# US 5,705,741 A · Constant-force profilometer with stylus-stabilizing sensor assembly, dual-view optics, and temperature drift compensation > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 5,705,741 A - Document ID: US5705741A - Status: Granted - Kind: A - Application number: 08/362,818 - Filed: 1994-12-22 - Granted: 1998-01-06 - Earliest claimed: 1994-12-22 - Assignees: Tencor Instruments - Inventors: Steven G. Eaton; Rusmin Kudinar; William R. Wheeler - Web page: https://patentgrep.com/patent/US5705741A ## CPC - G01B 3/008: {Arrangements for controlling the measuring force} - G01B 7/34: for measuring roughness or irregularity of surfaces - G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS ## Abstract A profilometer has a constant force mechanism for biasing of the stylus arm. The mechanism has a centrally-aligned configuration of the moving magnet relative to the magnetic coil and also has a magnetic shield isolating these elements from other ferromagnetic materials in the assembly. The moving magnet is made of a material that is hard magnetically and the magnetic shield is made of a series of low hysteresis, high permeability materials. The force thus generated by the stylus biasing device is very linear with the drive current upon the magnetic coil at any particular position of the stylus, thereby allowing for control and predictability of the stylus force upon the surface to be profiled. This predictability is used for dynamic stylus force adjustments during profiling of a specimen. The profilometer is also equipped with a balanced, spring-loaded stylus-stabilizing sensor assembly, task-specific dual-view optics for protection of the delicate stylus assembly, and a temperature drift compensator. ## Claims ### Claim 1 A profilometer for microstructures comprising, an elongated stylus arm having a stylus tip mounted thereon for contact with a specimen, said arm being substantially rigid when the tip is in contact with and moved over the specimen, stylus displacement measuring means rigidly connected to said arm to provide a current position signal to indicate a current position of the stylus tip when the tip moves over the specimen, a stylus force biasing means operably connected to the stylus arm for urging the stylus tip into contact with the specimen, and feedback means in response to the current position signal from the stylus displacement measuring means for controlling the stylus force biasing means to apply a desired level of force to the specimens, said force being a function of the current position of the stylus tip. ### Claim 2 (depends on 1) The profilometer of claim 1 wherein the stylus force biasing means comprises, a coil having a center bore and generating a magnetic field, a lever with a first end operably connected to the stylus arm and a second end having a ferromagnetic tip spaced apart from the coil but in communication with the magnetic field, whereby the magnetic field actuates the lever. ### Claim 3 (depends on 2) The profilometer of claim 2 wherein the ferromagnetic tip is composed of a hard magnetic material. ### Claim 4 (depends on 2) The profilometer of claim 2 wherein the ferromagnetic tip is aligned with the central axis of the coil and balanced within the ambient magnetic environment of the assembly. ### Claim 5 (depends on 2) The profilometer of claim 2 wherein the ferromagnetic tip is nearly touching the coil at its closest position to the coil. ### Claim 6 (depends on 2) The profilometer of claim 2 wherein the ferromagnetic tip enters the center bore of the coil at its closest position to the coil. ### Claim 7 (depends on 1) The profilometer of claim 1 wherein the feedback means comprises, a signal conditioning circuit for selecting and storing first analog signals generated by the stylus displacement measuring means, the analog signals corresponding to vertical positions of the stylus tip to form data points, an analog-to-digital converter for converting the first analog signals to digital signals, a digital signal processor for generating a polynomial curve for data points collected while the stylus tip is not engaged, the curve being adjusted by a steady signal offset to represent the desired force upon the stylus tip while contacting the specimen, the processor providing modulation of the signals for the positions on the specimen to conform to the adjusted curve, a digital-to-analog converter for converting the modulated signals to second analog signals, and a drive circuit for using the second analog signals to modulate the stylus force biasing means for the positions on the specimen. ### Claim 8 (depends on 1) The profilometer of claim 1 further comprising a stylus-stabilizing sensor assembly, the sensor assembly comprising, a movable support body operably connected to the stylus arm, the support body attached to an end piece with a pivot shaft at a first end and a