Process for recovering sulfur hexafluoride

A process for recovering sulfur hexafluoride comprising the step of contacting a gas stream comprising less than about 50 volume percent sulfur hexafluoride and at least one component selected from the group consisting of air, carbon tetrafluoride, argon, helium, carbon monoxide, carbon dioxide, nitrogen, oxygen, neon, and hydrogen with an adsorbent selected from the group consisting of zeolites, activated carbons, and silicalites, the contacting carried out at a temperature from about 10.degree. to about 40.degree. C. and a pressure at least about 100 psia, the temperature and pressure such that the temperature is above the boiling point of the sulfur hexafluoride for the contacting pressure, and at a gas hourly space velocity of less than about 240 h.sup.-4.

A process for recovering sulfur hexafluoride comprising the steps of:

• contacting a gas stream comprising less than about 20 volume percent sulfur hexafluoride and at least one component selected from the group consisting of air, carbon tetrafluoride, argon, helium, carbon monoxide, carbon dioxide, nitrogen, oxygen, neon, and hydrogen with an adsorbent selected from the group consisting of zeolites, activated carbons, and silicalites, the contacting carried out at a temperature from about 25.degree. to about 40.degree. C. and a pressure at least about 100 psia, the temperature and pressure such that the temperature is above the boiling point of the sulfur hexafluoride for the contacting pressure, and at a gas hourly space velocity of less than about 240 h.sup.-1 ;
• and
• regenerating the sulfur hexafluoride recovered by lowering the pressure to about 14.7 psia and at a temperature of at least about 10.degree. C.