# US 5,705,822 A · Cooling system for semiconductor process

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- Number: US 5,705,822 A
- Document ID: US5705822A
- Status: Granted
- Kind: A
- Application number: 08/791,506
- Filed: 1997-01-30
- Granted: 1998-01-06
- Earliest claimed: 1997-01-30
- Assignees: Vanguard International Semiconductor Corporation
- Inventors: Kr-Zu Su
- Web page: https://patentgrep.com/patent/US5705822A

## CPC

- F26B 3/347: Electromagnetic heating, e.g. induction heating or heating using microwave energy
- F26B 3/28: by radiation, e.g. from the sun
- F26B: DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM (drying devices for combines A01D41/133; racks for drying fruit or vegetables A01F25/12; drying foodstuffs A23; drying hair A45D20/00; body-drying implements A47K10/00; drying household articles A47L; drying gases or vapours B01D; chemical or physical processes for dewatering or like separating liquids from solids B01D43/00; centrifugal apparatus B04; drying ceramics C04B33/30; drying yarns or fabrics in association with some other form of treatment D06C; drying frames for laundry without heating or positive air circulation, domestic laundry-or spin-driers, wringing or hot pressing laundry D06F; furnaces, kilns, ovens F27)

## Abstract

A cooling system for use in a UV curing apparatus is disclosed. The cooling system includes a UV curing apparatus and a water supply element connected to the UV curing apparatus for cooling the curing apparatus via a first solenoid valve. A CPU is responsive to the UV curing apparatus for controlling the status of the first solenoid valve. An inverter is connected to the CPU and its output is coupled to a second solenoid valve. The second solenoid valve connects an air purging element to the curing apparatus. The air purging element provides clean dry air to force the water out of the curing apparatus.

## Claims

### Claim 1

A cooling system for a curing apparatus used in a semiconductor process, said curing apparatus including a magnetron and a reflector for generating radiation, said cooling system comprising:
a water supply element connected to said curing apparatus for supplying cooling water to said curing apparatus;
a first solenoid valve located between said water supply element and said curing apparatus, said first solenoid valve allowing said cooling water to flow when set to an on position;
an air purging element connected to said curing apparatus for providing a gas to force said cooling water out of said curing apparatus;
a second solenoid valve located between said air purging element and said curing apparatus, said second solenoid valve allowing said gas to flow when set to an on position; and
a CPU for controlling the first and second solenoid valves, said CPU setting said first solenoid valve in said on position and said second solenoid valve in an off position when said curing apparatus is operating and setting said first solenoid valve in an off position and said second solenoid valve in said on position when said curing apparatus is not operating.

### Claim 2 (depends on 1)

The system of claim 1 further comprising:
a third solenoid valve connected to said curing apparatus and a drain, said third solenoid valve being in an on position when said second solenoid valve is in said on position and being in an off position when said second solenoid valve is in said off position.

### Claim 3 (depends on 2)

The system of claim 2 wherein said gas is clean dry air.

### Claim 4 (depends on 1)

The system of claim 1 wherein said gas is clean dry air.

### Claim 5 (depends on 1)

The system of claim 1 wherein said cooling water is deionized water.

### Claim 6 (depends on 1)

The system of claim 1 wherein said curing apparatus is a UV curing apparatus.