# US 5,710,583 A · Ink jet image recorder

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- Number: US 5,710,583 A
- Document ID: US5710583A
- Status: Granted
- Kind: A
- Application number: 08/587,803
- Filed: 1995-12-29
- Granted: 1998-01-20
- Earliest claimed: 1992-05-29
- Assignees: Hitachi Koki Co., Ltd.
- Inventors: Masao Mitani
- Web page: https://patentgrep.com/patent/US5710583A

## CPC

- B41J 2/1412: {Shape}
- B41J 2/005: characterised by bringing liquid or particles selectively into contact with a printing material (printing by selective application of impact or pressure on a printing or impression-transfer material B41J2/22)
- B41J 2/14056: {Plural heating elements per ink chamber}
- B41J 2/14129: {Layer structure}
- B41J 2/1603: {of the front shooter type}
- B41J 2/1604: {of the edge shooter type}
- B41J 2/1629: {wet etching}
- B41J 2/1631: {photolithography}
- B41J 2/1632: {machining}
- B41J 2202/03: Specific materials used
- B41J 2202/11: characterised by specific geometrical characteristics
- B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS

## Abstract

A liquid droplet ejecting recording head includes a wall defining a chamber for being filled with recording liquid, said wall having a portion for defining an orifice communicated with the chamber; and a thin-film resistor provided on a surface of the wall facing the chamber so as to be located in the chamber, the thin-film resistor having one surface facing the chamber with which the thin-film resistor may be exposed to the recording liquid contained in the chamber, the thin-film resistor being energized with pulsed electric current for generating pulsed heat to directly heat the recording liquid, to thereby allow the recording liquid to be ejected outside through the orifice from the chamber in the form of a droplet and to be attached onto a surface of image recording medium positioned in confrontation with the orifice.

## Claims

### Claim 1

A liquid droplet ejecting recording head for ejecting from an orifice a recording liquid filled in a chamber communicated with the orifice in the form of a droplet, to thereby attach the droplet to an image recording medium and record an image thereon, said liquid droplet ejecting recording head comprising:
a wall defining a chamber for being filled with recording liquid, said wall having a portion for defining said orifice communicated with the chamber;
a thin-film resistor provided on a surface of said wall facing the chamber so as to be located in the chamber, said thin-film resistor having one surface facing the chamber with which said thin-film resistor is exposed to the recording liquid contained in the chamber;
means for energizing said thin-film resistor with pulsed electric current for generating pulsed heat to directly heat the recording liquid, to thereby allow the recording liquid to be ejected outside through the orifice from the chamber in the form of a droplet and to be attached onto a surface of an image recording medium positioned in confrontation with the orifice,
wherein said thin-film resistor is made of a thin film of Cr--Si--SiO alloy, said thin film of Cr--Si--SiO alloy producing anti-cavitation and anti-galvanization properties of the thin-film resistor;
said liquid droplet ejecting recording head further comprising a thin-film conductor electrically connected to the thin-film resistor for applying the pulsed electric current thereto,
said thin-film conductor being provided on said thin-film resistor so as to have a surface with which said thin-film resistor is exposed to the recording liquid contained in the chamber, said thin-film conductor comprising nickel.

### Claim 2 (depends on 1)

A liquid droplet ejecting recording head as claimed in claim 1, wherein the wall includes a first wall part defining a reservoir for storing therein the recording liquid and a second wall part connected to the first wall part defining a channel for being filled with the recording liquid supplied from the reservoir, one end of said channel being communicated with the reservoir and another end of said channel being communicated with the orifice, and
wherein said thin-film resistor is provided on a surface of the second wall part facing the channel so as to be located in the channel, said thin-film resistor having the surface with which said thin-film resistor is exposed to the recording liquid contained in the channel to directly heat the recording liquid, to thereby allow the recording liquid to be ejected outside through the orifice from the channel in the form of a droplet.

