# US 5,705,079 A · Method for forming spacers in flat panel displays using photo-etching > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 5,705,079 A - Document ID: US5705079A - Status: Granted - Kind: A - Application number: 08/587,732 - Filed: 1996-01-19 - Granted: 1998-01-06 - Earliest claimed: 1996-01-19 - Assignees: Micron Display Technology, Inc. - Inventors: Jason B. Elledge - Web page: https://patentgrep.com/patent/US5705079A ## CPC - H01J 9/242: {Spacers between faceplate and backplate} - C03C 15/00: Surface treatment of glass, not in the form of fibres or filaments, by etching (etching or surface-brightening compositions, in general C09K13/00) - C03C 23/002: {by ultraviolet light} - C03C 23/007: {by thermal treatment} - H01J 31/123: {Flat display tubes} - H01J 2329/8625: Spacing members - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - C03C: CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS ## Abstract Photoetchable glass is used to form spacer elements for large area field emission displays. Frit dots are placed onto a substrate. A sheet of photo etchable glass is exposed to UV light using a mask such that the UV light exposes the etchable areas and does not expose the areas which will form the spacers. The etchable glass is then heat treated to crystallize the UV exposed areas and to tailor the coefficient of thermal expansion. Next the glass is adhered to the frit coated substrate and the UV exposed areas etched away leaving spacers adhered to frit dots. ## Claims ### Claim 1 A method for making spacer elements for large area field emission displays comprising the steps of: forming a number of adhesive areas on a substrate; exposing a sheet of photo etchable material to light through a mask such that the exposure of light defines areas which will form spacers and areas to be later removed; adhering the areas which will form the spacers to the adhesive areas on the substrate; and removing the areas to be removed from the photo etchable material, thereby leaving spacers adhered to said substrate at the adhesive areas. ### Claim 2 (depends on 1) A method according to claim 1 wherein said material is an amorphous photosensitive glass. ### Claim 3 (depends on 2) A method according to claim 2 further comprising steps of exposing the glass to ultraviolet light and heat treating the glass to produce a metal colloid with crystalline nuclei of extremely fine structure, and wherein the removing step includes etching the glass with an etchant. ### Claim 4 (depends on 1) A method according to claim 1 wherein said removing step includes etching with an etchant that includes hydrofluoric acid (HF). ### Claim 5 (depends on 2) A method according to claim 2 further comprising heat treating said glass at a temperature in the range of from 500.degree. to 600.degree. C. for from 45 to 80 minutes. ### Claim 6 (depends on 1) A method according to claim 1 wherein said step of adhering includes heating the substrate and adhesive areas to temperatures in the range of 480.degree. C. to 525.degree. C. for a time period in the range of about 2 hours. ### Claim 7 (depends on 1) A method according to claim 1 wherein the spacers have a length between 125 and 625 microns and a diameter between 12.5 and 50 microns. ### Claim 8 (depends on 1) A method according to claim 1 wherein said spacers have a substantially truncated conical configuration. ### Claim 9 A method comprising the steps of: forming a number of frit regions on a substrate; exposing a sheet of photoetchable glass to UV light through a mask such that the UV light exposes etchable areas and does not expose areas which will form spacer elements; heat treating the exposed etchable glass to crystallize the exposed areas; adhering the exposed and treated etchable glass to the substrate with the frit regions formed thereon; and etching the UV exposed areas such that spacers are adhered to the frit regions. ### Claim 10 (depends on 9) The method of claim 9 wherein the substrate is part of an anode screen, the method further including sealing a cathode to the anode screen such that the spacers extend from the substrate to the cathode, the method forming a flat panel display. ### Claim 11 (depends on 1) A method according to claim 1, wherein the substrate is one of an anode and a cathode for a field emission display device. ### Claim 12 (depends on 11) A method according to claim 11, further comprising a step, after the removing step, of assembling the one of the anode and the cathode having the spacers adhered thereon with the other of the anode and the cathode such that the spacers extend from the anode to the cathode. ### Claim 13 (depends on 12) A method according to claim 12, wherein the assembling step includes providing the anode and cathode in a closely spaced parallel arrangement and evacuating the space between the anode and the cathode. ### Claim 14 (depends on 11) A method according to claim 11, wherein the anode has a glass face plate with phosphor formed thereon.