# US 5,708,222 A · Inspection apparatus, transportation apparatus, and temperature control apparatus

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- Number: US 5,708,222 A
- Document ID: US5708222A
- Status: Granted
- Kind: A
- Application number: 08/509,284
- Filed: 1995-07-31
- Granted: 1998-01-13
- Earliest claimed: 1994-08-01
- Assignees: Tokyo Electron Limited; Tokyo Electron Yamanashi Limited
- Inventors: Toshihiro Yonezawa; Tsuyoshi Argua; Kunihiro Furuya; Junichi Hagihara
- Web page: https://patentgrep.com/patent/US5708222A

## CPC

- G01R 31/2887: {involving moving the probe head or the IC under test; docking stations (moving single probes G01R1/06705; moving individual probes in multiple probes G01R1/07392)}
- Y10S 414/141: includes means for gripping wafer
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)
- Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

## Abstract

There is provided an inspection apparatus comprises, a transportation unit for transporting the object of inspection to a position opposite to the contact portion, a sucking holder movable toward and away from the contact portion and adapted to hold the object of inspection by suction; and a pressure contact mechanism provided separately from the transportation unit and adapted to press the sucking holder, thereby pressing the object of inspection against the contact portion. Thus the tranportation mechanism is separated from the pressure contact mechanism, the transportation mechanism can be reduced in weight, and the pressure contact mechanism can ensure setting of appropriate pressing. The operation time can be shortened, moreover, since the object of inspection is kept attached to the contact portion by the transportation mechanism as it is pressed against the contact portion. There is provided a transportation apparatus in which objects of transportation or inspection can be stably attracted or released without the possibility of their being broken by static electricity and without being influenced by their attitude. There is provided a temperature control apparatus used in an inspection apparatus and capable of efficiently heating or cooling an object of inspection, further, wherein a carrier plate section can be used in common for objects of inspection of different descriptions.

## Claims

### Claim 1

An inspection apparatus for inspecting an object of inspection, having a terminal portion, for electrical properties in a manner such that the object is pressed against a contact portion to bring the terminal portion and the contact portion into contact with each other, comprising:
a transportation unit for transporting the object of inspection to a position opposite to the contact portion;
a sucking holder movable toward and away from the contact portion and adapted to hold the object of inspection by suction;
lifting means for lifting and lowering said sucking holder, thereby contacting the object of inspection against the contact portion; and
a pressure contact mechanism provided separately from the transportation unit and adapted to press the sucking holder, thereby pressing the object of inspection against the contact portion.

### Claim 2 (depends on 1)

The inspection apparatus according to claim 1, wherein said pressure contact mechanism includes a screw receiving portion, and a screw shaft engaged with the screw receiving portion so as to move longitudinally so that the screw shaft presses the said sucking holder.

### Claim 3 (depends on 2)

The inspection apparatus according to claim 2, further comprising a driving source for moving the screw shaft, the driving source including a pulse motor or a servomotor.

### Claim 4

An inspection apparatus for inspecting an object of inspection, having a terminal portion, for electrical properties in a manner such that the object is pressed against a contact portion to bring the terminal portion and the contact portion into contact with each other, comprising:
a transportation unit for transporting the object of inspection to a position opposite to the contact portion;
a sucking holder movable toward and away from the contact portion and adapted to hold the object of inspection by suction;
lifting means for lifting and lowering said sucking holder, thereby contacting the object of inspection against the contact portion;
a pressure contact mechanism provided separately from the transportation unit with
a screw receiving portion,
a screw shaft engaged with said screw receiving portion, and
a driving source for moving said screw shaft wherein said driving source is a pulse motor or a servomotor, and wherein said screw shaft is adapted to press the sucking holder, thereby pressing the object of inspection against the contact portion.