Method and apparatus for aligning and supporting semiconductor process gas delivery and regulation components
AssigneeControl Systems, Inc.
InventorsThomas Aloysius Barr, Christopher Velton Barr, James Charles Elliott, Dirk Alan Frew
Life of this patent
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Abstract
A mounting system, for supporting semiconductor process gas delivery and control components for assembly and use as a gas stick, aligns the connection union seals between fittings on adjacent components to absorb accumulated stresses resulting from manufacturing tolerances and reduce the likelihood of seal leakage. Components are mounted on individual upper clamp members which are secured to lower clamp members to form a slidable but non-rotatable radially aligned yoke around a rigid elongate support member for subsequent longitudinal positioning and joining of adjacent fittings.
Claims12
A mount system to align and support gas stick semiconductor process gas delivery and regulation components along a common axis, said mount comprising:
- an elongate support member having a first end, a second end, an intermediate section therebetween, and a longitudinal axis;
- a plurality of component mounts attachable along said intermediate section, said plurality of component mounts sized to support gas stick components at a selected distance from said support member;
- means for rigidly attaching gas stick components to each of said plurality of component mounts;
- means for slidably but non-rotatably attaching said plurality of component mounts to said support member in a common radial alignment with respect to said support member longitudinal axis;
- and
- means for rigidly attaching said plurality of component mounts to said support member.
A method for aligning and supporting the semiconductor process gas delivery and regulation components of a gas stick along a common axis for the joining of adjacent union fittings therebetween, the method comprising:
- rigidly attaching each gas stick component to a component mount;
- slidably but non-rotatably attaching each of said component mounts to a rigid elongate support member spaced from a work surface;
- sliding adjacent said components into input/output fitting adjacent one to another;
- uniting adjacent said components at union junctions therebetween to form the gas stick;
- and
- rigidly attaching each of said component mounts to said rigid elongate support member.
A method for aligning and supporting each of the semiconductor process gas delivery and regulation components of a gas stick along a common axis for the joining of adjacent input/output fittings therebetween, the method comprising:
- rigidly attaching each gas stick component to the upper surface of an upper clamp member;
- positioning a lower clamp member under a rigid elongate support member having a longitudinal axis;
- positioning the lower surface of said upper clamp member over said rigid elongate support member longitudinally aligned over said lower clamp member;
- securing said upper clamp member to said lower clamp member to form a slidable but non-rotatable yoke around said rigid elongate member;
- sliding adjacent said yokes into fitting-engaging proximity one to another;
- sealingly joining adjacent component input/output fittings one to another;
- and
- further securing said upper clamp members to said corresponding lower clamp members to form non-slidable rigid attachments to said elongate support member.
Dependencies are inferred from the claim text.