stabilizing arm with a ball at a second end, the ball and two ends of the pivot shaft defining a triangle within which lies a lift point and the mass center of the support body, means for lifting and lowering the support body at the lift point such that the support body rotates on the pivot shaft and also lifts the stylus arm out of contact with the specimen, and a fixed flat pad positioned below the support body for contact with the ball when the support body is lowered. ### Claim 9 (depends on 8) The profilometer of claim 8 wherein the pivot shaft further comprises, a first and a second hardened metal pin mounted in the end piece along a pivot shaft axis, a first and a second annular bearing each having at least one toroidal surface, each annular bearing contacting one of the metal pins along its toroidal surface and supporting one of the metal pins, a fixed end bearing axially locating the first metal pin, and a spring-loaded end bearing applying axial force to the second metal pin. ### Claim 10 (depends on 9) The profilometer of claim 9 further comprising, a spring mounted on the end piece between the metal pins and along the pivot shaft axis, the spring urging the pins into contact with the annular bearings as the support body is lowered. ### Claim 11 (depends on 9) The profilometer of claim 9 wherein the ball, bearings, and flat pad are made of sapphire and the metal pins are made of polished hardened steel alloy. ### Claim 12 (depends on 8) The profilometer of claim 8 wherein the points of the triangle define small contact points which are finely finished surfaces of hard, high modulus materials. ### Claim 13 (depends on 9) The profilometer of claim 9 wherein the pivot shaft axis is positioned at a 20.degree. angle from horizontal and the means for lifting and lowering the support body causes movement of the support body along a slanted arcuate path. ### Claim 14 (depends on 1) The profilometer of claim 1 further comprising a dual-view optical system for viewing of the specimen, the optical system comprising, a first light source incident upon the specimen from directly above the specimen, a second light source incident upon the specimen from a side angle, a top-view collection optical path associated with the first light source, a side-view collection optical path associated with the second light source, a switchable mirror having a first position for selecting the top-view optical path and a second position for selecting the side-view optical path. ### Claim 15 (depends on 14) The profilometer of claim 14 further comprising, means for lifting the stylus arm out of contact with the specimen, the means for lifting the stylus arm operably connected to the switchable mirror such that lifting of the stylus arm selects the first position of the switchable mirror and lowering of the stylus arm selects the second position of the switchable mirror. ### Claim 16 (depends on 14) The profilometer of claim 14 wherein the second light source is incident upon the specimen from an angle of approximately 45.degree.. ### Claim 17 (depends on 1) The profilometer of claim 1 further comprising a temperature drift compensator having, a temperature measurement device for measuring air temperature within the profilometer and producing temperature measurement signals as a function of the air temperature, and a signal processing means storing preprogrammed information regarding temperature impulse response of the profilometer, the signal processing means for (a) receiving the temperature measurement signals from the temperature measurement device, and receiving vertical measurement signals from the stylus displacement measurement means, (b) compensating the vertical measurement signals for vertical offset due to temperature changes, and (c) compensating the vertical measurement signals for vertical gain due to temperature changes. ### Claim 18 (depends on 17) The profilometer of claim 17 wherein the preprogrammed information stored in the signal processing means regarding temperature impulse response has been derived from exposure of the profilometer to a sudden ambient temperature change and a measurement of vertical offset and vertical gain for a given vertical measurement. ### Claim 19 (depends on 1) The profilometer of claim 1, wherein said feedback means includes a device storing a plurality of reference positions of the tip, wherein said feedback means controls the stylus force biasing means in response to the stored reference positions. ### Claim 20 (depends on 1) The profilometer of claim 1, wherein said feedback means comprises a digital circuit. ### Claim 21 (depends on 1) The profilometer of claim 1, wherein said feedback means controls the desired level of force irrespective of any actual force between the stylus tip and the specimen. ### Claim 22 A profilometer for microstructures comprising, an elongated stylus arm having a stylus