Stage device capable of applying a damping force to a movable member
AssigneeNikon Corporation
InventorSusumu Makinouchi
Life of this patent
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Abstract
A stage device comprises a base, a movable member movably provided on the base, a damping system for giving a damping force to the movable member, a position detector for detecting a position of the movable member with respect to the base, a deviation detector for obtaining a deviation of a position of the movable member from a target position of the movable member on the base on the basis of a result of the detection by the position detector and a damping control system for changing the damping force in accordance with the deviation detected by the deviation detector.
Claims12
A stage device comprising:
- a base;
- a movable member movably provided on said base;
- a driving system for moving said movable member with respect to said base;
- a damping system for applying a damping force to said movable member;
- a position detector for detecting a position of said movable member with respect to said base;
- a deviation detector for obtaining a deviation of a position of said movable member from a target position of said movable member on said base based on a result of the applied detection by said position detector;
- and
- a damping control system for changing the damping force in accordance with the deviation detected by said deviation detector.
A stage device comprising:
- a base;
- a movable member movably provided on said base;
- a driving system for moving said movable member with respect to said base;
- a damping system for applying a damping force to said movable member;
- and
- a damping control system for changing the applied damping force in accordance with a detected deviation from a target position of said movable member on said base.
An exposure apparatus for transferring a mask pattern on a substrate, comprising:
- a base;
- a table for supporting said substrate and movably provided on said base;
- a driving system for moving said table with respect to said base;
- a damping system for applying a damping force to said table;
- and
- a damping control system for changing the applied damping force in accordance with a detected deviation of said table from a target position on said base.
A method of controlling a stage, comprising the steps of:
- driving a movable member movably provided on a base toward a target position on said base;
- detecting a deviation of said movable member from said target position during the driving of said movable member;
- and
- applying a damping force against said movable member during the driving of said movable member and changing the applied damping force in accordance with a magnitude of the detected deviation.
Dependencies are inferred from the claim text.