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US 5,728,936 AGranted
Rotary speed sensor
AssigneeRobert Bosch GmbH
InventorMarkus Lutz
Life of this patent
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Abstract
A rotary speed sensor including an oscillator that can be excited to oscillate in a first direction (X direction). Upon a rotation about the Z axis, Coriolis forces in a second direction (Y direction) occur on the oscillator. The Coriolis forces are transmitted by oscillator springs to a detection element, where they can be detected from the deflection of movable electrodes.
Claims11
A rotary speed sensor, comprising:
- at least one oscillator (1) and a substrate (21), wherein the oscillator can be excited to perform oscillations relative to the substrate in a first direction (X direction) and, upon a rotation, can be deflected by incident Coriolis forces in a second direction (Y direction) that is perpendicular to the first direction;
- at least one elastic element (2) coupling the oscillator to at least one detection element (3), wherein the elastic element (2) has a low spring constant in the first direction (X) and a high spring constant in the second direction (Y);
- and
- at least two deflection springs (9) anchoring the at least one detection element (3) to said substrate (21), wherein the deflection springs (9) have a high spring constant in the first direction (X) and a low spring constant in the second direction (Y).
1 more element
Dependencies are inferred from the claim text.