# US 5,707,687 A · Rotary-cup coating apparatus and method of coating object with such rotary-cup coating apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 5,707,687 A - Document ID: US5707687A - Status: Granted - Kind: A - Application number: 08/637,357 - Filed: 1996-04-24 - Granted: 1998-01-13 - Earliest claimed: 1995-04-24 - Assignees: Tokyo Ohka Kogyo Co., Ltd. - Inventors: Koji Ueda; Hiroki Endo; Hidenori Miyamoto - Web page: https://patentgrep.com/patent/US5707687A ## CPC - H10P 72/0448: {Apparatus for applying a liquid, a resin, an ink or the like} - B05C 11/08: Spreading liquid or other fluent material by manipulating the work, e.g. tilting - G03F 7/162: {Coating on a rotating support, e.g. using a whirler or a spinner} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - B05C: APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL (spraying apparatus, atomising apparatus, nozzles B05B; plant for applying liquids or other fluent materials to objects by electrostatic spraying B05B5/08) - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract A suction chuck and an inner cup are rotated in unison with each other to spread a coating solution uniformly over a planar object in the inner cup under centrifugal forces. Vent holes defined in an outer cup lid which closes an outer cup are held out of communication with vent holes defined in a ring-shaped closure member, so that the interior space in the outer cup is kept out of communication with the exterior space around the outer cup. The concentration of a solvent in the outer cup remains so high that no mist is produced in the outer cup. After the planar object has been coated and before the outer cup lid is opened, the ring-shaped closure member is turned to align the vent holes in the outer cup lid with the vent holes in the ring-shaped closure member, breaking any vacuum in the outer cup with ambient air introduced through the vent holes into the outer cup. Thereafter, the outer and inner cup lids are opened, and the coated planar object is taken out. ## Claims ### Claim 1 A rotary-cup coating apparatus for coating an object, comprising: an outer cup; an inner cup rotatably disposed in said outer cup, for placing an object to be coated therein; an outer cup lid for closing said outer cup, said outer cup lid having at least one vent hole defined therein and providing communication between an interior space in said outer cup surrounding said inner cup and an exterior space around said outer cup; an inner cup lid for closing said inner cup; and a closure member movably mounted on said outer cup lid for selectively opening and closing said vent hole. ### Claim 2 (depends on 1) A rotary-cup apparatus according to claim 1, wherein said outer cup lid has a circular array of first vent holes defined therein at equal intervals, said array is arranged coaxially with said outer cup lid, and said closure member comprises a ring-shaped closure member having a circular array of second vent holes defined therein at equal intervals for selectively communicating with said first vent holes, respectively, thereby to open said first vent holes. ### Claim 3 (depends on 1) A rotary-cup coating apparatus according to claim 1, wherein said inner cup lid remains fully closed over said inner cup while said closure member opens said vent hole. ### Claim 4 (depends on 1) A rotary-cup coating apparatus according to claim 1, wherein said closure member is rotatable relative to said outer lid. ### Claim 5 A rotary-cup coating apparatus for coating an object, comprising: an outer cup; an inner cup rotatably disposed in said outer cup, for placing an object to be coated therein; a lid means for being placed over respective upper openings in said outer cup and said inner cup, for thereby closing said outer cup and said inner cup during a coating operation; and vent means operatively associated with said lid means for selectively providing communication between an interior space in said outer cup surrounding said inner cup and an exterior space around said outer cup while said lid means closes the upper openings of said outer cup and said inner cup. ### Claim 6 (depends on 5) A rotary-cup coating apparatus according to claim 5, wherein said lid means includes an outer cup lid for closing said outer cup and an inner cup lid for dosing said inner cup; and said vent means comprises at least one vent hole defined in said outer cup lid and a closure member movably mounted on said outer cup lid for selectively opening and closing said vent hole. ### Claim 7 (depends on 6) A rotary-cup coating apparatus according to claim 6, wherein said closure member is rotatable relative to said outer cup lid. ### Claim 8 (depends on 5) A rotary-cup coating apparatus according to claim 5, wherein said lid means comprises an outer cup lid for closing said outer cup and inner cup lid for closing said inner cup; and said vent means comprises a plurality of first vent holes defined in said outer cup lid, and closure means for simultaneously opening said vent holes and simultaneously closing said vent holes. ### Claim 9 (depends on 8) A rotary-cup coating apparatus according to claim 8, wherein said closure means comprises a closure member having a plurality of second vent holes defined therein, said closure member being moveable relative to said outer cup lid so as to selectively move said second vent holes into alignment with said first vent holes. ### Claim 10 (depends on 5) A rotary-cup coating apparatus according to claim 5, wherein said lid means remains fully closed over said inner cup while said vent means provides communication between the interior space in said outer cup surrounding said inner cup and the exterior space around said outer cup. ### Claim 11 (depends on 5) A rotary-cup coating apparatus according to claim 5, wherein said vent means is rotatable relative to said lid means. ### Claim 12 A method of coating an object with a rotary-cup coating apparatus having an outer cup, an inner cup rotatably disposed in said outer cup, for placing the object to be coated therein, an outer cup lid for closing said outer cup, said outer cup lid having at least one vent hole defined therein for providing communication between an interior space in said outer cup surrounding said inner cup and an exterior space around said outer cup, an inner cup lid for closing said inner cup, and a closure member movably mounted on said outer cup lid for selectively opening and closing said vent hole, said method comprising the steps of: closing the outer and inner cups respectively with the outer and inner cup lids and closing said vent hole with said closure member; rotating said inner cup to coat an object placed therein; and after the object is coated and before the outer cup lid is opened, opening said vent hole with said closure member thereby to provide communication between the interior space in said outer cup and the exterior space around said outer cup. ### Claim 13 (depends on 12) A method of coating an object according to claim 12, wherein said outer cup lid has a circular array of first vent holes defined therein at equal intervals, said array is disposed coaxially with said outer cup lid, for providing said communication between the interior space in said outer cup and the exterior space around said outer cup, said closure member is a ring-shaped member movably mounted to said outer cup lid for selectively opening and closing said first vent holes, said ring-shaped closure member having a circular array of second vent holes defined therein at equal intervals for selective communication with said first vent holes, respectively, to open said first vent holes, said closing step involves closing said first vent holes with said closure member, and said vent hole opening step involves moving said closure member to bring said second vent holes into communication with said first vent holes thereby to open said first vent holes thereby to provide communication between the interior space in said outer cup and the exterior space around the inner cup. ### Claim 14 (depends on 12) A method according to claim 12, including the further step of: opening the outer cup lid after the interior space in said outer cup has been vented in said vent hole opening step. ### Claim 15 (depends on 12) A method of coating an object according to claim 12, further including the steps of placing an object in the inner cup, and applying a quantity of coating solution onto a surface of the object prior to said closing step. ### Claim 16 (depends on 12) A method of coating an object according to claim 12, wherein said inner cup lid remains fully closed over said inner cup while said closure member opens said vent hole. ### Claim 17 (depends on 12) A method of coating an object according to claim 12, wherein said vent hole opening step involves rotating said closure member relative to said outer cup lid.