mounted thereon for contact with a specimen, the stylus arm associated with a stylus displacement measuring means, a magnetic stylus force biasing means operably connected to the stylus arm for urging the stylus tip into contact with the specimen, feedback means in electrical communication with the stylus displacement measuring means for electrically controlling the magnetic stylus force biasing means to apply a constant desired level of force to the specimen, and a magnetic shield surrounding the stylus force biasing means, the magnetic shield comprising, a primary shield of low hysteresis, high permeability material shaped to closely house the coil, and a secondary shield of low hysteresis, high permeability material shaped to substantially enclose the primary shield, the coil, and a portion of the lever having the ferromagnetic tip. ### Claim 23 (depends on 22) The profilometer of claim 22 wherein the primary shield is a cup composed of a ferrite material. ### Claim 24 (depends on 23) The profilometer of claim 23 wherein the ferrite material is powdered iron. ### Claim 25 (depends on 22) The profilometer of claim 22 wherein the secondary shield is a foil cylinder positioned symmetrically about the primary shield and the coil. ### Claim 26 (depends on 25) The profilometer of claim 25 wherein the foil is a high permeability nickel-iron alloy. ### Claim 27 (depends on 22) The profilometer of claim 22 wherein the primary and secondary shields are spaced apart with nonmagnetic spacers. ### Claim 28 A constant-force profilometer for microstructures comprising, a stylus arm for step-height measurements of a specimen, said arm being substantially rigid when it is in contact with and moved over the specimen, a displacement transducer rigidly connected to the stylus arm, said transducer having means for providing a signal to indicate a current position of the stylus arm when the stylus arm moves over the specimen, a stylus force biasing means operably connected to the stylus arm for urging the stylus tip into contact with the specimen, and feedback means responsive to the signal from the transducer for controlling the stylus force biasing means to apply a desired level of force to the specimen, said force being a function of the current position of the stylus tip, said feedback means including a digital circuit. ### Claim 29 (depends on 28) The profilometer of claim 28 wherein the feedback means comprises, a signal conditioning circuit for selecting and storing first analog signals generated by the motion transducer, the analog signals corresponding to step-heights, to form data points, an analog-to-digital converter for converting the first analog signals to digital signals, a digital signal processor for generating a polynomial curve for data points collected while the stylus tip is not engaged, the curve being adjusted by a steady signal offset to represent the desired force upon the stylus tip while contacting the specimen, the processor providing modulation of the signals for the positions on the specimen to conform to the adjusted curve, a digital-to-analog converter for converting the modulated signals to second analog signals, and a coil drive circuit for using the second analog signals to modulate current in the coil for the positions on the specimen. ### Claim 30 (depends on 28) The profilometer of claim 28, further comprising a support block having opposed forward and rearward sides and a central region with a pivot therebetween mounted for turning on an axis, the support block supporting the stylus arm on the forward side, said rearward side attached to the transducer, wherein the pivot is a flexural pivot. ### Claim 31 (depends on 28) The profilometer of claim 28 further comprising a magnetic shield of low hysteresis, high permeability material surrounding the coil and the ferromagnetic tip, the magnetic shield axially-aligned with the coil and having a slot for penetration and movement of the lever. ### Claim 32 (depends on 31) The profilometer of claim 31 wherein the magnetic shield comprises, a primary shield of low hysteresis, high permeability material shaped to closely house the coil, and a secondary shield of low hysteresis, high permeability material shaped to substantially enclose the primary shield, the coil, and a portion of the lever having the ferromagnetic tip. ### Claim 33 (depends on 32) The profilometer of claim 32 wherein the primary and secondary shields are spaced apart with nonmagnetic spacers. ### Claim 34 (depends on 32) The profilometer of claim 32 wherein the primary shield is a cup composed of a ferrite material. ### Claim 35 (depends on 32) The profilometer of claim 32 wherein the secondary shield is a foil cylinder composed of a high permeability nickel-iron alloy. ### Claim 36 (depends on 32) The profilometer of claim 32, wherein the secondary shield is positioned symmetrically about the