# US 5,705,825 A · Resonant tunneling bipolar transistor > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 5,705,825 A - Document ID: US5705825A - Status: Granted - Kind: A - Application number: 08/520,777 - Filed: 1995-08-30 - Granted: 1998-01-06 - Earliest claimed: 1994-08-30 - Assignees: NEC Corporation - Inventors: Yuji Ando - Web page: https://patentgrep.com/patent/US5705825A ## CPC - H10D 10/881: {Resonant tunnelling transistors} - B82Y 10/00: Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic - H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES - B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES ## Abstract Excellent negative resistance characteristics are attained in a resonant bipolar transistor (RBT) while improving current gain. A first conduction type collector layers and the opposite conduction type base layer are sequentially formed on a semiconductor substrate. A quantum well structure in which a quantum level of electrons or holes is generated, and a contact layer of the same conduction type as the base layer are sequentially formed on a part of the base layer. An emitter layer of the same conduction type as the collector layer is formed directly on another part of the base. Since good negative resistance characteristics can be attained by utilizing the resonant tunneling effect of base majority carriers, and the quantum well structure causing carrier accumulation can be eliminated from the path of carriers flowing between the emitter and the collector, it is possible to reduce the recombination current at the emitter-base interface and in the quantum well structure, thereby improving current gain. ## Claims ### Claim 1 A resonant tunneling bipolar transistor comprising: a semiconductor substrate; an n-type collector layer formed on said semiconductor substrate and a p-type base layer formed on said n-type collector layer; a laminated quantum well structure formed on a first part of said p-type base layer and a p-type contact layer formed on said laminated quantum well structure, wherein a quantum level of holes is generated in said quantum well structure; an n-type emitter layer formed directly on a second part of said p-type base layer; and a collector electrode, a base electrode and an emitter electrode forming ohmic contact with said n-type collector layer, said p-type contact layer, and said n-type emitter layer, respectively. ### Claim 2 A resonant tunneling bipolar transistor comprising: a semiconductor substrate; a p-type collector layer formed on said semiconductor substrate and an n-type base layer formed on said p-type collector layer; a laminated quantum well structure formed on a first part of said n-type base layer and an n-type contact layer formed on said laminated quantum well structure, wherein a quantum level of electrons is generated in said quantum well structure; a p-type emitter layer formed directly on a second part of said n-type base layer; and a collector electrode, a base electrode and an emitter electrode forming ohmic contact with said p-type collector layer, said n-type contact layer, and said p-type emitter layer, respectively. ### Claim 3 A resonant tunneling bipolar transistor comprising: a semiconductor substrate; an n-type emitter layer formed on said semiconductor substrate and a p-type base layer formed on said n-type emitter layer; a laminated quantum well structure formed on a first part of said p-type base layer and a p-type contact layer formed on said laminated quantum well structure, wherein a quantum level of holes is generated in said quantum well structure; an n-type collector layer formed directly on a second part of said p-type base layer; and a collector electrode, a base electrode and an emitter electrode forming ohmic contact with said n-type collector layer, said p-type contact layer, and said n-type emitter layer, respectively. ### Claim 4 A resonant tunneling bipolar transistor comprising: a semiconductor substrate; a p-type emitter layer formed on said semiconductor substrate and an n-type base layer formed on said p-type emitter layer; a laminated quantum well structure formed on a first part of said n-type base layer and an n-type contact layer formed on said laminated quantum well structure, wherein a quantum level of electrons is generated in said quantum well structure; a p-type collector layer formed directly on a second part of said n-type base layer; and a collector electrode, a base electrode and an emitter electrode forming ohmic contact with said p-type collector layer, said n-type contact layer, and said p-type emitter layer, respectively. ### Claim 5 (depends on 1) The resonant tunneling bipolar transistor as claimed in claim 1, wherein said quantum well structure comprises at least one undoped quantum barrier layer, at least one undoped quantum well layer and at least one undoped quantum barrier layer. ### Claim 6 (depends on 2) The resonant tunneling bipolar transistor as claimed in claim 