# US 5,707,538 A · Variable gap magnetoresistive transducer and method of making the same

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- Number: US 5,707,538 A
- Document ID: US5707538A
- Status: Granted
- Kind: A
- Application number: 08/508,477
- Filed: 1995-07-28
- Granted: 1998-01-13
- Earliest claimed: 1995-07-28
- Assignees: Read-Rite Corporation
- Inventors: Yong Shen; T. C. Chuang
- Web page: https://patentgrep.com/patent/US5707538A

## CPC

- G11B 5/3903: {using magnetic thin film layers or their effects, the films being part of integrated structures}
- G11B 5/3116: {Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks (G11B5/3113, G11B5/245 take precedence)}
- G11B 5/3163: {Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers}
- G11B: INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER (recording measured values in a way that does not require playback through a transducer G01D9/00; recording or playback apparatus using mechanically marked tape, e.g. punched paper tape, or using unit records, e.g. punched or magnetically marked cards G06K; transferring data from one type of record carrier to another G06K1/18; circuits for coupling output of reproducer to radio receiver H04B1/20; gramophone pick-ups or like acoustic electromechanical transducers or circuits therefor H04R)

## Abstract

A magnetoresitive transducer has an insulating gap layer of variable thickness. The transducer includes a magnetoresistive layer disposed in an active region, and a first magnetic shield layer disposed in the active region and a field region. An insulating layer is spaced between the magnetoresistive layer and the magnetic shield layer. The insulating layer is thinner in the active region than in the field region. The probability of other layers bridging through the insulating layer in the field region is substantially reduced. The method of forming the transducer includes depositing a first insulating layer above the magnetic layer, and then selectively etching the first insulating layer by forming an opening in the active region having a cross-sectional profile sloping inwardly toward the magnetic shield layer. Thereafter, an insulating layer is deposited atop the first insulating layer having the opening. The combined insulating layers constitute the gap layer of variable thickness in the magnetoresistive transducer.

## Claims

### Claim 1

A method of forming a magnetic transducer having an insulating gap layer spaced between a magnetic shield layer and a magnetoresistive layer, said method comprising the steps of:
forming a first insulating layer above the magnetic shield layer;
forming an opening in said first insulating layer by etching away a predetermined portion of said first insulating layer; and
forming a second insulating layer over said opening and completely above said first insulating layer, wherein said first and second insulating layers constitute the insulating gap layer spaced between the magnetic shield layer and the magnetoresistive layer;
wherein said step of forming an opening comprises selectively etching more material in said first insulating layer farther from the magnetic shield layer than adjacent to the magnetic shield layer such that said opening includes a cross-sectional profile sloping inwardly toward said magnetic shield layer.

### Claim 2 (depends on 1)

The method of forming a magnetoresistive transducer as set forth in claim 1 wherein said step of forming a first insulating layer comprises forming a primary insulating sublayer of aluminum oxide enriched with oxygen above the magnetic shield layer; and
forming a secondary insulating sublayer of oxygen depleted aluminum oxide above said primary insulating sublayer, said secondary insulating sublayer having a composite content different from said primary insulating sublayer, wherein said primary and secondary sublayers constitute said first insulating layer.

### Claim 3 (depends on 2)

The method of forming a magnetoresistive layer as set forth in claim 2 wherein said step of forming an opening comprises
forming a masking layer above said secondary insulating sublayer;
forming an opening through said masking layer;
etching said primary and secondary insulating sublayers using an etchant which etches said secondary insulating sublayer comparatively faster than said primary insulating sublayer; and
removing said masking layer.

### Claim 4 (depends on 1)

The method of forming a magnetoresistive transducer as set forth in claim 1 wherein said step of forming an opening comprises
forming a masking layer above said first insulating layer;
etching said masking layer and said first insulating layer using an etchant which etches said masking layer comparatively faster than said first insulating layer; and
removing said masking layer.

### Claim 5

A method of forming a magnetic transducer having an insulating gap layer spaced between a magnetic shield layer and a magnetoresistive layer, comprising the steps of:
forming a first insulating layer above the magnetic shield layer;
forming an opening having a cross-sectional profile sloping inwardly toward said magnetic shield layer in said first insulating layer by selectively etching more material farther from the magnetic shield layer than adjacent to the magnetic shield layer; and
forming a second insulating layer over said opening and above said first insulating layer, wherein said first and second insulating layers constitute the insulating gap layer spaced between the magnetic shield layer and the magnetoresistive layer.

### Claim 6 (depends on 5)

The method of forming a magnetoresistive transducer as set forth in claim 5 wherein said step of forming a first insulating layer comprises
forming a plurality of insulating sublayers above the magnetic shield layer, wherein said plurality of sublayers constitute said first insulating layer, each of said insulating sublayers having a composite content different from each other.

### Claim 7 (depends on 6)

The method of forming a magnetoresistive transducer as set forth in claim 6 wherein said step of forming an opening comprises
forming a masking layer above said plurality of insulating sublayers;
forming an opening through said masking layer; and
etching said plurality of insulating sublayers using an enchant which substantially etches more material of said sublayers farther from the magnetic shield layer than adjacent to the magnetic shield layer.

### Claim 8 (depends on 5)

The method of forming a magnetoresistive transducer as set forth in claim 5 wherein said step of forming an opening comprises
forming a masking layer above said first insulating layer;
etching said masking layer and said first insulating layer using an etchant which etches said masking layer comparatively faster than said first insulating layer; and
removing said masking layer.

### Claim 9

A method of forming a magnetic transducer having a first magnetic shield layer and a magnetoresistive layer comprising the steps of:
forming a primary insulating layer above the first magnetic shield layer;
forming a secondary insulating layer completely above said primary insulating layer;
forming a photoresist layer over said secondary insulating layer;
forming an opening through said photoresist layer;
etching said primary and secondary insulating layers using an etchant which etches said secondary insulating layer faster than said primary insulating layer;
removing said photoresist layer;
forming a third insulating layer above said opening and said secondary insulating layer; and
forming a second shield layer over said third insulating layer, wherein said primary, secondary and third insulating layers constitute insulating gap layers disposed between the magnetoresistive layer and the magnetic shield layers.

### Claim 10

A method of forming a magnetic transducer having a magnetic shield layer and a magnetoresistive layer comprising the steps of:
forming a first insulating layer of rich oxygen aluminum oxide above the magnetic shield layer;
forming a photoresist layer over said first insulating layer;
forming an opening through said photoresist layer;
etching said photoresist layer and said first insulating layer simultaneously using an etchant which etches said photoresist layer comparatively faster than said first insulating layer;
removing said photoresist layer; and
forming a second insulating layer over said opening and above said first insulating layer, wherein said first and second insulating layers constitute an insulating gap layer disposed between the magnetoresistive layer and the magnetic shield layer.