primary shield, the coil, and the portion of the lever having the ferromagnetic tip. ### Claim 37 (depends on 28) The profilometer of claim 28 wherein the ferromagnetic tip is composed of a hard magnetic material. ### Claim 38 (depends on 28) The profilometer of claim 28 wherein the ferromagnetic tip is positioned directly above the pivot member. ### Claim 39 (depends on 28) The profilometer of claim 28 further comprising a stylus-stabilizing sensor assembly, the sensor assembly comprising, a movable support body operably connected to the stylus arm, the support body attached to an end piece with a pivot shaft at a first end and a stabilizing arm with a ball at a second end, the ball and two ends of the pivot shaft defining a triangle within which lies a lift point and the mass center of the support body, a spring mounted on the end piece along a pivot shaft axis, the spring urging the support body downward, means for lifting and lowering the support body at the lift point such that the support body rotates on the pivot shaft and also lifts the support block, and a fixed flat pad positioned below the stabilizing arm for contact with the ball when the support body is lowered. ### Claim 40 (depends on 39) The profilometer of claim 39 wherein the pivot shaft further comprises, a first and a second hardened metal pin mounted in the end piece along the pivot shaft axis, a first and a second annular bearing each having at least one toroidal surface, each annular bearing contacting one of the metal pins along its toroidal surface and supporting one of the metal pins, a fixed end bearing axially locating the first metal pin, and a spring-loaded end bearing applying axial force to the second metal pin. ### Claim 41 (depends on 28) The profilometer of claim 28 further comprising a dual view optical system for viewing of the specimen, the optical system comprising, a first light source incident upon the specimen from directly above the specimen, a second light source incident upon the specimen from a side angle, a top-view collection optical path associated with the first light source, a side-view collection optical path associated with the second light source, a switchable mirror having a first position for selecting the top-view optical path and a second position for selecting the side-view optical path. ### Claim 42 (depends on 41) The profilometer of claim 41 further comprising, means for lifting the stylus arm out of contact with the specimen, the means for lifting the stylus arm operably connected to the switchable mirror such that lifting of the stylus arm selects the first position of the switchable mirror and lowering of the stylus arm selects the second position of the switchable mirror. ### Claim 43 (depends on 28) The profilometer of claim 28 further comprising a temperature drift compensator having: a temperature measurement device for measuring air temperature within the profilometer and producing temperature measurement signals as a function of the air temperature, and a signal processing means storing preprogrammed information regarding temperature impulse response of the profilometer, the signal processing means for (a) receiving the temperature measurement signals from the temperature measurement device, and receiving vertical measurement signals from the motion transducer, (b) compensating the vertical measurement signals for vertical offset due to temperature changes, and (c) compensating the vertical measurement signals for vertical gain due to temperature changes. ### Claim 44 (depends on 43) The profilometer of claim 43 wherein the preprogrammed information stored in the signal processing means regarding temperature impulse response has been derived from exposure of the profilometer to a sudden ambient temperature change and a measurement of vertical offset and vertical gain for a given vertical measurement. ### Claim 45 A constant-force profilometer comprising, an elongated stylus arm having a stylus tip mounted for contact with a specimen in accord with desired force signals, a magnetic stylus force biasing means having a current-carrying solenoidal coil, the stylus force biasing means operably connected to the stylus arm for urging the stylus tip into contact with the specimen, a stylus displacement measuring means associated with the stylus arm, the displacement measuring means producing a displacement analog signal, a signal conditioning circuit for selecting and storing first analog signals corresponding to vertical positions to form data points, an analog-to-digital converter for converting the first analog signals to digital signals, a digital signal processor means for converting displacement signals to force signals and comparing with desired force signals and for generating a polynomial curve for data points collected while the stylus tip is not engaged, the curve being adjusted by a steady signal offset