Substrate chamfering machine
AssigneeKao Corporation
InventorManabu Shibata
Life of this patent
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Abstract
A substrate inner/outer edge chamfering machine set for chamfering the outer and inner edges of substrates is shown, and includes inner and outer chamfering machines 11 with grinding wheels for chamfering the inner and outer edges, respectively, of each substrate. A measuring unit 12 successively measures the chamfer length of substrates worked by the inner and outer chamfering machines, and a measurement data processing unit 13 calculates the correction amount with respect to a grinding wheel feed amount according to measurement results from the measuring unit. A control unit 14 controls the operation of the inner and outer edge chamfering machines and corrects the grinding wheel feed amount according to the correction amount from the measurement data processing unit.
Claims12
A substrate chamfering machine for forming chamfers in a substrate edge comprising:
- a chamfering machine including a grinding wheel for chamfering the substrate edge;
- a measuring unit for successively measuring a chamfer length of substrates worked by the chamfering machine;
- a measurement data processing unit for calculating a correction amount with respect to a feed amount of the grinding wheel according to the measuring result of the measuring unit;
- and
- a control unit for controlling the operation of the chamfering machine and correcting the feed amount of the grinding wheel according to the correction amount calculated by the measurement data processing unit.
Dependencies are inferred from the claim text.