2, wherein said quantum well structure comprises at least one undoped quantum barrier layer, at least one undoped quantum well layer and at least one undoped quantum barrier layer. ### Claim 7 (depends on 3) The resonant tunneling bipolar transistor as claimed in claim 3, wherein said quantum well structure comprises at least one undoped quantum barrier layer, at least one undoped quantum well layer and at least one undoped quantum barrier layer. ### Claim 8 (depends on 4) The resonant tunneling bipolar transistor as claimed in claim 4, wherein said quantum well structure comprises at least one undoped quantum barrier layer, at least one undoped quantum well layer and at least one undoped quantum barrier layer. ### Claim 9 (depends on 1) The resonant tunneling bipolar transistor as claimed in claim 1, wherein said n-type collector layer comprises a first n-type collector layer and a second n-type collector layer formed on said first n-type collector layer, said first n-type collector layer having an impurity concentration higher than said second n-type collector layer so as to form ohmic contact with said collector electrode, and said n-type emitter layer comprising a first n-type emitter layer and a second n-type emitter layer formed on said first n-type emitter layer, said second n-type emitter layer having an impurity concentration higher than said first n-type emitter layer so as to form ohmic contact with said emitter electrode. ### Claim 10 (depends on 2) The resonant tunneling bipolar transistor as claimed in claim 2, wherein said p-type collector layer comprises a first p-type collector layer and a second p-type collector layer formed on said first p-type collector layer, said first p-type collector layer having an impurity concentration higher than said second p-type collector layer so as to form ohmic contact with said collector electrode, and said p-type emitter layer comprising a first p-type emitter layer and a second p-type emitter layer formed on said first p-type emitter layer, said second p-type emitter layer having an impurity concentration higher than said first p-type emitter layer so as to form ohmic contact with said emitter electrode. ### Claim 11 (depends on 3) The resonant tunneling bipolar transistor as claimed in claim 3, wherein said n-type emitter layer comprises a first n-type emitter layer and a second n-type emitter layer formed on said first n-type emitter layer, said first n-type emitter layer having an impurity concentration higher than said second n-type emitter layer so as to form ohmic contact with said emitter electrode, and said n-type collector layer comprising a first n-type collector layer and a second n-type collector layer formed on said first n-type collector layer, said second n-type collector layer having an impurity concentration higher than said first n-type collector layer so as to form ohmic contact with said collector electrode. ### Claim 12 (depends on 4) The resonant tunneling bipolar transistor as claimed in claim 4, wherein said p-type emitter layer comprises a first p-type emitter layer and a second p-type emitter layer formed on said first p-type emitter layer, said first p-type emitter layer having an impurity concentration higher than said second p-type emitter layer so as to form ohmic contact with said emitter electrode, and said p-type collector layer comprising a first p-type collector layer and a second p-type collector layer formed on said first p-type collector layer, said second p-type collector layer having an impurity concentration higher than said first p-type collector layer so as to form ohmic contact with said collector electrode. ### Claim 13 (depends on 1) The transistor of claim 1, wherein an electrical current between said emitter layer and said collector layer does not flow through said laminated quantum well structure. ### Claim 14 (depends on 2) The transistor of claim 2, wherein an electrical current between said emitter layer and said collector layer does not flow through said laminated quantum well structure. ### Claim 15 A resonant tunneling bipolar transistor comprising: a base layer on a collector layer on a semiconductor substrate; an emitter layer on said base layer; and a quantum well structure on said base layer for generating a quantum level of carriers, said quantum well structure being separated from said emitter layer so that an electrical current between said emitter layer and said collector layer does not flow through said quantum well structure. ### Claim 16 A resonant tunneling bipolar transistor comprising: a base layer on an emitter layer on a semiconductor substrate; a collector layer on said base layer; and a quantum well structure on said base layer for generating a quantum level of carriers, said quantum well structure being separated from said collector layer so that an electrical current between said emitter layer and said collector layer does not flow through said quantum well structure .