Processing apparatus with movable processing tool and processing method

A processing apparatus with a movable processing tool, said apparatus comprising:

• a position detecting sensor for detecting a rotary position of a to-be-processed object held by a holding member positioned on a rotary main shaft, wherein the position detecting sensor is a rotary angle detecting sensor for detecting a rotary angle of the object due to the rotation of the rotary main shaft to output a rotary angle signal indicating the rotary position of the object;
• a deflection detecting sensor for detecting an amount of rotational deflection of a processing reference surface of the object;
• a waveform shaping device for shaping an output signal from the deflection detecting sensor into a waveform approximating a sine curve;
• an operational device for calculating a positional correction amount for a processing tool at a processing point of the object based on an output signal of the waveform shaping device synchronously with rotation of the rotary main shaft;
• an output device for outputting the positional correction amount for every rotary position and every processing point based on an output signal from the operational device;
• a fine adjustment mechanism for minutely driving the processing tool based on an output signal from the output device;
• an NC table for moving in two dimensions the fine adjustment mechanism in order to process the object by the processing tool;
• and
• a frequency dividing device for frequency-dividing the rotary angle signal to decrease a number of rotary angle signals per rotation of the object, so that the operational device calculates the positional correction amount for the processing tool at the processing point of the object based on the output signal of the waveform shaping device synchronously with the rotation of the rotary main shaft and in synchronization with the frequency-divided rotary angle signal to output the positional correction amount to the output device, and the output device outputs the positional correction amount based on the output signal from the operational device and in synchronization with the frequency-divided rotary angle signal, the positional correction amount being used so as to correct a position of the processing tool in response to the rotational deflection amount of the processing reference surface, and to prevent a processed surface from being deflected with respect to the processing reference surface,
• wherein in the frequency dividing device, the number of rotary angle signals per rotation of the object is changed by changing a frequency division ratio of the frequency dividing device.

A processing method using a movable processing tool, the method comprising:

• rotating a to-be-processed object;
• detecting a rotary position of the object;
• detecting an amount of rotational deflection of a processing reference surface of the object;
• shaping a signal of the amount of the rotational deflection into a waveform approximating a sine wave;
• calculating a position correction amount for a processing tool at a processing point of the object on a basis of a signal of the approximated waveform synchronously with rotation of the rotary main shaft;
• outputting the calculated positional correction amount for every rotary position and every processing point based on a signal of the positional correction amount;
• minutely driving the processing tool based on a signal of the outputted positional correction amount by a fine adjustment mechanism;
• and
• moving the fine adjustment mechanism in two dimensions to process the object by the processing tool,
• wherein the rotary speed of the object at which the rotary position of the object and the amount of the deflection of the processing reference surface of the object are detected is slower than a rotary speed at which the object is processed by the processing tool.

A processing method using a movable processing tool, the method comprising:

• rotating a to-be-processed object;
• detecting a rotary position of the object;
• detecting an amount of rotational deflection of a processing reference surface of the object;
• shaping a signal of the amount of the rotational deflection into a waveform approximate to a sine wave;
• calculating a position correction amount for a processing tool at a processing point of the object based on a signal of the approximated waveform synchronously with rotation of the rotary main shaft;
• outputting the calculated positional correction amount for every rotary position and every processing point based on a signal of the positional correction amount;
• minutely driving the processing tool based on a signal of the outputted positional correction amount by a fine adjustment mechanism;
• moving the fine adjustment mechanism in two dimensions to process the object by the processing tool;
• detecting an amount of a change of an axial center of a main shaft onto which the object is held with a holding member;
• and
• removing the amount of the change from the amount of the rotational deflection before driving the fine adjustment mechanism.

