# US 5,710,632 A · Methodology for the determination of the minimum and gap flying height of a thin-film slider > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 5,710,632 A - Document ID: US5710632A - Status: Granted - Kind: A - Application number: 08/692,529 - Filed: 1996-08-06 - Granted: 1998-01-20 - Earliest claimed: 1996-08-06 - Assignees: Samsung Electronics Co., Ltd. - Inventors: Yufeng Li - Web page: https://patentgrep.com/patent/US5710632A ## CPC - G01B 11/14: for measuring distance or clearance between spaced objects or spaced apertures (G01B11/26 takes precedence; rangefinders G01C3/00) - G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS ## Abstract A method and apparatus for measuring the flying height of a recording head that is separated from a rotating disk by an air bearing. The recording head has a trailing edge that extends from an interface of a substrate. The trailing edge has an embedded read/write element and an outer tip. The recording head is loaded into a flying height tester that can measure the distance between the disk and any point on the head. The flying height tester contains a transparent disk that is rotated to create an air bearing between the head and the disk. The outer tip is separated from the disk by an air bearing height h.sub.m. The read/write element is separated from the disk by an air bearing height h.sub.g. The substrate interface is separated from the disk by an air bearing height h.sub.i. The flying height tester measures the height h.sub.g to obtain the distance between the read/write element and the disk. ## Claims ### Claim 1 A method for measuring a height of an air bearing between a recording head and a rotating disk, wherein the recording head has a read/write element located within a trailing edge that extends from an interface of a head substrate, the trailing edge has an outer tip and an air bearing surface that is recessed from an air bearing surface of the head substrate, comprising the steps of: a) rotating the disk so that the interface of the head substrate is separated from the disk by an air bearing height h.sub.i, the read/write element is separated from the disk by an air bearing height h.sub.g, and the trailing edge outer tip is separated from the disk by an air bearing height h.sub.m ; and, b) measuring the heights h.sub.i, h.sub.g and h.sub.m. ### Claim 2 (depends on 1) The method as recited in claim 1, wherein the heights are measured by directing a light beam through the disk and detecting the light beam reflected from the recording head. ### Claim 3 (depends on 2) The method as recited in claim 2, further comprising the steps of measuring an optical property of the head substrate and an optical property of the trailing edge and utilizing the optical properties to measure the heights h.sub.i, h.sub.g and h.sub.m. ### Claim 4 (depends on 3) The method as recited in claim 3, wherein the optical properties include an index of refraction n and a extinction coefficient k for the head substrate and the trailing edge. ### Claim 5 (depends on 1) The method as recited in claim 1, wherein the height h.sub.g is measured by measuring a height h.sub.g 1 and a height h.sub.g 2 located at opposite sides of the read/write element and calculating an average of h.sub.g 1 and h.sub.g 2. ### Claim 6 (depends on 1) The method as recited in claim 1, wherein the height h.sub.g is measured with a light beam that has a spot area that is at least 20 times an area of the read/write element. ### Claim 7 (depends on 1) The method as recited in claim 1, further comprising the steps of measuring a plurality of profile data of the head substrate and the trailing edge, inverting, rotating and increasing the profile data, measuring a plurality of air bearing heights and then comparing the measured air bearing heights with said inverted, rotated and increased profile data to determine an error. ### Claim 8 (depends on 7) The method as recited in claim 7, wherein the measured air bearing heights include points on the substrate and the trailing edge. ### Claim 9 A method for measuring a height of an air bearing between a recording head and a rotating disk, wherein the recording head has a read/write element located within a trailing edge that extends from an interface of a head substrate, the trailing edge has an outer tip and an air bearing surface that is recessed from an air bearing surface of the head substrate, comprising the steps of: a) measuring an index of refraction n and an extinction coefficient k for the head substrate and the trailing edge; a) rotating the disk so that the interface of the head substrate is separated from the disk by an air bearing height h.sub.i, the read/write element is separated from the disk