# US 5,705,044 A · Modular sputtering machine having batch processing and serial thin film sputtering

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- Number: US 5,705,044 A
- Document ID: US5705044A
- Status: Granted
- Kind: A
- Application number: 08/511,665
- Filed: 1995-08-07
- Granted: 1998-01-06
- Earliest claimed: 1995-08-07
- Assignees: Akashic Memories Corporation
- Inventors: Hudson A. Washburn; Jarrett L. Hamilton
- Web page: https://patentgrep.com/patent/US5705044A

## CPC

- H10P 72/0452: {characterised by the layout of the process chambers}
- C23C 14/352: {using more than one target (C23C14/56 takes precedence)}
- C23C 14/568: {Transferring the substrates through a series of coating stations (C23C14/562 takes precedence)}
- H01J 37/32779: {of batches of workpieces}
- H10P 72/0464: {characterised by the construction of the transfer chamber}
- H10P 72/0468: {comprising a chamber adapted to a particular process}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

A flexible, modular sputtering machine comprises a number of batch process stations which define a batch process path. At least one of the batch process stations is a sputtering station including a serial sputtering chamber and an interchamber disk transfer mechanism. The disks move in batches along the process path, being individually processed only at the sputtering chamber. A preferred sputtering source is also provided which allows selective sputtering of multiple materials within a single sputtering chamber. The selection of sputtering materials is controlled by varying the magnetic field within the sputtering chamber. A cassette for transporting and holding batches of disk substrates during batch processing allows individual access to the disks for the interchamber disk transfer mechanism.

## Claims

### Claim 1

A sputtering machine comprising:
a plurality of successive batch process stations defining a batch path, each process station comprising:
walls defining at least one batch chamber disposed along the batch path, the walls sealably coupleable with at least one adjacent process station to isolate the batch path from a surrounding environment; and
a batch driver to advance batches of substrates along the batch path; and
a plurality of valves disposed between successive process stations and at a beginning and an end of the batch path;
wherein two of the process stations comprise sputtering stations having a sputtering chamber disposed off the batch path, an interchamber transfer mechanism which transfers individual substrates between the batch chamber of the sputtering station and the sputtering chamber, and an environmental control system to maintain at least one of temperature, pressure, and gas composition within the batch chamber of the sputtering station and within the sputtering chamber so as to avoid evacuating the sputtering chamber individually for each substrate;
wherein the environmental systems of the two sputtering stations independently control at least one of temperature, pressure, and internal gas composition for simultaneous sputtering with different deposition environments within the two sputtering chambers, the batch chambers of the sputtering stations being isolatable by the valves and sealingly coupled along the batch path so as to avoid evacuating a batch chamber from ambient pressure individually for each sputtering station; and
wherein a process station is disposed along the batch path between the sputtering stations, the process station capable of selectively duplicating sputtering environments of each of the adjacent sputtering stations prior to sequentially opening valves between the process station and the adjacent sputtering stations to avoid altering the sputtering environments when batches of disks advance between sputtering stations.

### Claim 2 (depends on 1)

A sputtering machine as claimed in claim 1, wherein the batch path comprises a horizontal cassette path, and wherein the disk transfer mechanism lifts a disk upward from a cassette to the sputtering chamber.

### Claim 3 (depends on 2)

A sputtering machine as claimed in claim 2, wherein the interchamber transfer mechanism selects a disk from the cassette based on a location of the cassette along the cassette path.

### Claim 4 (depends on 3)

A sputtering machine as claimed in claim 3, wherein the batch driver of at least one sputtering station advances independently of the batch drivers of each successive process station.

### Claim 5 (depends on 1)

A sputtering machine as claimed in claim 1, wherein the sputtering chamber is disposed above the batch chamber, and a heating chamber is disposed above the sputtering chamber.

### Claim 6 (depends on 5)

A sputtering machine as claimed in claim 5, wherein the interchamber transfer mechanism comprises a blade which lifts a disk from a cassette to the heating chamber and lowers the disk from the heating chamber to the sputtering chamber.

### Claim 7 (depends on 6)

A sputtering machine as claimed in claim 6, further comprising an inner diameter disk holder disposed in the sputtering chamber.

### Claim 8 (depends on 1)

A sputtering machine as claimed in claim 1, wherein the process stations are modular and define an alternative batch path for depositing an alternative sputtered layer structure when disposed in an alternative order.

### Claim 9 (depends on 8)

A sputtering machine as claimed in claim 8, wherein each valve comprises a gate valve which is sealingly attached to at least one process station.

### Claim 10

A sputtering machine as claimed in 1, wherein the sputtering chamber comprises a sputtering source having an inner sputtering target, an outer sputtering target disposed outside of the inner target, the outer target being formed of a material different than the inner target, and a concentric coil magnetron disposed behind the inner and outer targets.