### Claim 3 (depends on 2)

A liquid droplet ejecting recording head as claimed in claim 2, wherein the first wall part is disconnectable with the second wall part such that the reservoir is disengageable with the channel.

### Claim 4 (depends on 2)

A liquid droplet ejecting recording head as claimed in claim 2, wherein the channel has a channel axis along which the channel extends from the reservoir toward the orifice, the channel allowing the recording liquid to flow along the channel axis from the reservoir toward the orifice for refilling the channel after when the recording liquid is ejected through the orifice; and
wherein the orifice has a first end at which the orifice is communicated with the channel and a second end from which the orifice may eject the recording liquid toward the image recording medium, the orifice having an orifice axis along which the orifice extends from the first end toward the second end.

### Claim 5 (depends on 4)

A liquid droplet ejecting recording head as claimed in claim 4, wherein the orifice and the channel are axially aligned.

### Claim 6 (depends on 4)

A liquid droplet ejecting recording head as claimed in claim 4, wherein the orifice extends perpendicularly to the channel.

### Claim 7 (depends on 4)

A liquid droplet ejecting recording head as claimed in claim 4, wherein the surface of said thin-film resistor facing the channel has a resistor surface axis, with respect to which the surface of said thin-film resistor has an asymmetric shape, and wherein said thin-film resistor is provided in the channel in such a manner that the resistor surface axis extends perpendicularly to the channel axis.

### Claim 8 (depends on 7)

A liquid droplet ejecting recording head as claimed in claim 7, wherein said thin-film resistor is located in the channel at a position adjacent to the orifice, and wherein the orifice and the channel are axially aligned.

### Claim 9 (depends on 4)

A liquid droplet ejecting recording head as claimed in claim 4, wherein the second wall part defines a cross-sectional area of the channel along a plane perpendicular to the channel axis, the channel having a cross-sectional area distributing part, at least where said thin-film resistor is located, in which the cross-sectional area of the channel is varied along the channel axis so as to be distributed asymmetrically in the channel axis.

### Claim 10 (depends on 9)

A liquid droplet ejecting recording head as claimed in claim 9, wherein the cross-sectional area of the channel is decreased along the channel axis in a direction toward the orifice, in the cross-sectional area distributing part.

### Claim 11 (depends on 4)

A liquid droplet ejecting recording head as claimed in claim 4, wherein said thin-film resistor is located in the channel at a position adjacent to the orifice for ejecting recording liquid through the orifice,
further comprising an additional thin-film resistor provided on the surface of the second wall part facing the channel so as to be located in the channel,
said additional thin-film resistor having a surface facing the channel with which said additional thin-film resistor is exposed to the recording liquid contained in the channel,
said additional thin-film resistor being positioned in the channel at an upstream side of said thin-film resistor in the recording liquid flowing direction,
said additional thin-film resistor being energized by said means for energizing with pulsed electric current for generating pulsed heat to directly heat the recording liquid, to thereby allow the recording liquid to flow in the recording liquid flowing direction from the reservoir toward said thin-film resistor so as to promote the channel to be refilled with the recording liquid after said recording liquid ejected from the channel through the orifice.

### Claim 12 (depends on 11)

A liquid droplet ejecting recording head as claimed in claim 11, wherein said additional thin-film resistor comprises a thin film of Cr--Si--SiO alloy.

