# US 5,710,486 A · Inductively and multi-capacitively coupled plasma reactor

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- Number: US 5,710,486 A
- Document ID: US5710486A
- Status: Granted
- Kind: A
- Application number: 08/436,513
- Filed: 1995-05-08
- Granted: 1998-01-20
- Earliest claimed: 1995-05-08
- Assignees: Applied Materials, Inc.
- Inventors: Yan Ye; Hiroji Hanawa; Diana Xiaobing Ma; Gerald Zheyao Yin
- Web page: https://patentgrep.com/patent/US5710486A

## CPC

- H01J 37/32091: {the radio frequency energy being capacitively coupled to the plasma}
- H01J 37/32082: {Radio frequency generated discharge (H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence)}
- H01J 37/321: {the radio frequency energy being inductively coupled to the plasma}
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

The invention is embodiment in a plasma reactor for processing a semiconductor wafer, the reactor having a pair of parallel capacitive electrodes at the ceiling and base of the processing chamber, respectively, each of the capacitive electrodes capacitvely coupling RF power into the chamber in accordance with a certain RF phase relationship between the pair of electrodes during processing of the semiconductor wafer for ease of plasma ignition and precise control of plasma ion energy and process reproducibility, and an inductive coil wound around a portion of the chamber and inductively coupling RF power into the chamber for independent control of plasma ion density. Preferably, in order to minimize the number of RF sources while providing independent power control, the invention includes power splitting to separately provide power from a common source or sources to the pair of electrodes and to the coil.

## Claims

### Claim 1

A capacitively and inductively coupled RF plasma reactor for processing a semiconductor wafer inside a vacuum chamber of said reactor, comprising:
a pair of parallel capacitive electrodes facing each other across at least a portion of the chamber;
an inductive coil wound around a portion of the chamber; and
a common RF source;
means for reactively splitting RF power among at least two of: (a) a first one of said capacitive electrodes, (b) a second one of said capacitive electrodes and (c) said inductive coil.

### Claim 2 (depends on 1)

The reactor of claim 1 wherein said means for reactively splitting RF power comprises:
means for connecting said common RF source to said inductive coil; and
a conductive tap on said inductive coil, said conductive tap connected to one of said capacitive electrodes.

### Claim 3 (depends on 2)

The reactor of claim 2 wherein the other of said capacitive electrodes is grounded.

### Claim 4 (depends on 1)

The reactor of claim 1 wherein said means for reactively splitting RF power comprise a transformer comprising:
a primary winding connected to said common RF source; and
a secondary winding having a pair of connections, the pair of electrodes being connected to respective ones of said connections of the secondary winding.

### Claim 5 (depends on 4)

The reactor of claim 4 further comprising a second RF source connected to said inductive coil.

### Claim 6 (depends on 4)

The reactor of claim 4 wherein said respective connections of said secondary winding are two ends of said secondary winding.

### Claim 7 (depends on 1)

The reactor of claim 1 wherein:
said means for reactively splitting RF power comprise a first connection between one winding of said inductive coil and a common RF power source; and
a connection between another winding of said inductive coil and at least one of said capacitive electrodes.

### Claim 8 (depends on 1)

The reactor of claim 1 wherein the chamber comprises a ceiling and one of said capacitive electrodes is a top electrode adjacent said ceiling, said ceiling comprising a precursor material for a processing gas which is sputtered into the plasma under the influence of said top electrode.

### Claim 9 (depends on 8)

The reactor of claim 8 wherein said ceiling comprises a multi-radius dome shape while the inductive coil is one of: (a) conformal with said dome shape and (b) non-conformal with said dome shape.

### Claim 10 (depends on 8)

The reactor of claim 8 wherein the other capacitive electrode comprises a wafer pedestal facing said ceiling.

### Claim 11 (depends on 8)

The reactor of claim 8 wherein said top capacitive electrode is one of: (a) inside the chamber and (b) outside of said chamber.

### Claim 12 (depends on 11)

The reactor of claim 11 wherein said top electrode is an integral part of the ceiling.

### Claim 13 (depends on 11)

The reactor of claim 11 wherein said top electrode comprises a conductive layer lying on a top external surface of said ceiling outside of said chamber.

### Claim 14 (depends on 1)

The reactor of claim 1 wherein said means for reactively splitting RF power comprises a power splitting capacitor comprising:
a common capacitor electrode connected to a common RF power source;
at least first and second parallel capacitor electrodes facing said common capacitor electrode, said first and second parallel capacitor electrodes being connected to respective ones of said two of said (a) a first one of said capacitive electrodes, (b) a second one of said capacitive electrodes and (c) said inductive coil.

### Claim 15 (depends on 14)

The reactor of claim 14 further comprising a phase reversing capacitor connected in series between one of said parallel capacitor electrodes of said power splitting capacitor and one of said capacitive electrodes of said chamber.

### Claim 16

A capacitively and inductively coupled RF plasma reactor for processing a semiconductor wafer inside a vacuum chamber of said reactor, comprising:
a pair of parallel capacitive electrodes facing each other across at least a portion of the chamber;
an inductive coil wound around a portion of the chamber;
a common RF power source; and
a power splitting capacitor configured to reactively split RF power from said common RF power source to at least two of: (a) a first one of said capacitive electrodes, (b) a second one of said capacitive electrodes and (c) said inductive coil.

