# US 5,710,510 A · Apparatus and method for intra process on wafer monitoring of deposited layer permeability > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 5,710,510 A - Document ID: US5710510A - Status: Granted - Kind: A - Application number: 08/692,685 - Filed: 1996-08-06 - Granted: 1998-01-20 - Earliest claimed: 1996-08-06 - Assignees: International Business Machines Corporation - Inventors: David John Seagle; Joseph Francis Smyth - Web page: https://patentgrep.com/patent/US5710510A ## CPC - G11B 5/3166: {Testing or indicating in relation thereto, e.g. before the fabrication is completed} - G01N 27/72: by investigating magnetic variables - G01R 33/1223: {Measuring permeability, i.e. permeameters (G01R33/14 takes precedence)} - G11B 5/3113: {for improving the magnetic domain structure or avoiding the formation or displacement of undesirable magnetic domains} - G11B 5/3116: {Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks (G11B5/3113, G11B5/245 take precedence)} - Y10T 29/49036: including measuring or testing - G11B: INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER (recording measured values in a way that does not require playback through a transducer G01D9/00; recording or playback apparatus using mechanically marked tape, e.g. punched paper tape, or using unit records, e.g. punched or magnetically marked cards G06K; transferring data from one type of record carrier to another G06K1/18; circuits for coupling output of reproducer to radio receiver H04B1/20; gramophone pick-ups or like acoustic electromechanical transducers or circuits therefor H04R) - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) - Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ## Abstract A monitoring apparatus is provided for determining permeabilities of a vacuum-deposited second pole piece of a magnetic head at the wafer level by providing wafer-mounted monitors which have layers formed by the same masking and deposition steps employed in making the magnetic heads so that the layers of the monitors are replicated layers, except for a shaping layer on top of a replicated second pole piece of some of the monitors. Each monitor is a transformer wherein each of a primary winding and a secondary winding comprises essentially a replicated magnetic head. The first and second pole pieces of the replicated magnetic heads are joined so as to magnetically couple the primary and secondary windings that constitute the transformer. The replicated shaping layer is omitted in part to expose a portion of one of the replicated second pole pieces of a monitor, such as the front slope, the back slope or the yoke portion of the replicated second pole piece which corresponds to the front slope, the back slope or yoke respectively of the magnetic head. When a current is conducted through the replicated coils of the monitor a voltage reading can be taken to indicate the permeability of the exposed portion of the replicated second pole piece of the monitor. ## Claims ### Claim 1 An apparatus for determining a magnetic property of at least one magnetic head at a wafer level, comprising: first, second and third substantially identical magnetic heads mounted on a wafer; each magnetic head having a coil layer and a second pole piece; the second pole pieces of the second and third magnetic heads being magnetically joined so that the coil layers of the second and third magnetic head are magnetically coupled; and a magnetic shaping layer disposed on the second pole pieces of the second and third magnetic heads except for an exposed portion of the second pole piece of one of the second and third magnetic heads, the exposed portion corresponding to a selected portion of the second pole piece of the first magnetic head. ### Claim 2 (depends on 1) An apparatus as claimed in claim 1, including: the second pole piece of each of the first, second and third magnetic heads having a front slope, a back slope and a yoke therebetween; and one of the front slope, back slope and the yoke of the second pole piece of one of the second and third magnetic heads being exposed and corresponding to one of the front slope, back slope and the yoke of the second pole piece of the first magnetic head. ### Claim 3 (depends on 2) An apparatus as claimed in claim 2, including: a monitoring system which includes said second and third magnetic heads and the magnetic shaping layer; said monitoring system being replicated to provide a plurality of monitoring systems on said wafer; and the shaping layer in each of the monitoring systems exposing a different portion of one of the second pole pieces of the monitoring system which corresponds to a selected portion of the second pole piece of the first magnetic head. ### Claim 4 (depends on 2) An apparatus as claimed in claim 2, including: a monitoring system which includes said second and third magnetic heads and the magnetic shaping layer; said monitoring system being replicated to provide a plurality of monitoring systems on said wafer; and a front slope of one of the second pole pieces of a first one of the monitoring systems being exposed by a magnetic shaping layer; a back slope of one of the second pole pieces of a second one of the monitoring systems being exposed by a magnetic shaping layer; and a yoke of one of the second pole pieces of a third one of the monitoring systems being exposed by a magnetic shaping layer. ### Claim 5 (depends on 4) An apparatus as claimed in claim 4, further including: a current source coupled to the first coil layer; and means for receiving from the second coil layer an output indicative of a magnetic property of said selected portion. ### Claim 6 (depends on 5) An apparatus as claimed