### Claim 13

A liquid droplet ejecting recording head for ejecting from an orifice a recording liquid filled in a chamber communicated with the orifice in the form of a droplet, to thereby attach the droplet to an image recording medium and record an image thereon, said liquid droplet ejecting recording head comprising:
a wall defining a chamber for being filled with recording liquid, said wall having a portion for defining said orifice communicated with the chamber;
a thin-film resistor provided on a surface of said wall facing the chamber so as to be located in the chamber, said thin-film resistor having one surface facing the chamber with which said thin-film resistor is exposed to the recording liquid contained in the chamber;
means for energizing said thin-film resistor with pulsed electric current for generating pulsed heat to directly heat the recording liquid, to thereby allow the recording liquid to be ejected outside through the orifice from the chamber in the form of a droplet and to be attached onto a surface of an image recording medium positioned in confrontation with the orifice,
wherein said thin-film resistor is made of a thin film of Ta--Si--SiO alloy, said thin film of Ta--Si--SiO alloy producing anti-cavitation and anti-galvanization properties of the thin-film resistor;
said liquid droplet ejecting recording head further comprising a thin-film conductor electrically connected to the thin-film resistor for applying the pulsed electric current thereto,
said thin-film conductor being provided on said thin-film resistor so as to have a surface with which said thin-film resistor is exposed to the recording liquid contained in the chamber, said thin-film conductor comprising nickel.

### Claim 14 (depends on 13)

A liquid droplet ejecting recording head as claimed in claim 13, wherein the wall includes a first wall part defining a reservoir for storing therein the recording liquid and a second wall part connected to the first wall part defining a channel for being filled with the recording liquid supplied from the reservoir, one end of said channel being communicated with the reservoir and another end of said channel being communicated with the orifice, and
wherein said thin-film resistor is provided on a surface of the second wall part facing the channel so as to be located in the channel,
said thin-film resistor having the surface with which said thin-film resistor is exposed to the recording liquid contained in the channel to directly heat the recording liquid, to thereby allow the recording liquid to be ejected outside through the orifice from the channel in the form of a droplet.

### Claim 15 (depends on 14)

A liquid droplet ejecting recording head as claimed in claim 14, wherein the first wall part is disconnectable with the second wall part such that the reservoir is disengageable with the channel.

### Claim 16 (depends on 14)

A liquid droplet ejecting recording head as claimed in claim 14, wherein the channel has a channel axis along which the channel extends from the reservoir toward the orifice, the channel allowing the recording liquid to flow along the channel axis from the reservoir toward the orifice for refilling the channel after when the recording liquid is ejected through the orifice; and
wherein the orifice has a first end at which the orifice is communicated with the channel and a second end from which the orifice ejects the recording liquid toward the image recording medium, the orifice having an orifice axis along which the orifice extends from the first end toward the second end.

### Claim 17 (depends on 16)

A liquid droplet ejecting recording head as claimed in claim 16, wherein the orifice and the channel are axially aligned.

### Claim 18 (depends on 16)

A liquid droplet ejecting recording head as claimed in claim 16, wherein the orifice extends perpendicularly to the channel.

### Claim 19 (depends on 16)

A liquid droplet ejecting recording head as claimed in claim 16, wherein the surface of said thin-film resistor facing the channel has a resistor surface axis, with respect to which the surface of said thin-film resistor has an asymmetric shape, and
wherein said thin-film resistor is provided in the channel in such a manner that the resistor surface axis extends perpendicularly to the channel axis.

### Claim 20 (depends on 19)

A liquid droplet ejecting recording head as claimed in claim 19, wherein said thin-film resistor is located in the channel at a position adjacent to the orifice, and wherein the orifice and the channel are axially aligned.

### Claim 21 (depends on 16)

A liquid droplet ejecting recording head as claimed in claim 16, wherein the second wall part defines a cross-sectional area of the channel along a plane perpendicular to the channel axis,
the channel having a cross-sectional area distributing part, at least where said thin-film resistor is located, in which the cross-sectional area of the channel is varied along the channel axis so as to be distributed asymmetrically in the channel axis.

### Claim 22 (depends on 21)

A liquid droplet ejecting recording head as claimed in claim 21, wherein the cross-sectional area of the channel is decreased along the channel axis in a direction toward the orifice, in the cross-sectional area distributing part.

