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AssigneeHonda Giken Kogyo Kabushiki Kaisha
InventorsTakashi Hosoi, Satoshi Hiyama, Sukeyuju Shinotuka, Mizuho Doi, Hiroshi Yamakawa, Nariaki Kuriyama, Tomoyuki Nishio, Atsushi Inaba, Nobuhiro Fueki
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A very small and economical acceleration sensor which can detect acting acceleration with high sensitivity and high accuracy by precisely processing a semiconductor substrate and the like by using the photoengraving technique in a semiconductor manufacturing process to accurately form the elements themselves such as a sensor case, a cavity, a heater, a temperature-sensing resistor element, and a heat-type temperature-sensing resistor element, and the relative placement of each element. One embodiment of the acceleration sensor can detect acceleration acting from any of the three-dimensional directions.
An acceleration sensor having a temperature-sensing resistor element and a stationary gas disposed in a closed space with temperature distribution in an equilibrium state, said acceleration sensor detecting temperature at an unbalanced state of said temperature distribution, said unbalanced state being caused in response to acceleration acting on a sensor case, with a change in resistance of said temperature-sensing resistor element, wherein:
An acceleration sensor having a temperature-sensing resistor element disposed in a closed space with temperature distribution in an equilibrium state, said acceleration sensor detecting temperature at an unbalanced state of said temperature distribution, said unbalanced state being caused in response to acceleration acting on the acceleration sensor, with a change in resistance of said temperature-sensing resistor element, said acceleration sensor comprising:
An acceleration sensor having temperature-sensing resistor elements disposed in a closed space with temperature distribution in an equilibrium state, said acceleration sensor detecting temperature at an unbalanced state of said temperature distribution, said unbalanced state being caused in response to acceleration acting on the acceleration sensor with a change in resistance of said temperature-sensing resistor elements, said acceleration sensor comprising:
An acceleration sensor having temperature-sensing resistor elements disposed in a closed space with the temperature distribution in an equilibrium state, said acceleration sensor detecting temperature at an unbalanced state of said temperature distribution, which unbalanced state is caused in response to acceleration acting on a sensor case, with a change of resistance of said temperature-sensing resistor elements, said acceleration sensor comprising:
An acceleration sensor comprising
Dependencies are inferred from the claim text.