# US 5,710,538 A · Circuit having trim pads formed in scribe channel

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- Number: US 5,710,538 A
- Document ID: US5710538A
- Status: Granted
- Kind: A
- Application number: 08/535,303
- Filed: 1995-09-27
- Granted: 1998-01-20
- Earliest claimed: 1995-09-27
- Assignees: Micrel, Inc.
- Inventors: Raymond D. Zinn; Lawrence R. Sample; Michael J. Mottola
- Web page: https://patentgrep.com/patent/US5710538A

## CPC

- H10P 74/232: {comprising connection or disconnection of parts of a device in response to a measurement}
- H10P 74/273: {Interconnections for measuring or testing, e.g. probe pads}
- H10W 20/493: {Fuses, i.e. interconnections changeable from conductive to non-conductive}
- Y10T 29/49082: Resistor making
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

In accordance with the present invention, trim pads used in trimming on-chip resistive elements are formed in the scribe channels interposed between respective dice on a wafer. Metal traces connect the trim pads to their associated resistive elements formed on the dice. Thus, each trim pad formed within the scribe channels results in a corresponding increase in the usable silicon surface area of the dice, thereby saving valuable silicon real estate.

## Claims

### Claim 1

A resistive structure, having a resistance value, formed on a plurality of dice in a semiconductor wafer, said wafer having scribe channels interposed between said dice, said scribe channels identifying locations on said wafer where said wafer is to he sawed to separate said dice from one another, said resistive structure comprising:
one or more resistive elements formed on said dice;
a plurality of resistance control elements; and
a plurality of trim pads, said one or more resistive elements being shunted by respective ones of said resistance control elements and connected between respective pairs of said trim pads, wherein said trim pads are formed in said scribe channels, said resistive structure being formed such that a current above a predetermined level applied to a pair of said trim pads changes a resistance value of said resistive structure.

### Claim 2 (depends on 1)

The structure of claim 1 wherein said resistance control elements comprise a plurality of fusible links, each connected in parallel with an associated one of said one or more resistive elements.

### Claim 3 (depends on 1)

The structure of claim 1 wherein said one or more resistive elements comprise diffused resistive material.

### Claim 4 (depends on 1)

The structure of claim 1 wherein said one or more resistive elements comprise a resistive film.