in claim 5, wherein said magnetic property is permeability. ### Claim 7 An apparatus for determining a magnetic property of magnetic structures on a wafer, comprising: a wafer; a plurality of substantially identical magnetic heads fabricated on the wafer; a first one of the magnetic heads having at least one coil layer embedded in an insulation stack and the insulation stack being sandwiched between first and second pole pieces; a monitoring system for monitoring a magnetic property of a selected portion of the second pole piece of said first magnetic head including: first and second replicated magnetic heads wherein each replicated magnetic head replicates said first magnetic head and wherein the first and second replicated magnetic heads have first and second replicated coil layers respectively and first and second replicated second pole pieces respectively; means for inductively coupling the first and second replicated magnetic heads; a magnetic shaping layer covering each of the first and second replicated second pole pieces except for an exposed portion which corresponds to a selected portion of said second pole piece of said first magnetic head; and the first replicated coil layer having first and second ends for conducting a current through the first replicated coil; and the second replicated coil layer having first and second ends for providing an output representing said magnetic property of said selected portion of the second pole piece of said first magnetic heads. ### Claim 8 (depends on 7) An apparatus as claimed in claim 7, wherein said magnetic property is permeability. ### Claim 9 (depends on 8) An apparatus as claimed in claim 8, wherein the second pole piece and the first and second replicated second pole pieces are deposited by sputtering. ### Claim 10 (depends on 9) An apparatus as claimed in claim 9, including: a plurality of monitoring systems on said wafer; one of the first and second replicated second pole pieces of each of at least some of the monitoring systems having a different exposed portion which corresponds to a respective selected portion of said second pole piece of said first magnetic head. ### Claim 11 (depends on 10) An apparatus as claimed in claim 10, including: each of the second pole piece and the first and second replicated second pole pieces having front and back slopes with a yoke portion therebetween. ### Claim 12 (depends on 11) An apparatus as claimed in claim 11, wherein at least one of said selected portions is the back slope of the second pole piece. ### Claim 13 (depends on 11) An apparatus as claimed in claim 11, wherein at least one of said selected portions is the front slope of the second pole piece. ### Claim 14 (depends on 11) An apparatus as claimed in claim 11, wherein at least one of said selected portions is the yoke of the second pole piece. ### Claim 15 (depends on 11) An apparatus as claimed in claim 11, including: a plurality of selected portions including the front and back slopes and the yoke of the second pole piece; and one of the first and second replicated second pole pieces of each of the monitoring systems having an exposed portion which corresponds to a respective selected portion of said second pole piece. ### Claim 16 (depends on 15) An apparatus as claimed in claim 15, including: one of the monitoring systems having its first and second replicated second pole pieces completely covered by a shaping layer. ### Claim 17 (depends on 15) An apparatus as claimed in claim 15, including: means connected to the first and second ends of the first replicated coil layer for introducing said current into said first replicated coil layer and means connected to the first and second ends of the second replicated coil layer for receiving an output from the second replicated coil layer. ### Claim 18 (depends on 15) An apparatus as claimed in claim 15, including: a magnetic shaping layer on top of only said back slope and said yoke of said second pole piece of said first magnetic head. ### Claim 19 (depends on 15) An apparatus as claimed in claim 15, including: a magnetic shaping layer on top of the front and back slopes and the yoke of said second pole piece of said first magnetic head. ### Claim 20 A combination of a monitored magnetic layer and a monitoring system for monitoring a magnetic property of at least one selected portion of said monitored magnetic layer, comprising: a wafer; a monitored magnetic layer deposited on said wafer by a deposition A; at least one monitoring system on said wafer, including: first and second monitoring coils deposited on the wafer by a deposition B; a monitoring magnetic layer deposited over the first and second monitoring coils respectively by said deposition A, the monitoring magnetic layer substantially replicating said monitored magnetic layer over each of the first and second monitoring coil layers, the monitoring magnetic layer bridging between the first and second monitoring coils to provide inductive coupling therebetween; a magnetic shaping layer deposited on top of the monitoring magnetic layer by a deposition C, the magnetic shaping layer covering the monitoring magnetic layer except for an exposed portion of the monitoring magnetic layer which corresponds to said selected portion of the monitored magnetic layer; and each of the first and second monitoring coils having first and second ends, the first and second ends of the first monitoring coil being connected to first and second pads respectively and the first and second ends of the second monitoring coil being connected to third and fourth pads respectively, whereby, in response to an alternating current conducted through the first monitoring coil via said