Back to results
US 5,729,565 AGranted
Discharge unit and electrode for a pulsed discharge laser
AssigneeLambda Physik Gesellschaft Zur Herstellung Von Lasern mbH
InventorsAnton Meller, Frank Voss
Life of this patent
Estimating the term…
Abstract
An electrode for a gas discharge laser. Electrodes which consist, at least in part, of zirconium are suggested for use in gas discharge lasers containing fluorine.
Claims8
A high pressure excimer or molecular laser comprising:
- a chamber for holding a gas mixture;
- a gas mixture, located in said chamber, said mixture including a halogen gas selected from the group consisting of fluorine and chlorine, wherein said lasing gas mixture has a pressure in excess of 1.5 bar;
- and
- a pair of electrodes located within said chamber for generating a pulsed gas discharge therebetween and wherein said electrodes are formed from a substantially non-oxidized and uncoated material selected from the group consisting of zirconium, yttrium, hafnium, lanthanum and alloys thereof.
1 more element
Dependencies are inferred from the claim text.