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US 5,708,252 AGranted
Excimer laser scanning system
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsHisato Shinohara, Akira Sugawara
Life of this patent
Estimating the term…
Abstract
A method for treating an object with a laser including emitting a laser beam from a laser; expanding the laser beam in a first direction; removing a portion of the laser beam though a mask, the portion including at least edges of the expanded laser beam extending in the first direction; and condensing the laser beam in a second direction orthogonal to the first direction in order to form a line-shaped laser beam on an object.
Claims12
A laser processing system comprising:
- an excimer laser for emitting a laser beam;
- a laser beam expander for expanding said laser beam in a first direction;
- a convex lens for condensing the expanded laser beam in a second direction orthogonal to said first direction;
- means for exposing a substrate to the condensed laser beam passing through said convex lens wherein said condensed laser beam has a cross-section elongated in said first direction on said substrate;
- and
- means for moving said substrate in said second direction so that said substrate can be scanned with said condensed laser beam.
3 more elements
A laser processing system comprising:
- an excimer laser for emitting a laser beam;
- a laser beam expander for expanding said laser beam in a first direction;
- a mask for cutting peripheral edges of the expanded laser beam passing through said laser beam expander, said peripheral edges extending in said first direction;
- a convex lens for condensing the expanded laser beam in a second direction orthogonal to said first direction;
- means for exposing a substrate to the condensed laser beam passing through said convex lens wherein said condensed laser beam has a cross-section elongated in said first direction on said substrate;
- and
- means for moving said substrate, in said second direction so that said substrate can be scanned with said condensed laser beam.
4 more elements
A laser processing system comprising:
- an excimer laser for emitting a laser beam, said laser beam having a cross section orthogonal to the propagation direction thereof;
- a beam expander for expanding said laser beam so that the cross section of said laser beam is elongated only in a first direction;
- beam condensing means for condensing said laser beam so that the cross section of said laser beam is reduced only in a second direction orthogonal to said first direction;
- means for exposing a substrate to said laser beam having passed through said beam expander and said beam condensing means, said laser beam having a linear shaped cross-section extending in one direction at a surface of said substrate;
- and
- means for moving said substrate in a direction orthogonal to said one direction in which said linear shaped cross-section extends.
3 more elements
The laser processing system comprising:
- an excimer laser for emitting a laser beam;
- means for modifying said laser beam to obtain a laser beam elongated in one direction;
- means for directing said laser beam to a substrate, said laser beam having a line-shaped transverse cross-section at the substrate;
- and
- means for moving said substrate in a direction orthogonal to the elongation direction of said laser beam in a step wise manner so that said substrate is scanned with said laser beam.
2 more elements
A laser system comprising:
- an excimer laser for emitting a laser beam having a rectangular cross section;
- condensing means for condensing the cross section of said laser beam only in a widthwise direction of said cross section;
- means for directing the condensed laser beam on a surface of said substrate;
- and
- means for moving said substrate in a direction orthogonal to a lengthy direction of said cross section so that an entire surface of said substrate is scanned with the condensed laser beam.
2 more elements
Dependencies are inferred from the claim text.