US 5,733,609 A · Ceramic coatings synthesized by chemical reactions energized by laser plasmas

Abstract

The methods for ceramic coatings synthesized by chemical reactions energized by laser plasmas were invented. Laser plasmas were generated by pulsed laser beams focused by a reflector having a hole. The ions and electrons were formed by the laser plasmas from gaseous molecules or solid materials. The first method applied an electric or a magnetic field to separate ions from electrons and to promote ion-atom and ion-molecule reactions. The product molecular ions were focused and deflected to coat patterned coatings with extremely high precision. The second method allowed the electron-ion recombinations to form product molecules or radicals to form high uniform coatings. These two methods and their combinations provides consistent, or continuous modulations, or discrete layers in vast varieties of chemical compositions and crystal structures. Ceramic films were separated by dissolving the substrates.

Claims28

Dependent claims

A method for producing a ceramic coating on a substrate comprising the steps of:

providing at least a chamber having at least a gas inlet;
providing at least a reactant, either a gas from a nozzle, or a target with at least a moving surface;
providing at least a reflector with a hole in a paraboloidal or ellipsoidal surface, between said substrate and either said nozzle or said target;
focusing at least a laser beam by said reflector, either in a space in front of said nozzle, or substantially on said moving surface of said target to form at least a laser plasma from said reactant and such that an optical axis of said laser beam is perpendicular to said gas sprayed by said nozzle;
forming a mixture of radicals, molecules, and molecular ions by chemical reactions involving said laser plasma, wherein said mixture passes through said hole in said reflector;
and
forming said ceramic coating on said substrate from said mixture.

4 more elements

A method for producing a patterned ceramic coating on a substrate comprising the steps of:

providing at least a chamber kept under a vacuum having at least a gas inlet;
providing at least a reactant, either a gas from a nozzle, or a target with at least a moving surface;
providing at least a reflector with a hole in a paraboloidal or ellipsoidal surface, between said substrate and either said nozzle or said target;
providing at least an ion focusing device using either an electrostatic field or a magnetic field;
providing at least an ion deflection system using either an electrostatic field or a magnetic field, wherein said deflection system consists of a X-deflection device and a Y-deflection device;
focusing at least a laser beam by said reflector, either in a space in front of said nozzle, or substantially on said moving surface of said target to form at least a laser plasma from said reactant and such that an optical axis of said laser beam is perpendicular to said gas sprayed by said nozzle, wherein said laser plasma consists of ionized gases;
applying at least an electric field to accelerate said ionized gases;
forming product ions by chemical reactions involving said ionized gases, wherein said product ions pass through said hole in said reflector;
focusing said product ions by said ion focusing device to form an ion beam;
deflecting said ion beam by said deflection devices;
charging said substrate with negative charges for neutralizing positive charges from said ion beam;
and
forming said patterned ceramic coating on said substrate from said ion beam.

10 more elements

Dependencies are inferred from the claim text.

Ceramic coatings synthesized by chemical reactions energized by laser plasmas

Life of this patent

Ceramic coatings synthesized by chemical reactions energized by laser plasmas

Life of this patent

Abstract

Claims28