### Claim 23 (depends on 16)

A liquid droplet ejecting recording head as claimed in claim 16, wherein said thin-film resistor is located in the channel at a position adjacent to the orifice for ejecting recording liquid through the orifice,
further comprising an additional thin-film resistor provided on the surface of the second wall part facing the channel so as to be located in the channel,
said additional thin-film resistor having a surface facing the channel with which said additional thin-film resistor is exposed to the recording liquid contained in the channel,
said additional thin-film resistor being positioned in the channel at an upstream side of said thin-film resistor in the recording liquid flowing direction,
said additional thin-film resistor being energized by said means for energizing with pulsed electric current for generating pulsed heat to directly heat the recording liquid, to thereby allow the recording liquid to flow in the recording liquid flowing direction from the reservoir toward said thin-film resistor so as to promote the channel to be refilled with the recording liquid after said recording liquid ejected from the channel through the orifice.

### Claim 24 (depends on 23)

A liquid droplet ejecting recording head as claimed in claim 23, wherein said additional thin-film resistor comprises a thin film of Ta--Si--SiO alloy.

### Claim 25

A liquid droplet ejecting recording head for ejecting from an orifice a recording liquid filled in a chamber communicated with the orifice in the form of a droplet, to thereby attach the droplet to an image recording medium and record an image thereon, said liquid droplet ejecting recording head comprising:
a wall defining a chamber for being filled with recording liquid, said wall having a portion for defining said orifice communicated with the chamber;
a thin-film resistor provided on a surface of said wall facing the chamber so as to be located in the chamber, said thin-film resistor having one surface facing the chamber with which said thin-film resistor is exposed to the recording liquid contained in the chamber;
means for energizing said thin-film resistor with pulsed electric current for generating pulsed heat to directly heat the recording liquid, to thereby allow the recording liquid to be ejected outside through the orifice from the chamber in the form of a droplet and to be attached onto a surface of an image recording medium positioned in confrontation with the orifice,
wherein said thin-film resistor is made of a thin film of Cr--Si--SiO alloy, said thin film of Cr--Si--SiO alloy producing anti-cavitation and anti-galvanization properties of the thin-film resistor;
said liquid droplet ejecting recording head further comprising a thin-film conductor electrically connected to the thin-film resistor for applying the pulsed electric current thereto,
said thin-film conductor being provided on said thin-film resistor so as to have a surface with which said thin-film resistor is exposed to the recording liquid contained in the chamber, said thin-film conductor comprising nickel,
said thin-film resistor being located in the chamber at a position adjacent to the orifice for ejecting the recording liquid through the orifice,
said liquid droplet ejecting recording head further comprising an additional thin-film resistor provided on the surface of said wall facing the chamber so as to be located in the chamber,
said additional thin-film resistor having a surface facing the chamber with which said additional resistor is exposed to the recording liquid contained in the chamber,
said thin-film resistor and said additional thin-film resistor being arranged so that said thin-film resistor is positioned between the orifice and said additional thin-film resistor,
said additional thin-film resistor being energized by said means for energizing with pulsed electric current, for generating pulsed heat to directly heat the recording liquid, to thereby allow the recording liquid to flow toward the orifice so as to promote the orifice to be refilled with the recording liquid after said recording liquid is ejected from the orifice.

### Claim 26 (depends on 25)

A liquid droplet ejecting recording head as claimed in claim 25, wherein the wall includes a first wall part defining a reservoir for storing therein the recording liquid and a second wall part connected to the first wall part defining a channel for being filled with the recording liquid supplied from the reservoir at a first end, the channel being communicated, at a second end, with the orifice, said channel including a channel axis,
said one surface of said thin-film resistor facing the channel having a resistor surface axis, with respect to which the surface of said thin-film resistor has an asymmetric shape, and wherein said thin-film resistor is provided in the channel in such a manner that the resistor surface axis extends perpendicularly to the channel axis.

