Position sensitive particle sensor and manufacturing method therefor
AssigneeImec Vzw
InventorsEric Beyne, Jordi Nelissen, Ronaldo Bellazzini
Life of this patent
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Abstract
A microgap sensor, and manufacturing method therefor, which includes a cathode and at least one strip anode parallel to the cathode, in which the strip anode is separated and insulated from the cathode by an insulation layer made from a polymeric material. The microgap sensor further includes a cathodic drift electrode substantially parallel to the cathode, the cathode and drift electrode being separated by a gap fillable with an ionizable gas. The gap is considerably greater than the thickness of the insulating layer, and the strip anode is located in the gap between the cathode and the drift electrode.
Claims36
A microgap sensor comprising:
- a cathode;
- at least one strip anode parallel to said cathode, said strip anode being separated and insulated from said cathode by an insulation layer, wherein said insulation layer is made from a polymeric material;
- and
- a cathodic drift electrode substantially parallel to said cathode, said cathode and said drift electrode being separated by a gap fillable with an ionizable gas, said gap being considerably greater than the thickness of said insulating layer, said strip anode being located in the gap between said cathode and said drift electrode.
A method of manufacture of a microgap sensor, comprising the steps of:
- forming a first conductive cathode layer;
- depositing a polymeric insulating layer onto said first conductive cathode layer;
- depositing a second conductive layer onto said polymeric insulating layer;
- carrying out a first etch on said second conductive layer to form a plurality of anode strip electrodes;
- removing the polymeric insulating layer except underneath said plurality of anode strip electrodes;
- and
- mounting a cathodic drift electrode substantially parallel to said first conductive cathode layer, said first conductive cathode layer and said cathodic drift electrode being separated by a gap, said gap being considerably greater than the thickness of said insulating layer and said plurality of anode strip electrodes lying between said first conductive cathode layer and said cathodic drift electrode.
Dependencies are inferred from the claim text.