by an air bearing height h.sub.g, and the trailing edge outer tip is separated from the disk by an air bearing height h.sub.m ; b) measuring the heights h.sub.i, h.sub.g and h.sub.m using the index of refraction n and extinction coefficient k of the head substrate and trailing edge; c) measuring a plurality of profile data of the head substrate and the trailing edge; d) measuring an air bearing height h.sub.1 on the recording head; e) varying the profile data so that a corresponding point is equal to the height h.sub.1 ; and, f) comparing the measured heights h.sub.g and h.sub.m with corresponding points of the varied profile data to determine an error. ### Claim 10 (depends on 9) The method as recited in claim 9, wherein the heights are measured by directing a light beam through the disk and detecting the light beam reflected from the recording head. ### Claim 11 (depends on 10) The method as recited in claim 10, wherein the height h.sub.g is measured by measuring a height h.sub.g 1 and a height h.sub.g 2 located at opposite sides of the read/write element and calculating an average of h.sub.g 1 and h.sub.g 2. ### Claim 12 (depends on 10) The method as recited in claim 10, wherein the height h.sub.g is measured with a beam that has a spot area that is at least 20 times an area of the read/write element. ### Claim 13 A method for verifying a measured height of an air bearing of a recording head which has a read/write element located within a trailing edge that extends from an interface of a head substrate, the trailing edge has an outer tip and an air bearing surface that is recessed from an air bearing surface of the head substrate, wherein the head substrate is separated from a rotating disk by an air bearing height h.sub.i, the read/write element is separated from the disk by an air bearing height h.sub.g, and the trailing edge outer tip is separated from the disk by an air bearing height h.sub.m, comprising the steps of: a) measuring a profile of the head substrate and the trailing edge; b) measuring an air bearing height h.sub.1 on the recording head; c) varying the profile data so that a corresponding point of the profile data is equal to the height h.sub.1 ; and; d) comparing the measured heights h.sub.g and h.sub.m with corresponding points of said varied profile data to determine an error. ### Claim 14 (depends on 13) The method as recited in claim 13, wherein said profile data is varied by inverting and rotating said measured profile data. ### Claim 15 A system for measuring a height of an air bearing between a recording head and a rotating disk, wherein the recording head has a read/write element located within a trailing edge that extends from an interface of a head substrate, the trailing edge has an outer tip and an air bearing surface that is recessed from an air bearing surface of the head substrate, comprising: a disk that rotates adjacent to the recording head such that the interface of the head substrate is separated from the disk by an air bearing height h.sub.i, the read/write element is separated from the disk by an air bearing height hg, and the trailing edge outer tip is separated from the disk by an air bearing height h.sub.m ; a light source that directs a light beam through the disk so that the light beam is reflected from the recording head; a photodetector that detects the reflected light beam; a mechanism that moves the light beam relative to the recording head so that the light beam is reflected from the interface of the head substrate, the read/write element, and the trailing edge outer tip; and, a computer which calculates the heights h.sub.i, h.sub.g and h.sub.m from the reflected light beam. ### Claim 16 (depends on 15) The system as recited in claim 15, further comprising an ellipsometer that measures an optical property of the head substrate and an optical property of the trailing edge, wherein the optical properties are utilized to calculate the heights h.sub.i, h.sub.g and h.sub.m. ### Claim 17 (depends on 15) The system as recited in claim 15, wherein the optical properties include an index of refraction n and an extinction coefficient k for the head substrate and trailing edge. ### Claim 18 (depends on 15) The system as recited in claim 15, wherein the light beam is moved to locations at opposite sides of the read/write element to measure the height h.sub.g. ### Claim 19 (depends on 15) The system as recited in claim 15, wherein the light beam that has a spot area that is at least 20 times an area of the read/write element. ### Claim 20 (depends on 19) The system as recited in claim 19, further comprising a profilometer that measures a plurality of profile data that are compared with the measured heights to determine an error.