for providing a current to the nulling loops;
means for measuring the current provided to the nulling loops;
a block having a plate surface;
and
a metallized plate supported on the block plate surface forming a lower capacitor plate, the block and metallized plate oriented in close proximity and opposed to the first conductive layer forming an upper capacitor plate, creating a capacitance gap between the upper and lower capacitor plates, the metallized plate being electrically connected to the capacitance bridge circuit.

7 more elements

A cantilever magnetometer for eliminating background noise effects comprising:

a dielectric substrate having a planar top surface and a planar bottom surface, a pair of measurement platforms, a pair of elongated necks, and a base, each elongated neck connecting the base and one of the pair of measurement platforms, forming a pair of cantilever arms connected to the base;
a first adhesion layer of non-magnetic electrically insulating material covering the planar bottom surface;
a second adhesion layer of non-magnetic electrically insulating material covering the planar top surface;
a pair of first conducting layers one of deposited and etched on to the first adhesion layer, one first conducting layer on each of the pair of cantilever arms each first conducting layer for forming one of a pair of upper capacitor plates;
means for electrically connecting each of the upper capacitor plates to a capacitance bridge circuit;
a pair of second conducting layers, one of deposited and etched on to the second adhesion layer, one second conducting layer on each of the cantilever arms, each second conducting layer having a pair of spaced apart symmetrical nulling loops on the measurement platform, each pair of nulling loops being connected together and each nulling loop of each pair having a nulling loop lead located in the base;
means for providing a first current to one of the pairs of nulling loops on one of the cantilever arms;
means for providing a second current to the other pair of nulling loops on the other cantilever arm;
means for subtracting the first current from the second current;
means for measuring the current resulting from subtracting the first current from the second current;
a block having a plate surface;
and
a metallized plate supported on the block plate surface forming a lower capacitor plate, the block and metallized plate oriented in close proximity and opposed to both of the first conductive layers, each forming a separate upper capacitor plate, creating a pair of capacitance gaps between the upper and lower capacitor plates, the metallized plate being electrically connected to the capacitance bridge circuit.

10 more elements

A cantilever magnetometer comprising:

a dielectric substrate having a planar top surface and a planar bottom surface, a measurement platform, a elongated neck, and a base, the elongated neck connecting the base and the measurement platform;
a first conducting layer one of deposited and etched on to the planar bottom surface for forming an upper capacitor plate;
means for electrically connecting the upper capacitor plate to a capacitance bridge circuit;
a second conducting layer which is one of deposited and etched on to the planar top surface, the second conducting layer having a pair of spaced apart symmetrical nulling loops on the measurement platform such that a sample may be placed between them on the measurement platform, the nulling loops being connected to each other and each nulling loop having a nulling loop lead located in the base, the second conducting layer further having at least one pair of elongated electrical transport leads for measuring electrical conductivity of the sample on the measurement platform, each transport lead having two ends, one end of each transport lead being located on the base, means for providing a voltage to the base end of one transport lead of each pair, and means for measuring the voltage at the base end of the other transport lead of each pair;
means for providing a current to the nulling loops;
means for measuring the current provided to the nulling loops;
a block having a plate surface;
and
a metallized plate supported on the block plate surface forming a lower capacitor plate, the block and metallized plate oriented in close proximity and opposed to the first conductive layer forming an upper capacitor plate, creating a capacitance gap between the upper and lower capacitor plates, the metallized plate being electrically connected to the capacitance bridge circuit.

6 more elements

A cantilever magnetometer comprising:

dielectric substrate having a planar top surface and a planar bottom surface, a measurement platform, a elongated neck, and a base, the elongated neck connecting the base and the measurement platform;
a first conducting layer one of deposited and etched on to the planar bottom surface for forming an upper capacitor plate;
means for electrically connecting the upper capacitor plate to a capacitance bridge circuit;
a second conducting layer which is one of deposited and etched on to the planar top surface, the second conducting layer having a pair of spaced apart symmetrical nulling loops on the measurement platform such that a sample may be placed between them on the measurement platform, the nulling loops being connected to each other and each nulling loop having a nulling loop lead located in the base;
means for providing a current to the nulling loops;
means for measuring the current provided to the nulling loops;
a block having a plate surface;
a metallized plate supported on the block plate surface forming a lower capacitor plate, the block and metallized plate oriented in close proximity and opposed to the first conductive layer forming an upper capacitor plate, creating a capacitance gap between the upper and lower capacitor plates, the metallized plate being electrically connected to the capacitance bridge circuit;
and
an electrically isolated thermometer in thermal contact with the second conducting layer at the base.

7 more elements

Dependencies are inferred from the claim text.

Electrically insulating cantilever magnetometer with mutually isolated and integrated thermometry, background elimination and null detection

Life of this patent

Electrically insulating cantilever magnetometer with mutually isolated and integrated thermometry, background elimination and null detection

Life of this patent

Abstract

Claims26