### Claim 11 (depends on 1)

A sputtering machine as claimed in claim 1, wherein the two sputtering stations comprise a metal deposition station adapted for sputtering at least one of a chromium underlayer and a magnetic recording layer, and an overlayer deposition station disposed along the batch path after the metals deposition station, the overlayer deposition station adapted for depositing an overlayer comprising carbon.

### Claim 12 (depends on 11)

A sputtering machine as claimed in claim 11, wherein the process station disposed along the batch path between the metal and carbon deposition stations is adapted for reducing the temperature of the batches of substrates.

### Claim 13 (depends on 12)

A sputtering machine as claimed in claim 12, further comprising a process station disposed along the batch path before the metal deposition station for pre-heating the batches of substrates.

### Claim 14 (depends on 1)

A sputtering machine as claimed in claim 1, wherein the sputtering station further comprises an individual substrate heating-chamber disposed adjacent the sputtering chamber and off the batch path, wherein the interchamber transfer mechanism transfers substrates from the heat chamber, into the sputtering chamber through a first substrate passage, through the sputtering chamber, and out from the sputtering chamber through a second substrate passage which is different than the first substrate passage.

### Claim 15

A thin film deposition system comprising:
first and second deposition stations, each deposition station including walls defining a batch chamber and a deposition chamber, and a mechanism to transfer substrates sequentially between the batch chamber and the deposition chamber;
a batch drive system to advance batches of the substrates along a batch path between the batch chambers of the first and second deposition stations, the deposition chambers being disposed off the batch path;
a plurality of valves to pass the batches of substrates, the valves disclosed at a beginning of the batch path, at an end of the batch path, and between the first and second deposition stations so that the batch path is isolatable from the surrounding environment, and so that the first and second deposition stations are isolatable from each other;
wherein each deposition station further comprises an environmental control system for maintaining a station environment within the batch chamber and the deposition chamber during deposition and during transfer of the substrates between the chambers of the deposition station, and wherein the environmental control systems of the first and second deposition stations are capable of providing different environments when the valves isolate the deposition stations; and
wherein a process station is disposed along the batch path between the deposition stations, the process station capable of selectively duplicating the station environment of the first and second deposition stations prior to sequentially opening valves between each deposition station and the process station to avoid altering the station environments when batches of disks advance between the deposition stations.

### Claim 16 (depends on 15)

A thin film deposition system as claimed in claim 15, further comprising:
an inner sputtering target within a deposition chamber;
an outer sputtering target within the deposition chamber;
a concentric coil magnetron disposed behind the inner target and the outer target, the magnetron having an inner coil and an outer coil; and
a power supply capable of applying a first electrical current to the inner coil and a second electrical current to the outer coil so as to sputter the inner target without sputtering the outer target, the power supply further capable of applying a third electrical current to the outer coil without energizing the inner coil so as to sputter the outer target without sputtering the inner target;
wherein the outer target is disposed around the inner target, the outer target being formed of a different material than the inner target.

### Claim 17 (depends on 16)

A thin film deposition system as claimed in claim 16, wherein at least one of the inner coil and the outer coil comprises a plurality of concentric sub-coils to improve utilization of at least one of the inner target and the outer target, and wherein the power source is further capable of providing a first sub-coil current to the first sub-coil and a second sub-coil current to the second sub-coil, the second sub-coil current oscillating between positive and negative relative to the first sub-coil current to sweep a plasma over the surface of the improved utilization target between an area adjacent first sub-coil and an area adjacent the second sub-coil.

### Claim 18 (depends on 16)

A thin film deposition system as claimed in claim 16, wherein at least one of the inner target and the outer target includes a conical sputtering surface.

### Claim 19 (depends on 16)

A thin film deposition system as claimed in claim 16, further comprising an inner diameter disk holder extending forward through the inner target, the disk holder being positioned to hold the substrate coaxially with the magnetron.

### Claim 20 (depends on 19)

A thin film deposition system as claimed in claim 19, wherein the disk holder includes a gas supply system which distributes ionizing gas coaxially with the magnetron.

### Claim 21 (depends on 19)

A thin film deposition system as claimed in claim 19, wherein the disk holder advances axially to engage a disk.

### Claim 22 (depends on 16)

A thin film deposition system as claimed in claim 16, wherein one of the inner target and the outer target comprises an underlayer material and the other comprises a magnetic recording layer material.

### Claim 23 (depends on 15)

A thin film deposition machine as claimed in claim 15, wherein each of the deposition stations are releasably sealable against a plurality of alternative stations so that a sequence of the stations along the batch path can be rearranged to deposit alternative film structures on the substrates.