first and second pads, an output due to said inductive coupling between the first and second monitoring coils is generated at the third and fourth pads for indicating said magnetic property of said selected portion of the monitored magnetic layer. ### Claim 21 (depends on 20) A combination as claimed in claim 20, wherein said magnetic property is permeability. ### Claim 22 (depends on 21) A combination as claimed in claim 21, wherein said deposition A is vacuum deposition. ### Claim 23 (depends on 22) A combination as claimed in claim 22, including: said at least one monitoring system being replicated to provide a plurality of monitoring systems on said wafer; and each monitoring system having a different exposed portion which corresponds to a respective different selected portion of said monitored magnetic layer. ### Claim 24 (depends on 23) A combination as claimed in claim 23, including: the monitored magnetic layer being a second pole piece of an inductive magnetic head which has front and back slopes with a yoke portion therebetween; and each monitoring magnetic layer being first and second replicated second pole pieces which are on top of first and second monitoring coil layers respectively. ### Claim 25 (depends on 24) A combination as claimed in claim 24, including: the second pole piece being a component of a magnetic head which includes a first pole piece deposited by a deposition D, an insulation stack deposited by a plurality of depositions E, and at least one coil layer deposited by deposition B so that the coil layer is embedded in said insulation stack and the insulation stack is sandwiched between the first and second pole pieces; and each of the monitoring systems having first and second replicated first pole pieces deposited by said deposition D, first and second replicated insulation stacks deposited by deposition E so that the first and second monitoring coil layers are embedded in the first and second replicated insulation stacks and the first and second replicated insulation stacks are sandwiched between the first and second replicated pole pieces. ### Claim 26 (depends on 25) A combination as claimed in claim 25, wherein at least one of said selected portions is the back slope of the second pole piece. ### Claim 27 (depends on 25) A combination as claimed in claim 25, wherein at least one of said selected portions is the front slope of the second pole piece. ### Claim 28 (depends on 25) A combination as claimed in claim 25, wherein at least one of said selected portions is the yoke of the second pole piece. ### Claim 29 (depends on 25) A combination as claimed in claim 25, including: a plurality of selected portions including the front and back slopes and the yoke of the second pole piece; and one of the first and second replicated second pole pieces of each of the monitoring systems including a respective exposed portion which corresponds to a respective selected portion of said second pole piece. ### Claim 30 (depends on 29) A combination as claimed in claim 29, including: one of the monitoring systems having its first and second replicated second pole pieces completely covered by a shaping layer deposited by deposition C without any exposed portions. ### Claim 31 (depends on 29) A combination as claimed in claim 29, including: means connected to said first pair of pads for introducing said current into said first and second pads and means connected to said third and fourth pads for receiving an output from said third and fourth pads. ### Claim 32 (depends on 29) A combination as claimed in claim 29, including: a magnetic shaping layer deposited by deposition C on top of at least said back slope and said yoke of said second pole piece. ### Claim 33 (depends on 29) A combination as claimed in claim 29, including: a magnetic shaping layer deposited by deposition C on top of said front and back slopes and the yoke of said second pole piece. ### Claim 34 A method for determining a magnetic property of at least one magnetic head at a wafer level, the method comprising: depositing at least first, second and third substantially identical magnetic heads on a wafer with each magnetic head having a coil layer and a second pole piece; joining the second pole pieces of the second and third magnetic heads so that the coil layers of the second and third magnetic head are magnetically coupled; depositing a magnetic shaping layer on top of the second pole pieces of the second and third magnetic heads except for an exposed portion of the second pole piece of one of the second and third magnetic heads, the exposed portion corresponding to a selected portion of the second pole piece of the first magnetic head; and conducting a current through the coil layer of the second magnetic head and receiving an output from the coil layer of the second magnetic head for indicating said magnetic property of the selected portion of the second pole piece of the first magnetic head. ### Claim 35 (depends on 34) A method as claimed in claim 34, including: the second pole piece of each of the first, second and third magnetic heads having a front slope, a back slope and a yoke therebetween; and exposing one of the front slope, back slope and the yoke of the second pole piece of one of the second and third magnetic heads corresponding to one of the front slope, back slope and the yoke of the second pole piece of the first magnetic head. ### Claim 36 (depends on 35) A method as claimed in claim 35, including: a monitoring system which includes said second and third magnetic heads and the magnetic shaping layer; replicating said monitoring system to provide a plurality of monitoring systems on said wafer; and depositing the shaping