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US 5,707,908 AGranted
Silica glass
AssigneeNikon Corporation
InventorsNorio Komine, Hiroyuki Hiraiwa
Life of this patent
Estimating the term…
Abstract
A silica glass has a structure determination temperature of 1200 K or lower and a hydrogen molecule concentration of 1.times.10.sup.17 molecules/cm.sup.3 or more. The silica glass is used together with light in a wavelength region of 400 nm or shorter.
Claims6
A silica glass for use with light in a wavelength region of 400 nm or shorter, having a structure determination temperature of 1200K or lower and a hydrogen molecule concentration of 1.times.10.sup.17 molecules/cm.sup.3 or more.
Dependencies are inferred from the claim text.