### Claim 24

A thin film deposition machine comprising:
a first valve for passing and sealing between batches of substrates, the first valve defining a beginning of a batch path;
a load station along the batch path after the first valve, the load station sealably engaging the first valve, the load station including walls defining a batch chamber disposed along the batch path and an environmental control system adapted to reduce the pressure and raise the temperature of the batches of substrates;
a metals deposition station, adapted for deposition of an underlayer comprising chromium over the substrate and a magnetic layer over the underlayer, the metals station having walls defining a batch chamber disposed along the batch path after the load station, a plurality of chambers for heating and deposition of the underlayer and the magnetic layer on individual substrates, the plurality of chambers disposed off the batch path, and a mechanism for transferring individual substrates of the batches of substrates from the batch path, through each of the plurality of chambers, and back to the batch path;
a cooling station, comprising walls defining a batch chamber disposed along the batch path and adapted to lower the temperature of the batches of substrates after deposition of the underlayer and the magnetic layer, the cooling station capable of selectively duplicating differing deposition environments of adjacent deposition stations to avoid altering the deposition environments when batches of disks advance along the batch path;
a carbon deposition station adapted for deposition of an overlayer comprising carbon over the magnetic layer, the carbon station having walls defining a batch chamber disposed along the batch path after the cooling station, a deposition chamber disposed off the batch path, and a mechanism for transferring the individual substrates of the batches of substrates from the batch path to the deposition chamber; and
an unload station disposed along the batch path after the carbon station, the unload station comprising walls defining a batch chamber and adapted to raise pressure for the batches of substrate;
a last valve disposed along the batch path after the carbon station for passing and sealing between batches of substrates, the last valve defining an end of the batch path; and
a plurality of valves disposed along the batch path between each successive station for isolating the batches of substrates therein, the batch chambers along the batch path sealingly engageable with adjacent batch chambers so that the batches of substrates are isolated from a surrounding environment between the beginning and the end of the batch path.

### Claim 25 (depends on 24)

A thin film deposition machine as claimed in claim 24, wherein each of the deposition stations are releasably sealable against a plurality of alternative process stations so that a sequence of the process stations along the batch path can be rearranged to deposit alternative film structures on the substrates.

### Claim 26

A sputtering machine comprising:
a plurality of successive batch process stations defining a batch path, each process station comprising:
walls defining at least one batch chamber disposed along the batch path, the walls sealably coupleable with at least one adjacent process station to isolate the batch patch from a surrounding environment; and
a batch driver to advance batches of substrates along the batch path; and
a plurality of valves disposed between successive process stations and at a beginning and an end of the batch path;
wherein two of the process stations comprise a metal deposition station adapted for sputtering at least one of a chromium underlayer and a magnetic recording layer, and an overlayer deposition station disposed along the batch path after the metals deposition station, the overlayer deposition station adapted for sputtering an overlayer comprising carbon, the sputtering stations having a sputtering chamber disposed off the batch path, an interchamber transfer mechanism which transfers individual substrates between the batch chamber of the sputtering station and the sputtering chamber, and an environmental control system to maintain at least one of temperature, pressure, and gas composition within the batch chamber of the sputtering station and within the sputtering chamber so as to avoid evacuating the sputtering chamber individually for each substrate;
wherein the environmental systems of the two sputtering stations independently control at least one of temperature, pressure, and internal gas composition for simultaneous sputtering with different deposition environments within the two sputtering chambers, the batch chambers of the sputtering stations being isolatable by the valves and sealingly coupled along the batch path so as to avoid evacuating a batch chamber from ambient pressure individually for each sputtering station;
wherein a process station is disposed along the batch path between the metal and carbon deposition stations for reducing the temperature of the batches of substrates, the cooling station isolatable from each of the deposition stations by the valves; and
wherein the cooling station includes an environmental control system capable of selectively duplicating a sputtering environment of an adjacent sputtering station prior to opening a valve between the cooling station and the adjacent sputtering station.

### Claim 27

A thin film deposition system comprising:
first and second deposition stations, each deposition station including walls defining a batch chamber and a deposition chamber, a mechanism to transfer substrates sequentially between the batch chamber and the deposition chamber, and an environmental control system for maintaining a deposition environment within the batch chamber and the deposition chamber, the environmental control systems capable of maintaining different deposition environments at the first and second deposition stations for deposition of different materials;
a plurality of batch process stations disposed before and after the first and second deposition stations and between the batch chambers of the first and second deposition stations along a batch path;
a batch drive system to advance batches of the substrates along the batch path;
a plurality of valves disposed at a beginning of the batch path, at an end of the batch path, and between adjacent deposition stations and batch process stations so that the batch path is isolatable from the surrounding environment, and so that the first and second deposition stations and the batch process stations are isolatable from each other;
wherein the batch process station adjacent to the deposition stations are capable of duplicating the adjacent deposition environment before the valves are opened to maintain the differing first and second deposition environments while batches of disks advance along the batch path.