# US 5,705,432 A · Process for providing clean lift-off of sputtered thin film layers > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 5,705,432 A - Document ID: US5705432A - Status: Granted - Kind: A - Application number: 08/566,197 - Filed: 1995-12-01 - Granted: 1998-01-06 - Earliest claimed: 1995-12-01 - Assignees: Hughes Aircraft Company - Inventors: Kusol Lee; Tom Quach; Danny Li; Liping D. Hou; Sam Chung; Tom Y. Chi - Web page: https://patentgrep.com/patent/US5705432A ## CPC - H10P 76/202: {for lift-off processes} - Y10S 438/951: Lift-off - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS ## Abstract A unique photoresist process is provided which achieves clean and complete lift-off of a thin film layer such as a sputtered thin film formed on a photoresist which is formed above a semiconductor substrate. The process of the present invention relies on a reentrant photoresist profile which breaks the continuity of the thin film layer. Accordingly, the process of the present invention ensures a clean lift-off. The desired photoresist profile which breaks the continuity of the thin film layer can be obtained by a typical photoresist process preceded by an oxidation process that takes place on the surface of the semiconductor substrate. The oxidation process provides a thin native oxide layer with thickness ranging from about 30 to 50 .ANG.. No extra processing steps involving dielectric film deposition and etch are required to achieve clean lift-off. Nevertheless, the process of the present invention ensures the clean lift-off of the thin film layer. Accordingly, the process of the present invention provides good visual and electrical yields. ## Claims ### Claim 1 A process for achieving clean and substantially complete lift-off of a thin film layer formed over a photoresist which is formed above a semiconductor substrate having a surface, said process comprising the steps of: (a) forming a thin native oxide layer on said surface of said semiconductor substrate; (b) coating said semiconductor substrate having said thin native oxide layer formed thereon with said photoresist; (c) baking said photoresist; (d) exposing said photoresist to provide a latent pattern in said photoresist; (e) developing said photoresist to form a pattern therein using a developer which etches both said photoresist which has been exposed and said thin native oxide layer thereby forming at least one opening in said photoresist and said thin native oxide layer having sides and thereby creating at least one exposed portion of said semiconductor substrate, said developer also removing said thin native oxide layer from beneath said photoresist on said sides of said opening that has not been exposed and undercutting said photoresist on said sides of said opening that has not been exposed thereby forming a reentrant angle in the profile of said photoresist and providing a patterned photoresist; (f) depositing a thin film layer on said patterned photoresist and on said exposed portions of said semiconductor substrate; and (g) lifting-off said photoresist and said thin film layer, thereby forming a pattern in said thin film layer wherein openings in said pattern have smooth sides. ### Claim 2 (depends on 1) The process of claim 1 wherein said developer etches said photoresist on said sides of said opening that has not been exposed, from underneath said photoresist and from said sides of said photoresist. ### Claim 3 (depends on 1) The process of claim 1 wherein a single developer is employed which etches both said photoresist which has been exposed and said thin native oxide layer. ### Claim 4 (depends on 1) The process of claim 1 wherein said reentrant angle interrupts the continuity of said thin film layer. ### Claim 5 (depends on 1) The process of claim 1 wherein said thin native oxide layer remains on said surface of said semiconductor substrate after lifting-off said photoresist. ### Claim 6 (depends on 1) The process of claim 1 wherein said semiconductor substrate comprises III-V semiconductor materials. ### Claim 7 (depends on 6) The process of claim 6 wherein said semiconductor substrate is selected from the group of III-V semiconductor materials consisting of GaAs, InP, InSb, and AlAs. ### Claim 8 (depends on 1) The process of claim 1 wherein said thin native oxide layer is formed by a process comprising either exposing said surface of said semiconductor substrate to oxygen plasma or baking said semiconductor substrate at a temperature within the range of about 100.degree. to 150.degree. C. ### Claim 9 (depends on 1) The process of claim 1 wherein said thin native oxide layer has a thickness within the range of about 30 to 50 .ANG.. ### Claim 10 (depends on 1) The process of claim 1 wherein said thin film layer ranges from about 500 to 1000 .ANG. thick. ### Claim 11 (depends on 1) The process of claim 1 wherein said thin film layer is deposited using a technique selected from the group consisting of sputtering techniques and evaporation techniques. ### Claim 12 (depends on 1) The process of claim 1 wherein said thin film layer consists essentially of a metal. ### Claim 13 (depends on 12) The process of claim 12 wherein said metal is selected from the group consisting of TaN, NiCr, TiW, and Ta. ### Claim 14 (depends on 1) The process of claim 1 wherein lifting-off said photoresist is achieved by soaking in acetone said semiconductor substrate having formed thereon said thin native oxide layer, said photoresist, and said thin film layer.