Manufacture of a buried wave guide at several burying depths
AssigneeSchneider Electric SA
InventorsAntoine Kevorkian, Dominique Persegol
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Abstract
Method of locally embedding a waveguide in a substrate. A mask is arranged on the upper face of the substrate. An edge of the mask obliquely intersects, at a low predetermined angle A, the waveguide to define a partially masked transition portion between non-masked portion and a fully masked portion of the waveguide. After a stage in which the waveguide is embedded in the substrate, the mask is withdrawn. The portion of the waveguide is thereby embedded at a depth greater than portion, portion forming a gradual adiabatic transition between both portions. The method is useful in the manufacture of sensors.
Claims16
A manufacturing process for an integrated optic device, comprising the steps of:
- providing a glass substrate with at least one optic waveguide at a first depth with respect to a face of the substrate;
- positioning a mask with at least one edge having a predetermined oblique angle with respect to an axial direction of said waveguide on said waveguide such that a first axial portion of said waveguide is fully covered, a second axial portion of said waveguide is fully uncovered and a third axial portion of said waveguide is partially covered;
- subjecting the substrate to a waveguide burying process to (i) bury said second portion of said waveguide at a second depth deeper than said first depth and (ii) obtain a depth transition portion connecting said first and second axial portions of said waveguide;
- and
- removing said mask.
The process of 1, further comprising forming said at least one waveguide in said substrate prior to said mask positioning step.
The process of 3, wherein said mask comprises one of aluminum and a dielectric material.
The process of 11, further comprising forming said at least one waveguide in said substrate prior to said mask positioning step.
Dependencies are inferred from the claim text.