# US 5,705,235 A · Process and device for production of three-dimensional structures through optically stimulated precipitation of a material from a fluidic compound

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- Number: US 5,705,235 A
- Document ID: US5705235A
- Status: Granted
- Kind: A
- Application number: 08/648,067
- Filed: 1996-09-20
- Granted: 1998-01-06
- Earliest claimed: 1993-11-19
- Assignees: Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- Inventors: Olaf Lehmann; Michael Stuke
- Web page: https://patentgrep.com/patent/US5705235A

## CPC

- C23C 16/047: {using irradiation by energy or particles}
- C23C 16/01: on temporary substrates, e.g. substrates subsequently removed by etching
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)

## Abstract

For the manufacturing using an LCVD process of a rod-shaped, three-dimensional structure extending into three dimensions, two laser beams (12, 13) are focused on a common focal point (12a) in a gaseous or liquid medium containing a compound which produces the structure material when decompounded by the laser beams. In this way, structures which extend three-dimensionally may also be made from minimally absorbent materials which are essentially transparent. This additionally allows for good control of the direction of the growth of the structure.

## Claims

### Claim 1

A method for generating a structure on a surface of a substrate in which the structure material is precipitated through decompounding of a gaseous compound in the focus of a laser beam, the method comprising the steps of:
(a) focusing a first laser beam on a focus point on the substrate;
(b) focusing a second laser beam on the focus of the first laser beam so that the foci of the first and second laser beams substantially coincide; and
(c) forming a structure extending from the substrate surface by moving the coinciding foci of the first and second laser beams and substrate surface away from each other at a speed maximally equal to the precipitated material growth rate in the direction of the movement of the coinciding foci in relation to the substrate.

### Claim 2 (depends on 1)

The method of claim 1, wherein the gaseous compound produces the structure material through thermal decompounding which absorbs laser beam radiation relatively poorly.

### Claim 3

An apparatus for generating a structure on a surface of a substrate in which the structure material is precipitated through decompounding of a gaseous compound in the focus of a laser beam, the apparatus comprising:
(a) first laser means for focusing a first laser beam on a focus point on the substrate;
(b) second laser means for focusing a second laser beam on the focus of the first laser beam so that the foci of the first and second laser beams substantially coincide; and
(c) means for forming a structure extending from the substrate surface by moving the coinciding foci of the first and second laser beams and substrate surface away from each other at a speed maximally equal to the precipitated material growth rate in the direction of the movement of the coinciding foci in relation to the substrate.

### Claim 4 (depends on 3)

The apparatus of claim 3, wherein the gaseous compound produces the structure material through thermal decompounding which absorbs laser beam radiation relatively poorly.

### Claim 5 (depends on 3)

The apparatus of claim 3, further comprising:
a chamber for reception of the substrate;
means for generating within the chamber an atmosphere containing the gaseous compound;
means for supporting the substrate in the chamber;
means for moving the substrate in relation to the focal point of the first laser beam; and
means for moving the focal point of the first laser beam away from the substrate surface.

### Claim 6 (depends on 5)

The apparatus of claim 5, comprising a single laser and a beam splitter for generating the first and second laser beams.

### Claim 7 (depends on 5)

The apparatus of claim 5, comprising a first laser for generating the first laser beam and a second laser for generating the second laser beam.

### Claim 8 (depends on 7)

The apparatus of claim 7, wherein the first and second lasers have different emission wavelengths.