to establish the desired force signals, the processor providing modulation of the force signals for the positions on the specimen to conform to the adjusted curve, a digital-to-analog converter for converting the modulated signals to second analog signals, and a coil drive circuit for using the second analog signals to modulate current in the solenoidal coil for the positions on the specimen. ### Claim 46 (depends on 45) The constant-force profilometer of claim 45 further comprising, a magnetic shield surrounding the stylus force biasing means. ### Claim 47 A method for controlling the stylus force in a profilometer having a magnetic stylus force biasing mechanism with a current-carrying force coil, the method comprising, moving a nonengaged stylus to a plurality of specified vertical positions, the stylus generating an electrical signal corresponding to step heights, reading and storing a first electrical signal corresponding to each position to form a first set of data points, generating a polynomial curve for the first set of data points, adjusting the polynomial curve by steady signal offsets to form a second set of data points comprising a second electrical signal for each position, engaging the stylus with a specimen to be profiled at a desired force level, profiling the specimen while modulating the force coil current so that the force coil current conforms to the adjusted polynomial curve for achieving the desired force levels. ### Claim 48 (depends on 47) The method of claim 47 further comprising, magnetically shielding the stylus force biasing means prior to moving the nonengaged stylus. ### Claim 49 A method for controlling the stylus force in a profilometer, the method comprising the steps of: moving a nonengaged stylus to a plurality of specified vertical positions, the stylus generating an electrical signal corresponding to step heights; providing an electrical signal corresponding to each of said vertical positions to form a first set of data points; generating from said first set of data points a second set of data points; engaging the stylus with a specimen to be profiled at a desired force level, profiling the specimen while modulating a biasing force by the stylus on the specimen as a function of the second set of data points for achieving the desired force levels. ### Claim 50 (depends on 49) The method of claim 49, further comprising: generating a polynomial curve for the second set of data points, said profiling step modulating the biasing force according to the polynomial curve. ### Claim 51 (depends on 43) The method of claim 43, further comprising: generating a polynomial curve for the first set of data points; and adjusting the polynomial curve by steady signal offsets to form an adjusted polynomial curve encompassing the second set of data points, said profiling step modulating the biasing force according to the adjusted polynomial curve. ### Claim 52 (depends on 43) The method of claim 43, said profilometer having a magnetic stylus force biasing mechanism with a current-carrying force coil, said profiling step modulating a current in the coil in order to modulate the biasing force. ### Claim 53 (depends on 52) The method of claim 52, further comprising: magnetically shielding the magnetic stylus force biasing mechanism prior to moving the nonengaged stylus. ### Claim 54 A method for controlling stylus force in a profilometer, the method comprising the steps of: providing an elongated stylus arm having a stylus tip mounted thereon for contact with a specimen and moving the tip over the specimen, said arm being substantially rigid when the tip is in contact with the specimen, providing a current position signal to indicate current position information of the stylus tip when the tip moves over the specimen by means of stylus displacement measuring means rigidly connected to said arm, and modulating a force applied by the tip to the specimen as a function of the current position information in order to apply a desired level of force to the specimen. ### Claim 55 (depends on 54) The method of claim 54, further comprising storing a plurality of reference positions of the tip, wherein said modulating step includes modulating the force as a function of the stored reference positions. ### Claim 56 (depends on 54) The method of claim 54, said modulating step including digital signal processing. ### Claim 57 (depends on 55) The method of claim 55, further comprising: moving a nonengaged stylus to a plurality of specified vertical positions, and generating an electrical signal corresponding to each of said vertical positions; wherein said storing step stores said electrical signals or signals derived therefrom. ### Claim 58 (depends on 54) The profilometer of claim 54, wherein said modulating step modulates the desired level of force irrespective of any actual force between the stylus tip and the specimen.