layer in each of the monitoring systems to expose a different portion of one of the second pole pieces of the monitoring system which corresponds to a selected portion of the second pole piece of the first magnetic head. ### Claim 37 (depends on 35) A method as claimed in claim 35, including: a monitoring system which includes said second and third magnetic heads and the magnetic shaping layer; replicating said monitoring system to provide a plurality of monitoring systems on said wafer; and omitting a portion of the magnetic shaping layer to expose a front slope of a second pole piece of a first one of the monitoring systems; omitting a portion of the magnetic shaping layer to expose a back slope of a second pole piece of a second one of the monitoring systems; and omitting a portion of the magnetic shaping layer to expose a yoke of a second pole piece of a third one of the monitoring systems. ### Claim 38 (depends on 37) An apparatus as claimed in claim 37, wherein said magnetic property is permeability. ### Claim 39 A method of monitoring a magnetic property of a selected portion of a monitored magnetic layer, the method comprising the steps of: providing a wafer; depositing said monitored magnetic layer on the wafer by a deposition A; fabricating at least one monitoring system on the wafer by: depositing first and second monitoring coils on the wafer by a deposition B, with the first monitoring coil having first and second ends, and the second monitoring coil having first and second ends; depositing a monitoring magnetic layer over the first and second monitoring coils respectively by said deposition A, the monitoring magnetic layer substantially replicating said monitored magnetic layer, the monitoring magnetic layer bridging between the first and second monitoring coils to provide inductive coupling therebetween; depositing a magnetic shaping layer by a deposition C on top of the monitoring magnetic layer that covers the monitoring magnetic layer except for an exposed portion of the monitoring magnetic layer which corresponds to said selected portion of the monitored magnetic layer; and connecting first and second pads to the first and second ends of the first monitoring coil and connecting third and fourth pads to the first and second ends of the second monitoring coil; and conducting a current through the first monitoring coil via the first and second pads, and receiving an output at the third and fourth pads indicative of said magnetic property of said selected portion of the monitored magnetic layer. ### Claim 40 (depends on 39) A method as claimed in claim 39, wherein said magnetic property is permeability. ### Claim 41 (depends on 40) A method as claimed in claim 40, wherein said second deposition is vacuum deposition. ### Claim 42 (depends on 41) A method as claimed in claim 41, comprising the steps of: depositing a plurality of monitoring systems on said wafer; and providing each monitoring system with a different exposed portion which corresponds to a respective selected portion of said monitored magnetic layer. ### Claim 43 (depends on 42) A method as claimed in claim 42, including: the deposition of the monitored magnetic layer by deposition A forming a second pole piece of an inductive magnetic head which has front and back slopes with a yoke portion therebetween and the deposition of the monitoring magnetic layer by deposition A producing first and second replicated second pole pieces covering said first and second monitoring coil layers. ### Claim 44 (depends on 43) A method as claimed in claim 43, including: depositing a first pole piece deposited by a deposition D, depositing an insulation stack deposited by a plurality of depositions E, and depositing at least one coil layer deposited by said deposition B so that the coil layer is embedded in said insulation stack and the insulation stack is sandwiched between the first and second pole pieces to form an inductive magnetic head; and for each of the monitoring systems, depositing first and second replicated first pole pieces deposited by said deposition D, depositing first and second replicated insulation stacks deposited by deposition E so that the first and second monitoring coil layers are embedded in the first and second replicated insulation stacks and the first and second replicated insulation stacks are sandwiched between the first and second replicated pole pieces. ### Claim 45 (depends on 44) A method as claimed in claim 44, wherein at least one of said selected portions is the back slope of the second pole piece. ### Claim 46 (depends on 44) A method as claimed in claim 44, wherein at least one of said selected portions is the front slope of the second pole piece. ### Claim 47 (depends on 44) A method as claimed in claim 44, wherein at least one of said selected portions is the yoke of the second pole piece. ### Claim 48 (depends on 44) A method as claimed in claim 44, including: a plurality of selected portions including the front and back slopes and the yoke of the second pole piece; and one of the first and second replicated second pole pieces of each of at least some of the monitoring systems including an exposed portion which corresponds to a respective selected portion of said second pole piece. ### Claim 49 (depends on 48) A method as claimed in claim 48, including: depositing a magnetic shaping layer by deposition C on top of said second pole piece so as to cover at least said back slope and said yoke. ### Claim 50 (depends on 48) A method as claimed in claim 48, including: depositing the shaping layer by deposition C on the first and second replicated second pole pieces of one of the monitoring systems with no exposed portions.