### Claim 17

A capacitively and inductively coupled RF plasma reactor for processing a semiconductor wafer inside a vacuum chamber of said reactor, comprising:
a pair of parallel capacitive electrodes facinq each other across at least a portion of the chamber;
an inductive coil wound around a portion of the chamber;
a common RF source; and
reactive power splitting device capable of separately providing power from said common RF source to at least said two of (a) a first one of the pair of electrodes, (b) a second one of the pair of electrodes and (c) said inductive coil; wherein
RF power is applied to each of the capacitive electrodes for capacitively coupling RF power into the chamber and to said inductive coil for inductively coupling RF power into the chamber in accordance with a certain RF phase relationship between at least two of (a) the first one of the pair of electrodes, (b) the second one of the pair of electrodes and (c) said inductive coil, during processing of the semiconductor wafer for ease of plasma ignition and precise control of plasma ion energy and process reproducibility.

### Claim 18 (depends on 17)

The reactor of claim 17 wherein reactive power splitting means comprises a transformer comprising:
a primary winding connected to said common RF source; and
a secondary winding having a pair of connections, the pair of electrodes being connected to respective ones of said connections of the secondary winding.

### Claim 19 (depends on 18)

The reactor of claim 18 wherein said respective connections of said secondary winding are two ends of said secondary winding.

### Claim 20 (depends on 18)

The reactor of claim 18 wherein said reactive power splitting means comprise means for connecting a point on said secondary winding to one of said top and bottom electrodes whereby to split RF power from a common source between said two of (a) a first one of the pair of electrodes, (b) a second one of the pair of electrodes and (c) said inductive coil.

### Claim 21

A capacitively and inductively coupled RF plasma reactor for processing a semiconductor wafer inside a vacuum chamber of said reactor, comprising:
a pair of parallel capacitive electrodes facing each other across at least a portion of the chamber;
an inductive coil wound around a portion of the chamber;
a common RF power source; and
a transformer configured to reactively split RF power from said common RF power source to at least two of: (a) a first one of said capacitive electrodes, (b) a second one of said capacitive electrodes and (c) said inductive coil.

### Claim 22 (depends on 17)

The reactor of claim 17 wherein at least a portion of the chamber ceiling comprises a precursor material for a processing gas which is sputtered into the plasma under the influence of said top electrode.

### Claim 23 (depends on 22)

The reactor of claim 22 wherein said ceiling comprises a multi-radius dome shape while the inductive coil is one of: (a) conformal with said dome shape and (b) non-conformal with said dome shape.

### Claim 24 (depends on 22)

The reactor of claim 22 wherein said bottom capacitive electrode comprises a wafer pedestal.

### Claim 25 (depends on 22)

The reactor of claim 22 wherein said top capacitive electrode is one of: (a) inside the chamber and (b) outside of said chamber.

### Claim 26 (depends on 25)

The reactor of claim 25 wherein said top electrode is inside the chamber and is an integral part of the ceiling.

### Claim 27 (depends on 17)

The reactor of claim 17 wherein said reactive power splitting device comprises a power splitting capacitor comprising:
a common capacitor electrode connected to a common RF power source;
at least first and second parallel capacitor electrodes facing said common capacitor electrode, said first and second parallel capacitor electrodes being connected to respective ones of said two of said (a) a first one of said capacitive electrodes, (b) a second one of said capacitive electrodes and (c) said inductive coil.

### Claim 28 (depends on 27)

The reactor of claim 27 further comprising a phase reversing capacitor connected in series between one of said parallel capacitor electrodes of said power splitting capacitor and one of said capacitive electrodes of said chamber.

### Claim 29

A method of capacitively and inductively coupling RF power into a vacuum chamber of a plasma reactor used for processing a semiconductor wafer so as to ignite and control a plasma within the vacuum chamber, said method comprising the steps of:
configuring the plasma reactor to comprise a pair of parallel capacitive electrodes facing each other across at least a portion of the chamber;
configuring the plasma reactor to comprise an inductive coil wound around a portion of the chamber;
applying RF Dower to each of the capacitive electrodes to capacitively couple RF power into the chamber and to said inductive coil to inductively couple RF power into the chamber during processing of the semiconductor wafer, said step of applying RF power to each of the capacitive electrodes facilitating plasma ignition and precise control of plasma ion energy and said step of applying RF power to said inductor coil facilitating precise control of plasma ion density; and
configuring the plasma reactor to comprise a chamber ceiling having at least a portion comprising a precursor material for a processing gas which is sputtered into the plasma under the influence of a first one of said electrodes.

### Claim 30

A capacitively and inductively coupled RF plasma reactor for processing a semiconductor wafer inside a vacuum chamber of said reactor, comprising:
a pair of parallel capacitive electrodes facing each other across at least a portion of the chamber;
an inductive coil wound around a portion of the chamber;
a common RF source; and
reactive power splitting device capable of separately providing power from said common RF source to at least said two of (a) a first one of the pair of electrodes, (b) a second one of the pair of electrodes and (c) said inductive coil; wherein
RF power is applied to each of the capacitive electrodes for capacitively coupling RF power into the chamber and to said inductive coil for inductively coupling RF power into the chamber during processing of the semiconductor wafer for ease of plasma ignition and precise control of plasma ion energy and density.

### Claim 31

A capacitively and inductively coupled RF plasma reactor for processing a semiconductor wafer inside a vacuum chamber of said reactor, comprising:
a pair of parallel capacitive electrodes facing each other across at least A portion of the chamber;
an inductive coil wound around a portion of the chamber; and
a power applying device capable of applying RF power to each of the capacitive electrodes for capacitively coupling RF power into the chamber and to said inductive coil for inductively coupling RF power into the chamber during processing of the semiconductor wafer for ease of plasma ignition and precise control of plasma ion energy and density; wherein
at least a portion of a ceiling of said chamber comprises a precursor material for a processing gas which is sputtered into the plasma under the influence of a first one of said electrodes.