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US 5,716,048 AGranted
Variable mask and universal vacuum drum
AssigneeOptronics International, LLC
InventorRoger J. Morrissette
Life of this patent
Estimating the term…
Abstract
A vacuum drum apparatus on which a mask is mounted having a resilient surface and an array of holes suitable for a substrate of a given size. The drum is a circular cylinder perforated with an array of holes. A hollow chamber within the drum is connected to a controlled pressure source for providing a vacuum. The mask may be magnetically attracted about the outer surface of the drum. Thus, the mask may be made of a flexible ferromagnetic sheet. The mask is preferably elastomeric and may include an inextensible layer.
Claims11
A mask for mounting a substrate of a given area onto a vacuum drum comprising:
- a flexible elastomeric sheet having two flat opposing outer faces and an inextensible layer, said sheet having a plurality of unobstructed holes piercing through said sheet arranged in an array covering an area no greater than the given area of said substrate, each of said holes having a perimeter formed in elastomeric material on one of the flat outer faces of said sheet.
Dependencies are inferred from the claim text.