Technique for improving within-wafer non-uniformity of material removal for performing CMP
AssigneeLam Research Corporation
InventorsAnthony S. Meyer, Thomas G. Mallon, Bradley Withers, Douglas W. Young
Life of this patent
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Abstract
A platen ring for use with a platen on a linear polisher, in which the platen ring is used to reduce fluctuation of the belt/pad assembly as it encounters the platen. The platen ring is disposed around the platen so that a fluctuation of the belt/pad assembly is dampened before the belt/pad assembly engages the platen. Reduction of the belt/pad fluctuation ensures a reduction in the within-wafer non-uniformity and provides for a more uniform polishing rate across the surface of the wafer.
Claims28
A support housing for supporting a linearly moving belt and a polishing pad disposed on said belt, in which said belt is disposed between said support housing and a surface of a material upon which said polishing pad engages to polish said material comprising:
- a platen for having said belt reside thereon and in which a force exerted by said material onto said pad is counteracted by said platen, said platen disposed opposite said material and underlying said belt;
- a damper coupled to said platen and disposed along a periphery of said platen where said belt engages said platen, said damper for reducing belt or pad fluctuation where said pad engages said material to obtain a more uniform polishing rate across said surface of said material.
A support housing for supporting a linearly moving belt and a polishing pad disposed on said belt, in which said belt is disposed between said support housing and a surface of a semiconductor wafer upon which said polishing pad engages to polish said semiconductor wafer comprising:
- a platen for having said belt reside thereon and in which a downward force exerted by said wafer onto said pad is counteracted by said platen, said platen disposed opposite said wafer and underlying said belt;
- a damper coupled to said platen and disposed along a periphery of said platen where said belt engages said platen, said damper for reducing belt or pad fluctuation where said pad engages said wafer to obtain a more uniform polishing rate across said surface of said wafer.
A linear polisher for performing chemical-mechanical polishing in which a linearly moving belt and a polishing pad disposed on said belt engages a surface of a layer formed on a semiconductor wafer pressed downward onto said pad for polishing said surface comprising:
- a platen for having said belt reside thereon and in which a downward force exerted by said wafer onto said pad is counteracted by said platen, said platen disposed opposite said wafer and underlying said belt;
- a dampening ring coupled to circumscribe said platen for reducing belt or pad fluctuation where said pad engages said wafer.
The linear polisher of 13 wherein said width of said wafer retaining ring is approximately from 0.5 inches to a width of said dampening ring.
A method of polishing a planar surface of a material by engaging said surface against a polishing pad disposed on a linearly moving belt in which said belt is disposed between a support platen and said material, comprising the steps of:
- providing a damper disposed along a periphery of said platen where said belt engages said platen, said damper for reducing belt or pad fluctuation where said pad engages said material to obtain a more uniform polishing rate across said surface of said material, said damper also being disposed beyond a periphery of said material;
- polishing said material by linearly moving said belt and pad across said surface of said material.
A method of polishing a surface of a semiconductor wafer by engaging said surface against a polishing pad disposed on a linearly moving belt in which said belt is disposed between a support platen and said wafer, comprising the steps of:
- providing a dampening ring disposed along a periphery of said platen where said belt engages said platen, said dampening ring for reducing belt or pad fluctuation where said pad engages said wafer to obtain a more uniform polishing rate across said surface of said wafer, said dampening ring being disposed beyond a periphery of said wafer;
- polishing said wafer by linearly moving said belt and pad across said surface of said wafer.
In a linear polisher for performing chemical-mechanical polishing, a method of polishing a surface of a layer formed on a semiconductor wafer by engaging said surface against a polishing pad disposed on a linearly moving belt in which said belt is disposed between a support platen and said wafer, comprising the steps of:
- providing a dampening ring disposed to circumscribe said platen for reducing belt or pad fluctuation where said pad engages said wafer;
- polishing said layer by linearly moving said belt and pad across said surface of said layer.
Dependencies are inferred from the claim text.