A processing method using a movable processing tool, the method comprising:

• rotating a to-be-processed object;
• detecting a rotary position of the object;
• detecting an amount of rotational deflection of a processing reference surface of the object;
• shaping a signal of the amount of the rotational deflection into a waveform approximating a sine wave;
• calculating a position correction amount for a processing tool at a processing point of the object based on a signal of the approximated waveform synchronously with rotation of the rotary main shaft;
• outputting the calculated positional correction amount for every rotary position and every processing point based on a signal of the positional correction amount;
• minutely driving the processing tool based on a signal of the outputted positional correction amount by a fine adjustment mechanism;
• moving the fine adjustment mechanism in two dimensions to process the object by the processing tool, wherein while detecting the rotary position, a rotary angle of the object is detected based on the rotation of a rotary main shaft to output a rotary angle signal indicating the rotary position;
• and
• dividing a frequency of the rotary angle signal to decrease a number of rotary angle signals per rotation of the object, wherein:
• in the calculating operation, the positional correction amount for the processing tool at the processing point of the object is calculated on the basis of the signal of the approximated waveform synchronously with the rotation of the rotary main shaft and in synchronization with the frequency-divided rotary angle signal,
• in the processing tool driving operation, the processing tool is minutely driven while a position of the processing tool is corrected in accordance with the positional correction amount outputted from the outputting step, and
• in the frequency dividing operation, the number of rotary angle signals per rotation of the object is changed by changing a frequency division ratio of a frequency dividing device for carrying out the dividing operation.

A processing apparatus with a movable processing tool, said apparatus comprising:

• a position detecting sensor for detecting a rotary position of a to-be-processed object held by a holding member positioned on a rotary main shaft;
• a deflection detecting sensor for detecting an amount of rotational deflection of a processing reference surface of the object;
• a waveform shaping device for shaping an output signal from the deflection detecting sensor into a waveform approximating a sine curve;
• an operational device for calculating a positional correction amount for a processing tool at a processing point of the object based on an output signal of the waveform shaping device synchronously with rotation of the rotary main shaft;
• an output device for outputting the positional correction amount for every rotary position and every processing point based on an output signal from the operational device;
• a fine adjustment mechanism for minutely driving the processing tool based on an output signal from the output device;
• and
• an NC table for moving in two dimensions the fine adjustment mechanism in order to process the object by the processing tool,
• wherein the deflection detecting sensor detects an amount of a change of an axial center of the rotary main shaft, and the amount of the change is removed from the amount of the deflection before driving the fine adjustment mechanism by the operational device.

A processing apparatus with a movable processing tool, said apparatus comprising:

• a position detecting sensor for detecting a rotary position of a to-be-processed object held by a holding member positioned on a rotary main shaft, wherein the position detecting sensor is a rotary angle detecting sensor for detecting a rotary angle of a to-be-processed object due to the rotation of the rotary main shaft to output a rotary angle signal indicating the rotary position of the object;
• a deflection detecting sensor for detecting an amount of rotational deflection of a processing reference surface of the object;
• a waveform shaping device for shaping an output signal from the deflection detecting sensor into a waveform approximating a sine curve;
• an operational device for calculating a positional correction amount for a processing tool at a processing point of the object based on an output signal of the waveform shaping device synchronously with rotation of the rotary main shaft;
• an output device for outputting the positional correction amount for every rotary position and every processing point based on an output signal from the operational device;
• a fine adjustment mechanism for minutely driving the processing tool based on an output signal from the output device;
• an NC table for moving in two dimensions the fine adjustment mechanism in order to process the object by the processing tool;
• and
• a frequency dividing device for frequency-dividing the rotary angle signal to decrease a number of rotary angle signals per rotation of the object, so that the operational device calculates the positional correction amount for the processing tool at the processing point of the object based on the output signal of the waveform shaping device synchronously with the rotation of the rotary main shaft and in synchronization with the frequency-divided rotary angle signal to output the positional correction amount to the output device, and the output device outputs the positional correction amount based on the output signal from the operational device and in synchronization with the frequency-divided rotary angle signal, the positional correction amount being used so as to correct a position of the processing tool in response to the rotational deflection amount of the processing reference surface, and to prevent a processed surface from being deflected with respect to the processing reference surface,
• wherein the waveform shaping device is a waveform shaping circuit, the operational device is an operational circuit, the output device is an output circuit, and the frequency dividing device is a frequency dividing circuit.