### Claim 27 (depends on 26)

A liquid droplet ejecting recording head as claimed in claim 26, wherein the second wall part defines a cross-sectional area of the channel along a plane perpendicular to the channel axis, the channel having a cross-sectional area distributing part, at least where said thin-film resistor is located, in which the cross-sectional area of the channel is varied along the channel axis so as to be distributed asymmetrically in the channel axis.

### Claim 28 (depends on 26)

A liquid droplet ejecting recording head as claimed in claim 26, wherein the cross-sectional area of the channel is decreased along the channel axis in a direction toward the orifice, in the cross-sectional area distributing part.

### Claim 29

A liquid droplet ejecting recording head for ejecting from an orifice a recording liquid filled in a chamber communicated with the orifice in the form of a droplet, to thereby attach the droplet to an image recording medium and record an image thereon, said liquid droplet ejecting recording head comprising:
a wall defining a chamber for being filled with recording liquid, said wall having a portion for defining said orifice communicated with the chamber;
a thin-film resistor provided on a surface of said wall facing the chamber so as to be located in the chamber, said thin-film resistor having one surface facing the chamber with which said thin-film resistor is exposed to the recording liquid contained in the chamber;
means for energizing said thin-film resistor with pulsed electric current for generating pulsed heat to directly heat the recording liquid, to thereby allow the recording liquid to be ejected outside through the orifice from the chamber in the form of a droplet and to be attached onto a surface of an image recording medium positioned in confrontation with the orifice,
wherein said thin-film resistor is made of a thin film of Ta--Si--SiO alloy, said thin film of Ta--Si--SiO alloy producing anti-cavitation and anti-galvanization properties of the thin-film resistor;
said liquid droplet ejecting recording head further comprising a thin-film conductor electrically connected to the thin-film resistor for applying the pulsed electric current thereto,
said thin-film conductor being provided on said thin-film resistor so as to have a surface with which said thin-film resistor is exposed to the recording liquid contained in the chamber, said thin-film conductor comprising nickel,
said thin-film resistor being located in the chamber at a position adjacent to the orifice for ejecting the recording liquid through the orifice,
said liquid droplet ejecting recording head further comprising an additional thin-film resistor provided on the surface of said wall facing the chamber so as to be located in the chamber,
said additional thin-film resistor having a surface facing the chamber with which said additional resistor is exposed to the recording liquid contained in the chamber,
said thin-film resistor and said additional thin-film resistor being arranged so that said thin-film resistor is positioned between the orifice and said additional thin-film resistor,
said additional thin-film resistor being energized by said means for energizing with pulsed electric current, for generating pulsed heat to directly heat the recording liquid, to thereby allow the recording liquid to flow toward the orifice so as to promote the orifice to be refilled with the recording liquid after said recording liquid is ejected from the orifice.

### Claim 30 (depends on 29)

A liquid droplet ejecting recording head as claimed in claim 29, wherein the wall includes a first wall part defining a reservoir for storing therein the recording liquid and a second wall part connected to the first wall part defining a channel for being filled with the recording liquid supplied from the reservoir at a first end, the channel being communicated, at a second end, with the orifice, said channel including a channel axis,
said one surface of said thin-film resistor facing the channel having a resistor surface axis, with respect to which the surface of said thin-film resistor has an asymmetric shape, and wherein said thin-film resistor is provided in the channel in such a manner that the resistor surface axis extends perpendicularly to the channel axis.

### Claim 31 (depends on 30)

A liquid droplet ejecting recording head as claimed in claim 30, wherein the second wall part defines a cross-sectional area of the channel along a plane perpendicular to the channel axis, the channel having a cross-sectional area distributing part, at least where said thin-film resistor is located, in which the cross-sectional area of the channel is varied along the channel axis so as to be distributed asymmetrically in the channel axis.

### Claim 32 (depends on 30)

A liquid droplet ejecting recording head as claimed in claim 30, wherein the cross-sectional area of the channel is decreased along the channel axis in a direction toward the orifice, in the cross-sectional area distributing part.
